JPH033733U - - Google Patents
Info
- Publication number
- JPH033733U JPH033733U JP6407589U JP6407589U JPH033733U JP H033733 U JPH033733 U JP H033733U JP 6407589 U JP6407589 U JP 6407589U JP 6407589 U JP6407589 U JP 6407589U JP H033733 U JPH033733 U JP H033733U
- Authority
- JP
- Japan
- Prior art keywords
- gas introduction
- ceiling
- reaction chamber
- reaction gas
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012495 reaction gas Substances 0.000 claims 2
- 238000009792 diffusion process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000000376 reactant Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6407589U JPH033733U (sv) | 1989-06-01 | 1989-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6407589U JPH033733U (sv) | 1989-06-01 | 1989-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH033733U true JPH033733U (sv) | 1991-01-16 |
Family
ID=31594690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6407589U Pending JPH033733U (sv) | 1989-06-01 | 1989-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH033733U (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005320043A (ja) * | 2004-05-11 | 2005-11-17 | Wakon Danbooru Kk | 段ボール桁材及びその桁材を用いた紙製パレット |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01130523A (ja) * | 1987-11-17 | 1989-05-23 | Toshiba Ceramics Co Ltd | 半導体用縦型熱処理炉 |
-
1989
- 1989-06-01 JP JP6407589U patent/JPH033733U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01130523A (ja) * | 1987-11-17 | 1989-05-23 | Toshiba Ceramics Co Ltd | 半導体用縦型熱処理炉 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005320043A (ja) * | 2004-05-11 | 2005-11-17 | Wakon Danbooru Kk | 段ボール桁材及びその桁材を用いた紙製パレット |