JP7699993B2 - 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法 - Google Patents

液体吐出装置、液体吐出方法、成形装置及び物品の製造方法 Download PDF

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Publication number
JP7699993B2
JP7699993B2 JP2021125344A JP2021125344A JP7699993B2 JP 7699993 B2 JP7699993 B2 JP 7699993B2 JP 2021125344 A JP2021125344 A JP 2021125344A JP 2021125344 A JP2021125344 A JP 2021125344A JP 7699993 B2 JP7699993 B2 JP 7699993B2
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Japan
Prior art keywords
substrate
ejection
substrate stage
unit
timing
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JP2021125344A
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English (en)
Japanese (ja)
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JP2023020142A (ja
JP2023020142A5 (enExample
Inventor
公聖 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2021125344A priority Critical patent/JP7699993B2/ja
Priority to TW111124179A priority patent/TWI882234B/zh
Priority to KR1020220090055A priority patent/KR102878038B1/ko
Priority to US17/871,822 priority patent/US12214591B2/en
Publication of JP2023020142A publication Critical patent/JP2023020142A/ja
Publication of JP2023020142A5 publication Critical patent/JP2023020142A5/ja
Priority to US19/013,959 priority patent/US20250144932A1/en
Application granted granted Critical
Publication of JP7699993B2 publication Critical patent/JP7699993B2/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04573—Timing; Delays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04503—Control methods or devices therefor, e.g. driver circuits, control circuits aiming at compensating carriage speed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04586—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads of a type not covered by groups B41J2/04575 - B41J2/04585, or of an undefined type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/07—Ink jet characterised by jet control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/21—Ink jet for multi-colour printing
    • B41J2/2132—Print quality control characterised by dot disposition, e.g. for reducing white stripes or banding
    • B41J2/2135—Alignment of dots
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00—Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015—Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
    • B41J11/0021—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
    • B41J11/00214—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation using UV radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Ink Jet (AREA)
JP2021125344A 2021-07-30 2021-07-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法 Active JP7699993B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2021125344A JP7699993B2 (ja) 2021-07-30 2021-07-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法
TW111124179A TWI882234B (zh) 2021-07-30 2022-06-29 液體排放設備、液體排放方法、成型設備、及物品製造方法
KR1020220090055A KR102878038B1 (ko) 2021-07-30 2022-07-21 액체 토출 장치, 액체 토출 방법, 성형 장치, 및 물품 제조 방법
US17/871,822 US12214591B2 (en) 2021-07-30 2022-07-22 Liquid discharge apparatus, liquid discharge method, molding apparatus, and article manufacturing method
US19/013,959 US20250144932A1 (en) 2021-07-30 2025-01-08 Liquid discharge apparatus, liquid discharge method, molding apparatus, and article manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021125344A JP7699993B2 (ja) 2021-07-30 2021-07-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法

Publications (3)

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JP2023020142A JP2023020142A (ja) 2023-02-09
JP2023020142A5 JP2023020142A5 (enExample) 2024-02-05
JP7699993B2 true JP7699993B2 (ja) 2025-06-30

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JP2021125344A Active JP7699993B2 (ja) 2021-07-30 2021-07-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法

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US (2) US12214591B2 (enExample)
JP (1) JP7699993B2 (enExample)
KR (1) KR102878038B1 (enExample)
TW (1) TWI882234B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2036625B1 (en) 2023-12-21 2025-07-08 Lake3D Holding B V A method of 3D printing

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011222705A (ja) 2010-04-08 2011-11-04 Canon Inc インプリント装置およびインプリント基板の製造方法
JP2016195183A (ja) 2015-03-31 2016-11-17 キヤノン株式会社 インプリント装置、インプリント方法、及び物品の製造方法
JP2017103313A (ja) 2015-11-30 2017-06-08 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP2019009420A (ja) 2017-06-26 2019-01-17 キヤノン株式会社 インプリント装置、物品の製造方法、情報処理装置、マップの編集を支援する方法及び記憶媒体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3448991B2 (ja) * 1994-11-29 2003-09-22 株式会社ニコン ステージ移動制御装置、投影型露光装置およびステージ駆動方法ならびに露光方法。
JP2002175963A (ja) 2000-12-05 2002-06-21 Nikon Corp ステージ装置とその位置制御方法および露光装置並びに露光方法
EP1934050B1 (en) * 2005-10-07 2014-06-04 Koninklijke Philips N.V. Inkjet device and method for the controlled positioning of droplets of a substance onto a substrate.
JP5563319B2 (ja) 2010-01-19 2014-07-30 キヤノン株式会社 インプリント装置、および物品の製造方法
JP6993791B2 (ja) * 2017-05-08 2022-01-14 キヤノン株式会社 インプリント装置
US12044962B2 (en) * 2019-04-19 2024-07-23 Canon Kabushiki Kaisha Forming apparatus, forming method, and article manufacturing method
JP7565514B2 (ja) 2020-08-21 2024-10-11 パナソニックＩｐマネジメント株式会社 インクジェット印刷装置およびインクジェット印刷方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011222705A (ja) 2010-04-08 2011-11-04 Canon Inc インプリント装置およびインプリント基板の製造方法
JP2016195183A (ja) 2015-03-31 2016-11-17 キヤノン株式会社 インプリント装置、インプリント方法、及び物品の製造方法
JP2017103313A (ja) 2015-11-30 2017-06-08 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP2019009420A (ja) 2017-06-26 2019-01-17 キヤノン株式会社 インプリント装置、物品の製造方法、情報処理装置、マップの編集を支援する方法及び記憶媒体

Also Published As

Publication number Publication date
KR102878038B1 (ko) 2025-10-29
TW202307922A (zh) 2023-02-16
US12214591B2 (en) 2025-02-04
JP2023020142A (ja) 2023-02-09
KR20230019026A (ko) 2023-02-07
US20230035868A1 (en) 2023-02-02
TWI882234B (zh) 2025-05-01
US20250144932A1 (en) 2025-05-08

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