JPS53113057U - - Google Patents
Info
- Publication number
- JPS53113057U JPS53113057U JP1665877U JP1665877U JPS53113057U JP S53113057 U JPS53113057 U JP S53113057U JP 1665877 U JP1665877 U JP 1665877U JP 1665877 U JP1665877 U JP 1665877U JP S53113057 U JPS53113057 U JP S53113057U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1665877U JPS53113057U (https=) | 1977-02-16 | 1977-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1665877U JPS53113057U (https=) | 1977-02-16 | 1977-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS53113057U true JPS53113057U (https=) | 1978-09-08 |
Family
ID=28840579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1665877U Pending JPS53113057U (https=) | 1977-02-16 | 1977-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53113057U (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2023127083A1 (https=) * | 2021-12-28 | 2023-07-06 |
-
1977
- 1977-02-16 JP JP1665877U patent/JPS53113057U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2023127083A1 (https=) * | 2021-12-28 | 2023-07-06 | ||
| WO2023127083A1 (ja) * | 2021-12-28 | 2023-07-06 | 株式会社日立ハイテク | 荷電粒子線装置 |
| KR20240053009A (ko) * | 2021-12-28 | 2024-04-23 | 주식회사 히타치하이테크 | 하전 입자선 장치 |