JPS5387983A - Crystal growing device - Google Patents

Crystal growing device

Info

Publication number
JPS5387983A
JPS5387983A JP342077A JP342077A JPS5387983A JP S5387983 A JPS5387983 A JP S5387983A JP 342077 A JP342077 A JP 342077A JP 342077 A JP342077 A JP 342077A JP S5387983 A JPS5387983 A JP S5387983A
Authority
JP
Japan
Prior art keywords
crystal growing
growing device
crucible
heater
temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP342077A
Other languages
Japanese (ja)
Other versions
JPS5918357B2 (en
Inventor
Hirokuni Nanba
Takero Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP342077A priority Critical patent/JPS5918357B2/en
Publication of JPS5387983A publication Critical patent/JPS5387983A/en
Publication of JPS5918357B2 publication Critical patent/JPS5918357B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE:To improve thermal efficiency and facilitate temp. control of a melt by closely attaching all or part of the outer surface of a crucible to the inner surface of a resistance heater directly or indirectly through a packing and allowing the crucible to be supported by the heater.
JP342077A 1977-01-13 1977-01-13 crystal growth equipment Expired JPS5918357B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP342077A JPS5918357B2 (en) 1977-01-13 1977-01-13 crystal growth equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP342077A JPS5918357B2 (en) 1977-01-13 1977-01-13 crystal growth equipment

Publications (2)

Publication Number Publication Date
JPS5387983A true JPS5387983A (en) 1978-08-02
JPS5918357B2 JPS5918357B2 (en) 1984-04-26

Family

ID=11556878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP342077A Expired JPS5918357B2 (en) 1977-01-13 1977-01-13 crystal growth equipment

Country Status (1)

Country Link
JP (1) JPS5918357B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58172292A (en) * 1982-03-30 1983-10-11 Ibiden Co Ltd Graphite heating element of pulling device of single crystal of silicon
JPS5930794A (en) * 1982-08-09 1984-02-18 Toshiba Ceramics Co Ltd Melting crucible device for pulling up single crystal

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58172292A (en) * 1982-03-30 1983-10-11 Ibiden Co Ltd Graphite heating element of pulling device of single crystal of silicon
JPS5930794A (en) * 1982-08-09 1984-02-18 Toshiba Ceramics Co Ltd Melting crucible device for pulling up single crystal

Also Published As

Publication number Publication date
JPS5918357B2 (en) 1984-04-26

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