KR20220169409A - 이젝터 및 이것을 구비하는 진공 발생 장치 - Google Patents

이젝터 및 이것을 구비하는 진공 발생 장치 Download PDF

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Publication number
KR20220169409A
KR20220169409A KR1020220071295A KR20220071295A KR20220169409A KR 20220169409 A KR20220169409 A KR 20220169409A KR 1020220071295 A KR1020220071295 A KR 1020220071295A KR 20220071295 A KR20220071295 A KR 20220071295A KR 20220169409 A KR20220169409 A KR 20220169409A
Authority
KR
South Korea
Prior art keywords
negative pressure
ejector
port
spool
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020220071295A
Other languages
English (en)
Korean (ko)
Inventor
켄이치 마츠무라
Original Assignee
에스엠시 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스엠시 가부시키가이샤 filed Critical 에스엠시 가부시키가이샤
Publication of KR20220169409A publication Critical patent/KR20220169409A/ko
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/02—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid
    • F04F5/04—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid displacing elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/18—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for compressing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F04F5/463—Arrangements of nozzles with provisions for mixing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/46—Arrangements of nozzles
    • F04F5/466—Arrangements of nozzles with a plurality of nozzles arranged in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
    • F04F5/48—Control
    • F04F5/52—Control of evacuating pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Manipulator (AREA)
KR1020220071295A 2021-06-18 2022-06-13 이젝터 및 이것을 구비하는 진공 발생 장치 Pending KR20220169409A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021101784A JP7700528B2 (ja) 2021-06-18 2021-06-18 エジェクタ及びこれを備える真空発生装置
JPJP-P-2021-101784 2021-06-18

Publications (1)

Publication Number Publication Date
KR20220169409A true KR20220169409A (ko) 2022-12-27

Family

ID=81940534

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020220071295A Pending KR20220169409A (ko) 2021-06-18 2022-06-13 이젝터 및 이것을 구비하는 진공 발생 장치

Country Status (5)

Country Link
US (1) US12435737B2 (https=)
EP (1) EP4105495B1 (https=)
JP (1) JP7700528B2 (https=)
KR (1) KR20220169409A (https=)
CN (1) CN115492801A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022110636A1 (de) * 2022-05-02 2023-11-02 Festo Se & Co. Kg Vakuumerzeugervorrichtung
JP2024051642A (ja) * 2022-09-30 2024-04-11 Smc株式会社 マニホールド型空気圧供給機器及びこれに用いられるマニホールドブロック
EP4726216A1 (en) * 2024-10-08 2026-04-15 Piab Aktiebolag Ejector-type vacuum pump assemblies having stabilised membrane flow valve, and a flow control unit having stabilised membrane flow valve for use with an ejector-type vacuum pump in an embodiment of such assembly

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06264900A (ja) 1993-03-11 1994-09-20 Nippon Pisuko:Kk 真空発生装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4678604B2 (ja) * 2007-08-01 2011-04-27 Ｓｍｃ株式会社 真空発生ユニット
JP3219755U (ja) 2018-05-16 2019-01-24 台灣氣立股▲ふん▼有限公司 真空保持型多段式真空発生及び真空破壊バルブ
JP6780821B2 (ja) 2018-06-15 2020-11-04 Smc株式会社 真空エジェクタ及び封止弁ユニット
DE102022110635A1 (de) * 2022-05-02 2023-11-02 Festo Se & Co. Kg Vakuumerzeugervorrichtung

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06264900A (ja) 1993-03-11 1994-09-20 Nippon Pisuko:Kk 真空発生装置

Also Published As

Publication number Publication date
EP4105495A2 (en) 2022-12-21
JP2023000776A (ja) 2023-01-04
JP7700528B2 (ja) 2025-07-01
EP4105495B1 (en) 2025-11-26
TW202314129A (zh) 2023-04-01
US12435737B2 (en) 2025-10-07
CN115492801A (zh) 2022-12-20
US20220403856A1 (en) 2022-12-22
EP4105495A3 (en) 2023-01-25

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