JPH01123336U - - Google Patents
Info
- Publication number
- JPH01123336U JPH01123336U JP1883188U JP1883188U JPH01123336U JP H01123336 U JPH01123336 U JP H01123336U JP 1883188 U JP1883188 U JP 1883188U JP 1883188 U JP1883188 U JP 1883188U JP H01123336 U JPH01123336 U JP H01123336U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- furnace
- reduced pressure
- cvd apparatus
- reactant gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000376 reactant Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1883188U JPH01123336U (sv) | 1988-02-15 | 1988-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1883188U JPH01123336U (sv) | 1988-02-15 | 1988-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01123336U true JPH01123336U (sv) | 1989-08-22 |
Family
ID=31233821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1883188U Pending JPH01123336U (sv) | 1988-02-15 | 1988-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01123336U (sv) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5812939B2 (ja) * | 1975-05-16 | 1983-03-10 | 東レ株式会社 | スラブヤ−ンノセイゾウホウホウ |
| JPS6013960B2 (ja) * | 1975-01-23 | 1985-04-10 | コーリング・カムパニー | 取脱可能な上部構造を有したクレーン |
-
1988
- 1988-02-15 JP JP1883188U patent/JPH01123336U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013960B2 (ja) * | 1975-01-23 | 1985-04-10 | コーリング・カムパニー | 取脱可能な上部構造を有したクレーン |
| JPS5812939B2 (ja) * | 1975-05-16 | 1983-03-10 | 東レ株式会社 | スラブヤ−ンノセイゾウホウホウ |
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