JPS5387983A - Crystal growing device - Google Patents
Crystal growing deviceInfo
- Publication number
- JPS5387983A JPS5387983A JP342077A JP342077A JPS5387983A JP S5387983 A JPS5387983 A JP S5387983A JP 342077 A JP342077 A JP 342077A JP 342077 A JP342077 A JP 342077A JP S5387983 A JPS5387983 A JP S5387983A
- Authority
- JP
- Japan
- Prior art keywords
- crystal growing
- growing device
- crucible
- heater
- temp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE:To improve thermal efficiency and facilitate temp. control of a melt by closely attaching all or part of the outer surface of a crucible to the inner surface of a resistance heater directly or indirectly through a packing and allowing the crucible to be supported by the heater.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP342077A JPS5918357B2 (en) | 1977-01-13 | 1977-01-13 | crystal growth equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP342077A JPS5918357B2 (en) | 1977-01-13 | 1977-01-13 | crystal growth equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5387983A true JPS5387983A (en) | 1978-08-02 |
JPS5918357B2 JPS5918357B2 (en) | 1984-04-26 |
Family
ID=11556878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP342077A Expired JPS5918357B2 (en) | 1977-01-13 | 1977-01-13 | crystal growth equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5918357B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58172292A (en) * | 1982-03-30 | 1983-10-11 | Ibiden Co Ltd | Graphite heating element of pulling device of single crystal of silicon |
JPS5930794A (en) * | 1982-08-09 | 1984-02-18 | Toshiba Ceramics Co Ltd | Melting crucible device for pulling up single crystal |
-
1977
- 1977-01-13 JP JP342077A patent/JPS5918357B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58172292A (en) * | 1982-03-30 | 1983-10-11 | Ibiden Co Ltd | Graphite heating element of pulling device of single crystal of silicon |
JPS5930794A (en) * | 1982-08-09 | 1984-02-18 | Toshiba Ceramics Co Ltd | Melting crucible device for pulling up single crystal |
Also Published As
Publication number | Publication date |
---|---|
JPS5918357B2 (en) | 1984-04-26 |
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