JPS61142864U - - Google Patents
Info
- Publication number
- JPS61142864U JPS61142864U JP2297885U JP2297885U JPS61142864U JP S61142864 U JPS61142864 U JP S61142864U JP 2297885 U JP2297885 U JP 2297885U JP 2297885 U JP2297885 U JP 2297885U JP S61142864 U JPS61142864 U JP S61142864U
- Authority
- JP
- Japan
- Prior art keywords
- gas introduction
- reactor
- door
- thin film
- purge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2297885U JPS61142864U (sv) | 1985-02-19 | 1985-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2297885U JPS61142864U (sv) | 1985-02-19 | 1985-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61142864U true JPS61142864U (sv) | 1986-09-03 |
Family
ID=30515784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2297885U Pending JPS61142864U (sv) | 1985-02-19 | 1985-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61142864U (sv) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933912A (sv) * | 1972-07-31 | 1974-03-28 |
-
1985
- 1985-02-19 JP JP2297885U patent/JPS61142864U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933912A (sv) * | 1972-07-31 | 1974-03-28 |
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