JP7677076B2 - 液体噴射ヘッド、および液体噴射装置 - Google Patents

液体噴射ヘッド、および液体噴射装置 Download PDF

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Publication number
JP7677076B2
JP7677076B2 JP2021140979A JP2021140979A JP7677076B2 JP 7677076 B2 JP7677076 B2 JP 7677076B2 JP 2021140979 A JP2021140979 A JP 2021140979A JP 2021140979 A JP2021140979 A JP 2021140979A JP 7677076 B2 JP7677076 B2 JP 7677076B2
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Japan
Prior art keywords
pressure chamber
acute angle
stacking direction
section
viewed
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JP2021140979A
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English (en)
Japanese (ja)
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JP2023034649A (ja
JP2023034649A5 (enExample
Inventor
崇 青木
祥平 水田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2021140979A priority Critical patent/JP7677076B2/ja
Priority to US17/898,593 priority patent/US12145365B2/en
Publication of JP2023034649A publication Critical patent/JP2023034649A/ja
Publication of JP2023034649A5 publication Critical patent/JP2023034649A5/ja
Application granted granted Critical
Publication of JP7677076B2 publication Critical patent/JP7677076B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2021140979A 2021-08-31 2021-08-31 液体噴射ヘッド、および液体噴射装置 Active JP7677076B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2021140979A JP7677076B2 (ja) 2021-08-31 2021-08-31 液体噴射ヘッド、および液体噴射装置
US17/898,593 US12145365B2 (en) 2021-08-31 2022-08-30 Liquid ejecting head and liquid ejecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021140979A JP7677076B2 (ja) 2021-08-31 2021-08-31 液体噴射ヘッド、および液体噴射装置

Publications (3)

Publication Number Publication Date
JP2023034649A JP2023034649A (ja) 2023-03-13
JP2023034649A5 JP2023034649A5 (enExample) 2024-07-22
JP7677076B2 true JP7677076B2 (ja) 2025-05-15

Family

ID=85288407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021140979A Active JP7677076B2 (ja) 2021-08-31 2021-08-31 液体噴射ヘッド、および液体噴射装置

Country Status (2)

Country Link
US (1) US12145365B2 (enExample)
JP (1) JP7677076B2 (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004306396A (ja) 2003-04-07 2004-11-04 Ricoh Co Ltd 液滴吐出ヘッド及びその製造方法、インクカートリッジ並びにインクジェット記録装置
JP2014113796A (ja) 2012-12-12 2014-06-26 Seiko Epson Corp 液体噴射ヘッド、液体噴射装置
JP2015042482A (ja) 2013-06-10 2015-03-05 セイコーエプソン株式会社 液体噴射ヘッド、および、液体噴射装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6502928B1 (en) * 1998-07-29 2003-01-07 Seiko Epson Corporation Ink jet recording head and ink jet recording apparatus comprising the same
WO2001075985A1 (en) * 2000-03-30 2001-10-11 Fujitsu Limited Piezoelectric actuator, its manufacturing method, and ink-jet head comprising the same
JP4096721B2 (ja) 2001-12-06 2008-06-04 ブラザー工業株式会社 圧電アクチュエータ、流体移送装置及びインクジェットヘッド
US6971738B2 (en) 2001-12-06 2005-12-06 Brother Kogyo Kabushiki Kaisha Piezoelectric actuator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004306396A (ja) 2003-04-07 2004-11-04 Ricoh Co Ltd 液滴吐出ヘッド及びその製造方法、インクカートリッジ並びにインクジェット記録装置
JP2014113796A (ja) 2012-12-12 2014-06-26 Seiko Epson Corp 液体噴射ヘッド、液体噴射装置
JP2015042482A (ja) 2013-06-10 2015-03-05 セイコーエプソン株式会社 液体噴射ヘッド、および、液体噴射装置

Also Published As

Publication number Publication date
JP2023034649A (ja) 2023-03-13
US12145365B2 (en) 2024-11-19
US20230066192A1 (en) 2023-03-02

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