JPH01120336U - - Google Patents

Info

Publication number
JPH01120336U
JPH01120336U JP1575088U JP1575088U JPH01120336U JP H01120336 U JPH01120336 U JP H01120336U JP 1575088 U JP1575088 U JP 1575088U JP 1575088 U JP1575088 U JP 1575088U JP H01120336 U JPH01120336 U JP H01120336U
Authority
JP
Japan
Prior art keywords
shaft
housing
sealed
arm
link
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1575088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533011Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1575088U priority Critical patent/JPH0533011Y2/ja
Publication of JPH01120336U publication Critical patent/JPH01120336U/ja
Application granted granted Critical
Publication of JPH0533011Y2 publication Critical patent/JPH0533011Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1575088U 1988-02-10 1988-02-10 Expired - Lifetime JPH0533011Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1575088U JPH0533011Y2 (ko) 1988-02-10 1988-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1575088U JPH0533011Y2 (ko) 1988-02-10 1988-02-10

Publications (2)

Publication Number Publication Date
JPH01120336U true JPH01120336U (ko) 1989-08-15
JPH0533011Y2 JPH0533011Y2 (ko) 1993-08-23

Family

ID=31228071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1575088U Expired - Lifetime JPH0533011Y2 (ko) 1988-02-10 1988-02-10

Country Status (1)

Country Link
JP (1) JPH0533011Y2 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013047519A1 (ja) * 2011-09-30 2013-04-04 東京エレクトロン株式会社 駆動装置及び基板処理システム
JP2017513036A (ja) * 2014-11-14 2017-05-25 マッパー・リソグラフィー・アイピー・ビー．ブイ． 貨物固定システムおよびリソグラフィシステム内で基板を移送するための方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013047519A1 (ja) * 2011-09-30 2013-04-04 東京エレクトロン株式会社 駆動装置及び基板処理システム
JP2013077775A (ja) * 2011-09-30 2013-04-25 Tokyo Electron Ltd 駆動装置及び基板処理システム
KR20140069045A (ko) * 2011-09-30 2014-06-09 도쿄엘렉트론가부시키가이샤 구동 장치 및 기판 처리 시스템
US9995378B2 (en) 2011-09-30 2018-06-12 Tokyo Electron Limited Drive device and substrate processing system
JP2017513036A (ja) * 2014-11-14 2017-05-25 マッパー・リソグラフィー・アイピー・ビー．ブイ． 貨物固定システムおよびリソグラフィシステム内で基板を移送するための方法
US10087019B2 (en) 2014-11-14 2018-10-02 Mapper Lithography Ip B.V. Load lock system and method for transferring substrates in a lithography system

Also Published As

Publication number Publication date
JPH0533011Y2 (ko) 1993-08-23

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