JPS61147274U - - Google Patents
Info
- Publication number
- JPS61147274U JPS61147274U JP2745885U JP2745885U JPS61147274U JP S61147274 U JPS61147274 U JP S61147274U JP 2745885 U JP2745885 U JP 2745885U JP 2745885 U JP2745885 U JP 2745885U JP S61147274 U JPS61147274 U JP S61147274U
- Authority
- JP
- Japan
- Prior art keywords
- flange
- reaction tube
- reaction
- exhaust side
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000003566 sealing material Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2745885U JPS61147274U (sv) | 1985-02-27 | 1985-02-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2745885U JPS61147274U (sv) | 1985-02-27 | 1985-02-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61147274U true JPS61147274U (sv) | 1986-09-11 |
Family
ID=30524431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2745885U Pending JPS61147274U (sv) | 1985-02-27 | 1985-02-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61147274U (sv) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04230022A (ja) * | 1990-06-13 | 1992-08-19 | Internatl Business Mach Corp <Ibm> | 超高真空化学蒸着反応装置 |
-
1985
- 1985-02-27 JP JP2745885U patent/JPS61147274U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04230022A (ja) * | 1990-06-13 | 1992-08-19 | Internatl Business Mach Corp <Ibm> | 超高真空化学蒸着反応装置 |