JPH0289828U - - Google Patents
Info
- Publication number
- JPH0289828U JPH0289828U JP16999488U JP16999488U JPH0289828U JP H0289828 U JPH0289828 U JP H0289828U JP 16999488 U JP16999488 U JP 16999488U JP 16999488 U JP16999488 U JP 16999488U JP H0289828 U JPH0289828 U JP H0289828U
- Authority
- JP
- Japan
- Prior art keywords
- quartz furnace
- core tube
- mixing chamber
- furnace core
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 5
- 238000009792 diffusion process Methods 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988169994U JPH0745954Y2 (ja) | 1988-12-28 | 1988-12-28 | 石英炉芯管装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988169994U JPH0745954Y2 (ja) | 1988-12-28 | 1988-12-28 | 石英炉芯管装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0289828U true JPH0289828U (sv) | 1990-07-17 |
JPH0745954Y2 JPH0745954Y2 (ja) | 1995-10-18 |
Family
ID=31460550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988169994U Expired - Lifetime JPH0745954Y2 (ja) | 1988-12-28 | 1988-12-28 | 石英炉芯管装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0745954Y2 (sv) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59104123A (ja) * | 1982-12-07 | 1984-06-15 | Toshiba Corp | 不純物拡散装置 |
JPS6273535U (sv) * | 1985-10-29 | 1987-05-11 | ||
JPS62278273A (ja) * | 1986-05-26 | 1987-12-03 | Nec Corp | プラズマcvd装置 |
JPS63200537A (ja) * | 1987-02-16 | 1988-08-18 | Canon Inc | 酸化シリコン膜形成装置 |
-
1988
- 1988-12-28 JP JP1988169994U patent/JPH0745954Y2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59104123A (ja) * | 1982-12-07 | 1984-06-15 | Toshiba Corp | 不純物拡散装置 |
JPS6273535U (sv) * | 1985-10-29 | 1987-05-11 | ||
JPS62278273A (ja) * | 1986-05-26 | 1987-12-03 | Nec Corp | プラズマcvd装置 |
JPS63200537A (ja) * | 1987-02-16 | 1988-08-18 | Canon Inc | 酸化シリコン膜形成装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0745954Y2 (ja) | 1995-10-18 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |