JPWO2023127083A1 - - Google Patents
Info
- Publication number
- JPWO2023127083A1 JPWO2023127083A1 JP2023570565A JP2023570565A JPWO2023127083A1 JP WO2023127083 A1 JPWO2023127083 A1 JP WO2023127083A1 JP 2023570565 A JP2023570565 A JP 2023570565A JP 2023570565 A JP2023570565 A JP 2023570565A JP WO2023127083 A1 JPWO2023127083 A1 JP WO2023127083A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20207—Tilt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20278—Motorised movement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2021/048759 WO2023127083A1 (ja) | 2021-12-28 | 2021-12-28 | 荷電粒子線装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2023127083A1 true JPWO2023127083A1 (https=) | 2023-07-06 |
| JP7646035B2 JP7646035B2 (ja) | 2025-03-14 |
Family
ID=86998392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023570565A Active JP7646035B2 (ja) | 2021-12-28 | 2021-12-28 | 荷電粒子線装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20240404782A1 (https=) |
| JP (1) | JP7646035B2 (https=) |
| KR (1) | KR102858391B1 (https=) |
| WO (1) | WO2023127083A1 (https=) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5014268A (https=) * | 1973-06-06 | 1975-02-14 | ||
| JPS53113057U (https=) * | 1977-02-16 | 1978-09-08 | ||
| JPS61116062U (https=) * | 1984-12-28 | 1986-07-22 | ||
| JPH07262955A (ja) * | 1994-03-23 | 1995-10-13 | Jeol Ltd | ２軸傾斜試料ホルダ |
| CN204558415U (zh) * | 2015-02-15 | 2015-08-12 | 北京工业大学 | 一种透射电子显微镜用双轴倾转样品台 |
| JP2015220057A (ja) * | 2014-05-16 | 2015-12-07 | 株式会社メルビル | 試料ホルダー |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0801810B1 (en) * | 1994-12-28 | 2005-09-14 | Technische Universiteit Delft | Specimen holder for an electron microscope and device and method for mounting a specimen in an electron microscope |
| JP2004063463A (ja) | 1996-08-08 | 2004-02-26 | Hitachi Ltd | 電子顕微鏡の運転方法及び電子顕微鏡 |
-
2021
- 2021-12-28 US US18/700,781 patent/US20240404782A1/en active Pending
- 2021-12-28 WO PCT/JP2021/048759 patent/WO2023127083A1/ja not_active Ceased
- 2021-12-28 JP JP2023570565A patent/JP7646035B2/ja active Active
- 2021-12-28 KR KR1020247012370A patent/KR102858391B1/ko active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5014268A (https=) * | 1973-06-06 | 1975-02-14 | ||
| JPS53113057U (https=) * | 1977-02-16 | 1978-09-08 | ||
| JPS61116062U (https=) * | 1984-12-28 | 1986-07-22 | ||
| JPH07262955A (ja) * | 1994-03-23 | 1995-10-13 | Jeol Ltd | ２軸傾斜試料ホルダ |
| JP2015220057A (ja) * | 2014-05-16 | 2015-12-07 | 株式会社メルビル | 試料ホルダー |
| CN204558415U (zh) * | 2015-02-15 | 2015-08-12 | 北京工业大学 | 一种透射电子显微镜用双轴倾转样品台 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7646035B2 (ja) | 2025-03-14 |
| WO2023127083A1 (ja) | 2023-07-06 |
| US20240404782A1 (en) | 2024-12-05 |
| KR20240053009A (ko) | 2024-04-23 |
| KR102858391B1 (ko) | 2025-09-12 |
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