JPH01103015U - - Google Patents
Info
- Publication number
- JPH01103015U JPH01103015U JP19626187U JP19626187U JPH01103015U JP H01103015 U JPH01103015 U JP H01103015U JP 19626187 U JP19626187 U JP 19626187U JP 19626187 U JP19626187 U JP 19626187U JP H01103015 U JPH01103015 U JP H01103015U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- heater
- process chamber
- transported
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19626187U JPH01103015U (enrdf_load_stackoverflow) | 1987-12-24 | 1987-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19626187U JPH01103015U (enrdf_load_stackoverflow) | 1987-12-24 | 1987-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01103015U true JPH01103015U (enrdf_load_stackoverflow) | 1989-07-12 |
Family
ID=31486889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19626187U Pending JPH01103015U (enrdf_load_stackoverflow) | 1987-12-24 | 1987-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01103015U (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61233427A (ja) * | 1985-04-09 | 1986-10-17 | Toshiba Corp | 磁気記録媒体の製造方法 |
-
1987
- 1987-12-24 JP JP19626187U patent/JPH01103015U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61233427A (ja) * | 1985-04-09 | 1986-10-17 | Toshiba Corp | 磁気記録媒体の製造方法 |
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