JPS61147274U - - Google Patents

Info

Publication number
JPS61147274U
JPS61147274U JP2745885U JP2745885U JPS61147274U JP S61147274 U JPS61147274 U JP S61147274U JP 2745885 U JP2745885 U JP 2745885U JP 2745885 U JP2745885 U JP 2745885U JP S61147274 U JPS61147274 U JP S61147274U
Authority
JP
Japan
Prior art keywords
flange
reaction tube
reaction
exhaust side
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2745885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2745885U priority Critical patent/JPS61147274U/ja
Publication of JPS61147274U publication Critical patent/JPS61147274U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP2745885U 1985-02-27 1985-02-27 Pending JPS61147274U (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2745885U JPS61147274U (sv) 1985-02-27 1985-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2745885U JPS61147274U (sv) 1985-02-27 1985-02-27

Publications (1)

Publication Number Publication Date
JPS61147274U true JPS61147274U (sv) 1986-09-11

Family

ID=30524431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2745885U Pending JPS61147274U (sv) 1985-02-27 1985-02-27

Country Status (1)

Country Link
JP (1) JPS61147274U (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04230022A (ja) * 1990-06-13 1992-08-19 Internatl Business Mach Corp <Ibm> 超高真空化学蒸着反応装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04230022A (ja) * 1990-06-13 1992-08-19 Internatl Business Mach Corp <Ibm> 超高真空化学蒸着反応装置

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