JPS6310549U - - Google Patents
Info
- Publication number
- JPS6310549U JPS6310549U JP10508186U JP10508186U JPS6310549U JP S6310549 U JPS6310549 U JP S6310549U JP 10508186 U JP10508186 U JP 10508186U JP 10508186 U JP10508186 U JP 10508186U JP S6310549 U JPS6310549 U JP S6310549U
- Authority
- JP
- Japan
- Prior art keywords
- preheating tube
- reactor
- preheating
- blind plate
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10508186U JPS6310549U (sv) | 1986-07-09 | 1986-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10508186U JPS6310549U (sv) | 1986-07-09 | 1986-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6310549U true JPS6310549U (sv) | 1988-01-23 |
Family
ID=30979172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10508186U Pending JPS6310549U (sv) | 1986-07-09 | 1986-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6310549U (sv) |
-
1986
- 1986-07-09 JP JP10508186U patent/JPS6310549U/ja active Pending