JP7670682B2 - 電磁波透過性積層部材、及びその製造方法 - Google Patents

電磁波透過性積層部材、及びその製造方法 Download PDF

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Publication number
JP7670682B2
JP7670682B2 JP2022507170A JP2022507170A JP7670682B2 JP 7670682 B2 JP7670682 B2 JP 7670682B2 JP 2022507170 A JP2022507170 A JP 2022507170A JP 2022507170 A JP2022507170 A JP 2022507170A JP 7670682 B2 JP7670682 B2 JP 7670682B2
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Prior art keywords
indium oxide
electromagnetic wave
containing layer
layer
metal layer
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Japanese (ja)
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JPWO2021182380A1 (https=
Inventor
太一 渡邉
暁雷 陳
広宣 待永
孝洋 中井
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Nitto Denko Corp
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Nitto Denko Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/10—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a discontinuous layer, i.e. formed of separate pieces of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
JP2022507170A 2020-03-09 2021-03-08 電磁波透過性積層部材、及びその製造方法 Active JP7670682B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020040057 2020-03-09
JP2020040057 2020-03-09
PCT/JP2021/008947 WO2021182380A1 (ja) 2020-03-09 2021-03-08 電磁波透過性積層部材、及びその製造方法

Publications (2)

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JPWO2021182380A1 JPWO2021182380A1 (https=) 2021-09-16
JP7670682B2 true JP7670682B2 (ja) 2025-04-30

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JP (1) JP7670682B2 (https=)
TW (1) TWI869564B (https=)
WO (1) WO2021182380A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114635113B (zh) * 2022-03-09 2023-04-07 北京科技大学 一种高亮度银白色电磁波透过复合薄膜的制备方法
WO2023190612A1 (ja) * 2022-03-30 2023-10-05 日東電工株式会社 積層体、発光デバイス、及びセンシングデバイス

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007144988A (ja) 2005-10-31 2007-06-14 Toyoda Gosei Co Ltd 樹脂製品及びその製造方法並びに金属皮膜の成膜方法
WO2014097943A1 (ja) 2012-12-18 2014-06-26 東レ株式会社 金属ドット基板および金属ドット基板の製造方法
WO2018079547A1 (ja) 2016-10-24 2018-05-03 日東電工株式会社 電磁波透過性金属光沢部材、これを用いた物品、及び、金属薄膜
WO2019139122A1 (ja) 2018-01-12 2019-07-18 日東電工株式会社 電波透過性金属光沢部材、これを用いた物品、及びその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000006299A (ja) * 1998-06-23 2000-01-11 Mitsui Chemicals Inc 透明導電性積層体
JP6566750B2 (ja) * 2015-07-02 2019-08-28 Cbc株式会社 不連続金属膜の形成方法
JP7516707B2 (ja) * 2018-01-12 2024-07-17 日東電工株式会社 電波透過性金属光沢部材、これを用いた物品、及びその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007144988A (ja) 2005-10-31 2007-06-14 Toyoda Gosei Co Ltd 樹脂製品及びその製造方法並びに金属皮膜の成膜方法
WO2014097943A1 (ja) 2012-12-18 2014-06-26 東レ株式会社 金属ドット基板および金属ドット基板の製造方法
WO2018079547A1 (ja) 2016-10-24 2018-05-03 日東電工株式会社 電磁波透過性金属光沢部材、これを用いた物品、及び、金属薄膜
WO2019139122A1 (ja) 2018-01-12 2019-07-18 日東電工株式会社 電波透過性金属光沢部材、これを用いた物品、及びその製造方法

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TW202200808A (zh) 2022-01-01
JPWO2021182380A1 (https=) 2021-09-16
WO2021182380A1 (ja) 2021-09-16
TWI869564B (zh) 2025-01-11

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