JP7700528B2 - エジェクタ及びこれを備える真空発生装置 - Google Patents

エジェクタ及びこれを備える真空発生装置 Download PDF

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Publication number
JP7700528B2
JP7700528B2 JP2021101784A JP2021101784A JP7700528B2 JP 7700528 B2 JP7700528 B2 JP 7700528B2 JP 2021101784 A JP2021101784 A JP 2021101784A JP 2021101784 A JP2021101784 A JP 2021101784A JP 7700528 B2 JP7700528 B2 JP 7700528B2
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JP
Japan
Prior art keywords
negative pressure
ejector
port
spool
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021101784A
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English (en)
Japanese (ja)
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JP2023000776A (ja
JP2023000776A5 (https=
Inventor
憲一 松村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2021101784A priority Critical patent/JP7700528B2/ja
Priority to US17/664,537 priority patent/US12435737B2/en
Priority to TW111119978A priority patent/TWI921541B/zh
Priority to EP22177127.2A priority patent/EP4105495B1/en
Priority to KR1020220071295A priority patent/KR20220169409A/ko
Priority to CN202210690519.1A priority patent/CN115492801A/zh
Publication of JP2023000776A publication Critical patent/JP2023000776A/ja
Publication of JP2023000776A5 publication Critical patent/JP2023000776A5/ja
Application granted granted Critical
Publication of JP7700528B2 publication Critical patent/JP7700528B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/02—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid
    • F04F5/04—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid displacing elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/18—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for compressing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F04F5/463—Arrangements of nozzles with provisions for mixing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F04F5/466—Arrangements of nozzles with a plurality of nozzles arranged in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/48—Control
    • F04F5/52—Control of evacuating pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Manipulator (AREA)
JP2021101784A 2021-06-18 2021-06-18 エジェクタ及びこれを備える真空発生装置 Active JP7700528B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2021101784A JP7700528B2 (ja) 2021-06-18 2021-06-18 エジェクタ及びこれを備える真空発生装置
US17/664,537 US12435737B2 (en) 2021-06-18 2022-05-23 Ejector and vacuum generating device including the same
TW111119978A TWI921541B (zh) 2021-06-18 2022-05-30 真空噴射器及具備該真空噴射器的真空產生裝置
EP22177127.2A EP4105495B1 (en) 2021-06-18 2022-06-03 Ejector and vacuum generating device including the same
KR1020220071295A KR20220169409A (ko) 2021-06-18 2022-06-13 이젝터 및 이것을 구비하는 진공 발생 장치
CN202210690519.1A CN115492801A (zh) 2021-06-18 2022-06-17 喷射器及具备它的真空产生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021101784A JP7700528B2 (ja) 2021-06-18 2021-06-18 エジェクタ及びこれを備える真空発生装置

Publications (3)

Publication Number Publication Date
JP2023000776A JP2023000776A (ja) 2023-01-04
JP2023000776A5 JP2023000776A5 (https=) 2024-04-17
JP7700528B2 true JP7700528B2 (ja) 2025-07-01

Family

ID=81940534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021101784A Active JP7700528B2 (ja) 2021-06-18 2021-06-18 エジェクタ及びこれを備える真空発生装置

Country Status (5)

Country Link
US (1) US12435737B2 (https=)
EP (1) EP4105495B1 (https=)
JP (1) JP7700528B2 (https=)
KR (1) KR20220169409A (https=)
CN (1) CN115492801A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022110636A1 (de) * 2022-05-02 2023-11-02 Festo Se & Co. Kg Vakuumerzeugervorrichtung
JP2024051642A (ja) * 2022-09-30 2024-04-11 Smc株式会社 マニホールド型空気圧供給機器及びこれに用いられるマニホールドブロック
EP4726216A1 (en) * 2024-10-08 2026-04-15 Piab Aktiebolag Ejector-type vacuum pump assemblies having stabilised membrane flow valve, and a flow control unit having stabilised membrane flow valve for use with an ejector-type vacuum pump in an embodiment of such assembly

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009036096A (ja) 2007-08-01 2009-02-19 Smc Corp 真空発生ユニット
JP2019218871A (ja) 2018-06-15 2019-12-26 Smc株式会社 真空エジェクタ及び封止弁ユニット

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3659655B2 (ja) 1993-03-11 2005-06-15 株式会社日本ピスコ 真空発生装置
JP3219755U (ja) 2018-05-16 2019-01-24 台灣氣立股▲ふん▼有限公司 真空保持型多段式真空発生及び真空破壊バルブ
DE102022110635A1 (de) * 2022-05-02 2023-11-02 Festo Se & Co. Kg Vakuumerzeugervorrichtung

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009036096A (ja) 2007-08-01 2009-02-19 Smc Corp 真空発生ユニット
JP2019218871A (ja) 2018-06-15 2019-12-26 Smc株式会社 真空エジェクタ及び封止弁ユニット

Also Published As

Publication number Publication date
EP4105495A2 (en) 2022-12-21
JP2023000776A (ja) 2023-01-04
EP4105495B1 (en) 2025-11-26
TW202314129A (zh) 2023-04-01
KR20220169409A (ko) 2022-12-27
US12435737B2 (en) 2025-10-07
CN115492801A (zh) 2022-12-20
US20220403856A1 (en) 2022-12-22
EP4105495A3 (en) 2023-01-25

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