JPS6186472U - - Google Patents
Info
- Publication number
- JPS6186472U JPS6186472U JP17266784U JP17266784U JPS6186472U JP S6186472 U JPS6186472 U JP S6186472U JP 17266784 U JP17266784 U JP 17266784U JP 17266784 U JP17266784 U JP 17266784U JP S6186472 U JPS6186472 U JP S6186472U
- Authority
- JP
- Japan
- Prior art keywords
- cap
- gas introduction
- reaction tube
- gas
- supply port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17266784U JPH0213494Y2 (sv) | 1984-11-14 | 1984-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17266784U JPH0213494Y2 (sv) | 1984-11-14 | 1984-11-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6186472U true JPS6186472U (sv) | 1986-06-06 |
| JPH0213494Y2 JPH0213494Y2 (sv) | 1990-04-13 |
Family
ID=30730330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17266784U Expired JPH0213494Y2 (sv) | 1984-11-14 | 1984-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213494Y2 (sv) |
-
1984
- 1984-11-14 JP JP17266784U patent/JPH0213494Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0213494Y2 (sv) | 1990-04-13 |