JP7646035B2 - 荷電粒子線装置 - Google Patents

荷電粒子線装置 Download PDF

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Publication number
JP7646035B2
JP7646035B2 JP2023570565A JP2023570565A JP7646035B2 JP 7646035 B2 JP7646035 B2 JP 7646035B2 JP 2023570565 A JP2023570565 A JP 2023570565A JP 2023570565 A JP2023570565 A JP 2023570565A JP 7646035 B2 JP7646035 B2 JP 7646035B2
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Japan
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JP2023570565A
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English (en)
Japanese (ja)
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JPWO2023127083A1 (https=
Inventor
裕久 榎本
健一 西中
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Hitachi High Tech Corp
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Hitachi High Tech Corp
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Publication of JPWO2023127083A1 publication Critical patent/JPWO2023127083A1/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20207—Tilt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20278—Motorised movement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Beam Exposure (AREA)
JP2023570565A 2021-12-28 2021-12-28 荷電粒子線装置 Active JP7646035B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/048759 WO2023127083A1 (ja) 2021-12-28 2021-12-28 荷電粒子線装置

Publications (2)

Publication Number Publication Date
JPWO2023127083A1 JPWO2023127083A1 (https=) 2023-07-06
JP7646035B2 true JP7646035B2 (ja) 2025-03-14

Family

ID=86998392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023570565A Active JP7646035B2 (ja) 2021-12-28 2021-12-28 荷電粒子線装置

Country Status (4)

Country Link
US (1) US20240404782A1 (https=)
JP (1) JP7646035B2 (https=)
KR (1) KR102858391B1 (https=)
WO (1) WO2023127083A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN204558415U (zh) 2015-02-15 2015-08-12 北京工业大学 一种透射电子显微镜用双轴倾转样品台
JP2015220057A (ja) 2014-05-16 2015-12-07 株式会社メルビル 試料ホルダー

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5225291B2 (https=) * 1973-06-06 1977-07-06
JPS53113057U (https=) * 1977-02-16 1978-09-08
JPS61116062U (https=) * 1984-12-28 1986-07-22
JPH07262955A (ja) * 1994-03-23 1995-10-13 Jeol Ltd ２軸傾斜試料ホルダ
EP0801810B1 (en) * 1994-12-28 2005-09-14 Technische Universiteit Delft Specimen holder for an electron microscope and device and method for mounting a specimen in an electron microscope
JP2004063463A (ja) 1996-08-08 2004-02-26 Hitachi Ltd 電子顕微鏡の運転方法及び電子顕微鏡

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015220057A (ja) 2014-05-16 2015-12-07 株式会社メルビル 試料ホルダー
CN204558415U (zh) 2015-02-15 2015-08-12 北京工业大学 一种透射电子显微镜用双轴倾转样品台

Also Published As

Publication number Publication date
JPWO2023127083A1 (https=) 2023-07-06
WO2023127083A1 (ja) 2023-07-06
US20240404782A1 (en) 2024-12-05
KR20240053009A (ko) 2024-04-23
KR102858391B1 (ko) 2025-09-12

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