JPS61124764U - - Google Patents
Info
- Publication number
- JPS61124764U JPS61124764U JP870385U JP870385U JPS61124764U JP S61124764 U JPS61124764 U JP S61124764U JP 870385 U JP870385 U JP 870385U JP 870385 U JP870385 U JP 870385U JP S61124764 U JPS61124764 U JP S61124764U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- wafer substrate
- diaphragm sheet
- concave portion
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 230000014759 maintenance of location Effects 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP870385U JPS61124764U (sv) | 1985-01-25 | 1985-01-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP870385U JPS61124764U (sv) | 1985-01-25 | 1985-01-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61124764U true JPS61124764U (sv) | 1986-08-06 |
Family
ID=30488234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP870385U Pending JPS61124764U (sv) | 1985-01-25 | 1985-01-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61124764U (sv) |
-
1985
- 1985-01-25 JP JP870385U patent/JPS61124764U/ja active Pending