JP2023020142A5 - - Google Patents

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Publication number
JP2023020142A5
JP2023020142A5 JP2021125344A JP2021125344A JP2023020142A5 JP 2023020142 A5 JP2023020142 A5 JP 2023020142A5 JP 2021125344 A JP2021125344 A JP 2021125344A JP 2021125344 A JP2021125344 A JP 2021125344A JP 2023020142 A5 JP2023020142 A5 JP 2023020142A5
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JP
Japan
Prior art keywords
liquid
substrate
ejection
substrate stage
section
Prior art date
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Application number
JP2021125344A
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English (en)
Japanese (ja)
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JP7699993B2 (ja
JP2023020142A (ja
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Priority claimed from JP2021125344A external-priority patent/JP7699993B2/ja
Priority to JP2021125344A priority Critical patent/JP7699993B2/ja
Application filed filed Critical
Priority to TW111124179A priority patent/TWI882234B/zh
Priority to KR1020220090055A priority patent/KR102878038B1/ko
Priority to US17/871,822 priority patent/US12214591B2/en
Publication of JP2023020142A publication Critical patent/JP2023020142A/ja
Publication of JP2023020142A5 publication Critical patent/JP2023020142A5/ja
Priority to US19/013,959 priority patent/US20250144932A1/en
Publication of JP7699993B2 publication Critical patent/JP7699993B2/ja
Application granted granted Critical
Active legal-status Critical Current
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JP2021125344A 2021-07-30 2021-07-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法 Active JP7699993B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2021125344A JP7699993B2 (ja) 2021-07-30 2021-07-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法
TW111124179A TWI882234B (zh) 2021-07-30 2022-06-29 液體排放設備、液體排放方法、成型設備、及物品製造方法
KR1020220090055A KR102878038B1 (ko) 2021-07-30 2022-07-21 액체 토출 장치, 액체 토출 방법, 성형 장치, 및 물품 제조 방법
US17/871,822 US12214591B2 (en) 2021-07-30 2022-07-22 Liquid discharge apparatus, liquid discharge method, molding apparatus, and article manufacturing method
US19/013,959 US20250144932A1 (en) 2021-07-30 2025-01-08 Liquid discharge apparatus, liquid discharge method, molding apparatus, and article manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021125344A JP7699993B2 (ja) 2021-07-30 2021-07-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法

Publications (3)

Publication Number Publication Date
JP2023020142A JP2023020142A (ja) 2023-02-09
JP2023020142A5 true JP2023020142A5 (enExample) 2024-02-05
JP7699993B2 JP7699993B2 (ja) 2025-06-30

Family

ID=85037573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021125344A Active JP7699993B2 (ja) 2021-07-30 2021-07-30 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法

Country Status (4)

Country Link
US (2) US12214591B2 (enExample)
JP (1) JP7699993B2 (enExample)
KR (1) KR102878038B1 (enExample)
TW (1) TWI882234B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2036625B1 (en) 2023-12-21 2025-07-08 Lake3D Holding B V A method of 3D printing

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3448991B2 (ja) * 1994-11-29 2003-09-22 株式会社ニコン ステージ移動制御装置、投影型露光装置およびステージ駆動方法ならびに露光方法。
JP2002175963A (ja) 2000-12-05 2002-06-21 Nikon Corp ステージ装置とその位置制御方法および露光装置並びに露光方法
EP1934050B1 (en) * 2005-10-07 2014-06-04 Koninklijke Philips N.V. Inkjet device and method for the controlled positioning of droplets of a substance onto a substrate.
JP5563319B2 (ja) 2010-01-19 2014-07-30 キヤノン株式会社 インプリント装置、および物品の製造方法
JP2011222705A (ja) 2010-04-08 2011-11-04 Canon Inc インプリント装置およびインプリント基板の製造方法
JP6611450B2 (ja) 2015-03-31 2019-11-27 キヤノン株式会社 インプリント装置、インプリント方法、及び物品の製造方法
JP6590667B2 (ja) 2015-11-30 2019-10-16 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP6993791B2 (ja) * 2017-05-08 2022-01-14 キヤノン株式会社 インプリント装置
US10493672B2 (en) 2017-06-26 2019-12-03 Canon Kabushiki Kaisha Imprint apparatus, method of manufacturing article, information processing apparatus, method of supporting map editing, and storage medium
US12044962B2 (en) * 2019-04-19 2024-07-23 Canon Kabushiki Kaisha Forming apparatus, forming method, and article manufacturing method
JP7565514B2 (ja) 2020-08-21 2024-10-11 パナソニックＩｐマネジメント株式会社 インクジェット印刷装置およびインクジェット印刷方法

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