WO2023127083A1 - 荷電粒子線装置 - Google Patents

荷電粒子線装置 Download PDF

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Publication number
WO2023127083A1
WO2023127083A1 PCT/JP2021/048759 JP2021048759W WO2023127083A1 WO 2023127083 A1 WO2023127083 A1 WO 2023127083A1 JP 2021048759 W JP2021048759 W JP 2021048759W WO 2023127083 A1 WO2023127083 A1 WO 2023127083A1
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WO
WIPO (PCT)
Prior art keywords
deformation
section
load
sample
deformation portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/048759
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English (en)
French (fr)
Japanese (ja)
Inventor
裕久 榎本
健一 西中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Priority to PCT/JP2021/048759 priority Critical patent/WO2023127083A1/ja
Priority to KR1020247012370A priority patent/KR102858391B1/ko
Priority to JP2023570565A priority patent/JP7646035B2/ja
Priority to US18/700,781 priority patent/US20240404782A1/en
Publication of WO2023127083A1 publication Critical patent/WO2023127083A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20207—Tilt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20278—Motorised movement

Definitions

  • the present invention relates to a charged particle beam device.
  • Patent Document 1 describes a charged particle beam apparatus having a tilting mechanism for tilting a sample to be observed in the front-rear direction when the sample holder is inserted in the front-rear direction.
  • a rotating screw 16 on the heating holder side provided in the pivot 4 performs loose tightening considering thermal expansion.
  • One end of the lead wire 34 is fixed using the rotating screw 36 attached to the arm 3.
  • the other end is fixed using the rotating screw 17 of the heating stage 1.
  • the arm 3 is bent like one side of a swirl. By rotating the arm 3, it rotates back and forth about the pivot 4.”
  • Patent Document 1 describes a charged particle beam device equipped with a mechanism for mounting and tilting a sample on a heating stage.
  • the sample tilting mechanism described in Patent Document 1 rotates due to the relative displacement of two different members. , frictional force) reduce the positioning accuracy.
  • An object of the present invention is to provide a charged particle beam device that enables tilting operation without nonlinear characteristics that affect positioning accuracy by eliminating sliding parts (pivots, etc.) of a rotating shaft in a mechanism that tilts a sample. to do.
  • An example of a charged particle beam device is - a tilting mechanism drive for generating a driving force; - an inclined driving force transmission part for transmitting the driving force; - a tilting mechanism for tilting movement;
  • a charged particle beam device comprising: The tilt mechanism section - a first load transmission section and a second load transmission section for transmitting the load from the tilt drive transmission section; - a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion elastically deformed by a load; - a sample holder that holds a sample and is tiltable; with The first deformation portion, the second deformation portion and the third deformation portion are attached to the second load transmission portion, The third deformation portion is - above said first deformation and said fourth deformation, - below said second deformation, - forward of said first deformation, - behind said fourth deformation, The first load transmission portion moves in a load direction due to the load from the tilt driving force transmission portion and transmits the load to the first deformation
  • An example of a sample holder according to the present invention is - a tilting mechanism drive for generating a driving force; - an inclined driving force transmission part for transmitting the driving force; - a tilting mechanism for tilting movement;
  • a sample holder comprising The tilt mechanism section - a first load transmission section and a second load transmission section for transmitting the load from the tilt drive transmission section; - a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion elastically deformed by a load; - a sample holder that holds a sample and is tiltable; with The first deformation portion, the second deformation portion and the third deformation portion are attached to the second load transmission portion, The third deformation portion is - above said first deformation and said fourth deformation, - below said second deformation, - forward of said first deformation, - behind said fourth deformation,
  • the first load transmission portion moves in a load direction due to the load from the tilt driving force transmission portion and transmits the load to the first
  • An example of the sample insertion structure according to the present invention is A sample insertion structure comprising a sample holder and a sample stage,
  • the sample holder is - a tilting mechanism drive for generating a driving force; - an inclined driving force transmission part for transmitting the driving force; - a tilting mechanism for tilting movement; with
  • the sample holder is adapted to be inserted into the sample stage,
  • the tilt mechanism section - a first load transmission section and a second load transmission section for transmitting the load from the tilt drive transmission section; - a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion elastically deformed by a load; - a sample holder that holds a sample and is tiltable; with The first deformation portion, the second deformation portion and the third deformation portion are attached to the second load transmission portion,
  • the third deformation portion is - above said first deformation and said fourth deformation, - below said second deformation, - forward of said first deformation,
  • the sample holder is - a tilting mechanism drive for generating a driving force; - an inclined driving force transmission part for transmitting the driving force; - a tilting mechanism for tilting movement; with The tilt mechanism section - a first load transmission section and a second load transmission section for transmitting the load from the tilt drive transmission section; - a first deformation portion, a second deformation portion, a third deformation portion and a fourth deformation portion elastically deformed by a load; - a sample holder that holds a sample and is tiltable; with The first deformation portion, the second deformation portion and the third deformation portion are attached to the second load transmission portion, The third deformation portion is - above said first deformation and said fourth deformation, - below said second deformation, - forward of said first deformation, - behind said fourth deformation,
  • the method includes: a step in which the first load transmission portion moves in a load direction due to
  • the tilting mechanism since the tilting mechanism does not have a sliding portion of the rotating shaft, the nonlinear characteristics are reduced in the tilting operation of the sample in the charged particle beam device.
  • FIG. 2 is a side view of the sample holder and the sample tilting mechanism of the charged particle beam device according to the first embodiment of the present invention
  • 1 is a schematic side view showing an example of the overall configuration of a charged particle beam device according to Embodiment 1
  • FIG. 4 is a schematic side view of a sample stage according to Example 1.
  • FIG. 2 is a schematic side view showing an example of the overall configuration of the charged particle beam device according to the first embodiment.
  • a transmission electron microscope among charged particle beam devices will be described as an example.
  • the charged particle beam device 1 in FIG. 2 includes an electron gun 10, a mirror body 11, and a pedestal 17 in order from the top in the vertical direction.
  • the mirror body 11 incorporates an irradiation system lens 12, an objective lens 13, an imaging system lens 14, and a detector 15 in order from the top in the vertical direction.
  • a sample stage 16 is installed at the same height as the objective lens 13 on the side of the mirror body 11 .
  • the charged particle beam device 1 includes a sample holder 100 on which a sample 102 is placed.
  • the sample stage 16 has an insertion portion 101 for inserting the sample holder 100 so that the sample holder 100 can be inserted into the sample stage 16 . Thereby, the sample 102 placed on the sample holder 100 can be inserted into the objective lens 13 .
  • the sample holder 100 and sample stage 16 constitute a sample insertion structure.
  • the sample holder 100 is also used to control the position of the sample according to the methods described herein.
  • a pedestal 17 below the mirror body 11 supports the entire charged particle beam device 1 including the mirror body 11 .
  • the charged particle beam device 1 includes a main control unit 18 that controls the entire charged particle beam device 1 and a stage controller 19 (control section) that controls the sample stage 16 .
  • an electron beam 20 accelerated from the electron gun 10 is irradiated toward the mirror body 11, and focused by the irradiation system lens 12 and the objective lens 13, onto the sample holder 100.
  • the sample 102 is irradiated.
  • the electron beam 20 transmitted through the specimen 102 is detected by the detector 15 after being magnified by the imaging system lens 14 . Then, the electrical signal from the detector 15 is taken into the main control unit 18 and imaged.
  • the sample holder 100 is inserted into the mirror body 11 from the insertion portion 101 of the sample stage 16 .
  • the sample holder 100 moves the placed sample 102 .
  • the sample holder 100 is provided with a tilting mechanism 130 (see FIG. 1), which will be described later. acts like inserting into Such a configuration allows the sample 102 to be inserted at an appropriate position.
  • the stage controller 19 transmits a control signal for controlling the tilt mechanism section 130 . Also, the position of the sample holder 100 is controlled by a control signal from the stage controller 19 . By moving the sample 102 to a desired position, the irradiation position of the electron beam 20 with respect to the sample 102 can be moved.
  • the operation of inserting the sample holder 100 into the sample stage 16 is not limited to manual operation, and an automatic transport device or the like may be used.
  • the insertion section 101 does not have to be inside the sample stage 16 .
  • Other positions may be used.
  • the configuration of the charged particle beam device is not limited to the above.
  • FIG. 3 is a schematic side view of the sample stage 16 of the present invention.
  • the coordinate system is defined such that the insertion direction of the sample holder is the X-axis (back and forth), the horizontal axis orthogonal to this is the Y-axis (left and right), and the vertical axis is the Z-axis (up and down). can be arbitrarily oriented.
  • the sample stage 16 shown in FIG. 3 includes a base 30 that supports the entire sample stage, an X-axis rotation mechanism 40 that rotates around the X-axis, a Z-direction movement mechanism 50 that operates substantially in the Z-axis direction, and approximately the Y-axis (not shown). It has a Y-direction motion mechanism that moves in the direction and an X-axis linear motion mechanism 70 that moves linearly in the X-axis direction. A sample holder 100 on which a sample 102 is placed is inserted into this.
  • the coordinate origin is not specified in this specification, and the expression “rotate around the X axis” can represent rotation within the YZ plane about an arbitrary point.
  • the expression “operate substantially in the Z-axis direction” is not limited to a strictly linear motion in the Z-axis direction, but rather a movement in which one end of a member moves along a curved trajectory that can be roughly approximated by a straight line. Including motion, for example rotational motion in the XZ plane. The same applies to the expression “operate substantially in the Y-axis direction”.
  • the base 30 has a substantially cylindrical shape, and fixes the sample stage 16 to the side of the mirror body 11 .
  • the X-axis rotation mechanism 40 includes a movable section, a drive section, a motion guide section, a driving force transmission section, and a position measurement section, and is installed on the base 30 .
  • the X-axis rotation mechanism 40 includes a cylindrical rotary cylinder 41 (moving portion) that rotates, an X-axis rotation driving portion 42 (driving portion) that generates a rotational driving force, and a bearing 43 (motion guide) that guides the rotation. section), a gear 44 (driving force transmitting section) for transmitting the rotational driving force to the movable section, and an encoder (not shown; position measuring section).
  • the rotating barrel 41 is housed inside the base 30, the X-axis rotary drive unit 42 is fixed on the base 30, the bearing 43 is installed between the base 30 and the rotating barrel 41, and the gear 44 is attached to the rotating barrel 41 (for example, its rear end). (neighborhood).
  • the drive signal from the stage controller 19 rotates the X-axis rotation drive unit 42 such as a motor, and this rotational force is transmitted to the gear 44 at the rear end of the rotary cylinder. Rotate around an axis.
  • the sample holder 100 supported by the outer cylinder 51 connected to a part of the rotating cylinder 41 and the sample 102 at the tip of the holder 100 are also rotated around the X-axis.
  • the Z-direction motion mechanism 50 includes a movable portion, a drive portion, a motion guide portion, a position measurement portion, and a vacuum sealing portion, and is installed on the rotating cylinder.
  • the Z-direction motion mechanism 50 includes an outer cylinder 51 (movable portion) that operates substantially in the Z-axis direction, a Z-axis motion driving portion 52 that generates a motion driving force in the substantially Z-axis direction, and a reaction force of the driving force that is applied when deformed.
  • the Z-direction movement mechanism 50 rotates the outer cylinder 51 around the Y-axis. It can also be interpreted as
  • the outer cylinder 51 is housed inside the rotating cylinder 41, the Z-axis operation driving part 52 and the opposing spring 53 are fixed on the rotating cylinder 41, the spherical fulcrum 55 is installed at the front end of the outer cylinder 51 (inside the lens body), The spherical receiver 54 is installed on the mirror body 11 side.
  • a drive signal from the stage controller 19 causes the Z-axis motion drive unit 52 to expand and contract.
  • the Z-axis motion drive unit 52 itself may be a linear actuator, such as a linear actuator.
  • the linear force of the Z-axis motion drive unit 52 when expanding and contracting directly pushes the rear end (outer side) of the outer cylinder 51, and this becomes the point of leverage. is tilted around the Y-axis. As a result, the sample holder 100 supported inside the outer cylinder 51 and the sample 102 at the tip thereof move substantially in the Z-axis direction.
  • the Y-direction movement mechanism has a movable part, a drive part, a movement guide part, a position measurement part, and a vacuum sealing part, and is installed on the rotating cylinder.
  • the Y-direction motion mechanism can be configured by rotating the Z-direction motion mechanism by 90° around the X-axis.
  • An outer cylinder 51 (movable portion) that operates substantially in the Y-axis direction, a Y-axis motion driving portion (not shown) that generates a driving force in the substantially Y-axis direction, and an opposing spring (not shown) that generates a reaction force of the driving force.
  • drive portion a spherical bearing 54 and a spherical fulcrum 55 (motion guide portion) that guide the motion in the substantially Y-axis direction, an O-ring 56 for the spherical fulcrum (vacuum sealing portion), and an encoder (not shown. Position measurement unit).
  • No transmission section is required as the drive section acts directly on the movable section.
  • the Y-axis operation driving part and the opposing spring are fixed on the rotating cylinder 41.
  • Other components are the same as those of the Z-axis movement drive.
  • the operation of the Y-direction operation mechanism 60 is shown below.
  • a drive signal from the stage controller 19 expands and contracts the Y-axis motion drive section.
  • the Y-axis motion drive unit itself may be a linear actuator, such as a linear actuator. Other motions are the same as the Z-direction motion mechanism.
  • the sample holder 100 supported inside the outer cylinder 51 and the sample 102 at the tip thereof move substantially in the Y-axis direction.
  • the compressive deformation of the opposing spring generates a force that opposes the driving force, so that the outer cylinder 51 can move following the contraction operation of the Y-axis operation drive unit.
  • the outer cylinder 51 is guided by the spherical bearing 54 and the spherical fulcrum 55, it is possible to operate substantially in the Z-axis direction (or rotate about the Y-axis) and substantially in the Y-axis direction (or rotate about the Z-axis). It can handle anything.
  • the X-axis linear motion mechanism 70 includes a movable portion, a driving portion, a motion guide portion, a driving force transmission portion, a position measuring portion, and a vacuum sealing portion, and is installed on the rotating cylinder 41. be.
  • the X-axis linear motion mechanism 70 includes a slide cylinder 72 that linearly moves in the X-axis direction, a holder abutment portion 73 (movable portion), and an X-axis linear motion drive portion 74 ( drive portion), guide pins 75 and holder guide grooves 76 (motion guide portion) that guide the X-axis linear motion motion, levers 77 (driving force transmission portion), holder O-rings 78, and O between the inner and outer cylinders. It has a ring 79 (vacuum sealed portion), an encoder (not shown, a position measuring portion), and an inner cylinder 71 .
  • the inner cylinder 71 is formed, for example, by partially fitting and fixing two cylindrical members.
  • the inner cylinder 71 is arranged inside the outer cylinder 51
  • the slide cylinder 72 is arranged inside the inner cylinder 71 .
  • the slide cylinder 72 is connected to the inner cylinder 71 via a bellows 80 .
  • the holder abutting portion 73 is arranged inside the inner cylinder 71 .
  • the holder abutting portion 73 is connected to the slide cylinder 72 via the bellows 81 .
  • a guide pin 75 is coupled to the sample holder 100 .
  • the lever 77 is installed on the rotating barrel 41 .
  • the holder O-ring 78 is installed between the sample holder 100 and the slide cylinder 72
  • the inner cylinder/outer cylinder O-ring 79 is installed between the outer cylinder 51 and the inner cylinder 71 .
  • a drive signal from the stage controller 19 causes the X-axis direct-acting drive unit 74 such as a linear actuator to expand and contract.
  • the point of action of the lever 77 pushes the collar of the slide cylinder 72, so that the slide cylinder 72 linearly moves rearward in the X-axis direction.
  • a vacuum negative pressure can be used when linearly moving forward in the X-axis direction.
  • the O-ring 78 for the holder and the O-ring between the inner cylinder and the outer cylinder are provided. Vacuum sealing at 79 is preferred.
  • the sample stage 16 includes a base 30 that supports the entire sample stage, an X-axis rotation mechanism 40 that rotates around the X-axis, a Z-direction movement mechanism 50 that operates substantially in the Z-axis direction, and a Z-direction movement mechanism 50 that operates substantially in the Z-axis direction. and an X-axis direct-acting mechanism 70 that moves linearly along the X-axis, but the configuration of the sample stage 16 is not limited to this.
  • FIG. 1 is a cross-sectional side view of the sample holder provided with the tilting mechanism of this embodiment.
  • FIG. 1(a) shows the entire sample holder 100
  • FIG. 1(b) shows an enlarged view of the vicinity of the tip of the sample holder 100.
  • FIG. The coordinate system is the same as in FIG. The sample holder 100 is used while being inserted from the insertion portion 101 .
  • a tilting mechanism 130 that performs a tilting operation to tilt the sample in the front-rear direction is installed.
  • inclination in the front-rear direction refers to, for example, rotation (rotation about the Y-axis) within a front-rear vertical plane.
  • the sample holder 100 includes a tilting mechanism driving portion 110 (installed at the rear end of the sample holder 100 and generating a driving force necessary for tilting the tilting mechanism portion 130) and a tilting driving force transmitting portion 120 (a rod- or screw-shaped and a tilting mechanism 130 (installed at the tip of the sample holder 100 and having a mechanism for tilting the sample in the front-rear direction).
  • a tilting mechanism driving portion 110 installed at the rear end of the sample holder 100 and generating a driving force necessary for tilting the tilting mechanism portion 130
  • a tilting driving force transmitting portion 120 a rod- or screw-shaped and a tilting mechanism 130 (installed at the tip of the sample holder 100 and having a mechanism for tilting the sample in the front-rear direction).
  • the charged particle beam device 1 includes a guide section 121 that guides movement of the tilt driving force transmission section 120 .
  • the guide portion 121 has a hollow tubular shape, and the tilt driving force transmission portion 120 is inserted through the hollow portion of the guide portion 121 . With such a structure, the direction of movement of the tilt driving force transmitting portion 120 is properly controlled.
  • the tilt mechanism section 130 includes a load transmission section 140 that transmits the driving force from the tilt driving force transmission section 120, four deformation sections 150 that are elastically deformed by the driving force, and a sample holding section 160 that holds the sample 102 and can be tilted. and
  • the load transmission section 140 includes a first load transmission section 141 and a second load transmission section 142 that transmit the driving force from the tilt driving force transmission section 120 .
  • the second load transmission portion 142 can be formed in, for example, a triangular shape or a triangular prism shape.
  • the second load transmission portion 142 can be supported by the deformation portion 150 at or near each vertex of the triangle, for example.
  • the second load transmission portion 142 can have, for example, a highly rigid structure.
  • the deformation part 150 is simply represented by a circular shape in the drawing, it may be of any shape as long as it can be elastically deformed.
  • a leaf spring may be used.
  • the leaf spring may be folded back to form a shape that is more easily deformable.
  • a specific shape and/or structure of the deformation portion 150 can be appropriately designed by those skilled in the art.
  • the sample holding part 160 has a part that holds a sample (not shown). Also, a leaf spring or the like for fixing the sample may be provided.
  • the deformation section 150 is a deformation section that is elastically deformed by a load, and includes a first deformation section 151 , a second deformation section 152 , a third deformation section 153 and a fourth deformation section 154 .
  • the first deformation portion 151, the second deformation portion 152 and the third deformation portion 153 can be attached to different vertexes of the second load transmission portion 142, respectively.
  • the second load transmission portion 142 can appropriately support each deformation portion with a simple shape.
  • the first load transmission portion 141 is connected to the tilt driving force transmission portion 120 and the first deformation portion 151 .
  • the second load transmission portion 142 is connected to the first deformation portion 151 , the second deformation portion 152 and the third deformation portion 153 .
  • a first deformation portion 151 , a second deformation portion 152 and a third deformation portion 153 are attached to the second load transmission portion 142 .
  • the sample holding portion 160 is connected to the third deformation portion 153 and the fourth deformation portion 154 .
  • the first deformation portion 151 is connected to the first load transmission portion 141 and the second load transmission portion 142 . As a result, the driving force is reliably transmitted between the first load transmission portion 141 and the second load transmission portion 142 .
  • the second deformation portion 152 is connected to the guide portion 121 and the second load transmission portion 142 . This fixes the fulcrum when the second load transmission portion 142 rotates.
  • the third deformation section 153 is connected to the second load transmission section 142 and the sample holding section 160 . Thereby, the driving force is reliably transmitted between the second load transmission portion 142 and the sample holding portion 160 .
  • the fourth deformation section 154 is connected to the guide section 121 and the sample holding section 160 . This fixes the fulcrum when the sample holder 160 rotates.
  • the first deformation section 151 and the second deformation section 152 are arranged behind the third deformation section 153 .
  • the fourth deformation section 154 is arranged forward of the third deformation section 153 . Both the first deformation portion 151 and the fourth deformation portion 154 are arranged below the second deformation portion 152 and the third deformation portion 153 .
  • the third deformation section 153 is above the first deformation section 151 and the fourth deformation section 154, below the second deformation section 152, in front of the first deformation section 151, and behind the fourth deformation section 154. It is in.
  • a tilting mechanism driving unit 110 using a motor or the like generates a rotational force or a linear driving force, and this force is transmitted to the tilting driving force transmission unit 120, which directly linearly moves forward or backward, or linearly moves forward and backward while rotating. By doing so, the driving force is transmitted to the tilt mechanism section 130 .
  • the first load transmission section 141 first receives the linear force.
  • the first load transmission portion 141 moves in the direction of the load due to the load from the tilt driving force transmission portion 120 and advances by being guided by the guide portion 121, for example. Thereby, the first load transmission portion 141 transmits the load to the first deformation portion 151 .
  • the first deformation portion 151 is deformed by the load from the first load transmission portion 141 .
  • the force generated by the deformation of the first deformation portion 151 acts on the second load transmission portion 142 at the force point of the lever.
  • the second load transmission portion 142 rotates about the second deformation portion 152 by the torque generated by the deformation of the first deformation portion 151 and transmits the load to the third deformation portion 153 .
  • the acting force of the second load transmission portion 142 at this time is transmitted to the third deformation portion 153, and the third deformation portion 153 is deformed.
  • the force generated by the deformation of the third deformation portion 153 acts on the sample holding portion 160 at the force point of the lever.
  • the torque generated by the deformation of the third deformation portion 153 causes the sample holding portion 160 to move in the direction opposite to the second load transmission portion 142 (counterclockwise in the example of FIG. 1B) with the fourth deformation portion 154 as a fulcrum. around).
  • the charged particle beam device 1 does not have a sliding portion of the rotating shaft, so nonlinear characteristics are reduced in the tilting operation of the sample in the charged particle beam device 1 .
  • the second load transmission portion 142 has a triangular structure, the rigidity is higher than that of a parallel link structure, resulting in a structure with high vibration resistance.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Beam Exposure (AREA)
PCT/JP2021/048759 2021-12-28 2021-12-28 荷電粒子線装置 Ceased WO2023127083A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
PCT/JP2021/048759 WO2023127083A1 (ja) 2021-12-28 2021-12-28 荷電粒子線装置
KR1020247012370A KR102858391B1 (ko) 2021-12-28 2021-12-28 하전 입자선 장치
JP2023570565A JP7646035B2 (ja) 2021-12-28 2021-12-28 荷電粒子線装置
US18/700,781 US20240404782A1 (en) 2021-12-28 2021-12-28 Charged particle beam device

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Application Number Priority Date Filing Date Title
PCT/JP2021/048759 WO2023127083A1 (ja) 2021-12-28 2021-12-28 荷電粒子線装置

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WO1996020495A2 (en) * 1994-12-28 1996-07-04 Technische Universiteit Delft Specimen holder for an electron microscope and device and method for mounting a specimen in an electron microscope
CN204558415U (zh) * 2015-02-15 2015-08-12 北京工业大学 一种透射电子显微镜用双轴倾转样品台
JP2015220057A (ja) * 2014-05-16 2015-12-07 株式会社メルビル 試料ホルダー

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JPS5014268A (https=) * 1973-06-06 1975-02-14
JPS53113057U (https=) * 1977-02-16 1978-09-08
JPS61116062U (https=) * 1984-12-28 1986-07-22
JPH07262955A (ja) * 1994-03-23 1995-10-13 Jeol Ltd ２軸傾斜試料ホルダ
WO1996020495A2 (en) * 1994-12-28 1996-07-04 Technische Universiteit Delft Specimen holder for an electron microscope and device and method for mounting a specimen in an electron microscope
JP2015220057A (ja) * 2014-05-16 2015-12-07 株式会社メルビル 試料ホルダー
CN204558415U (zh) * 2015-02-15 2015-08-12 北京工业大学 一种透射电子显微镜用双轴倾转样品台

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KR102858391B1 (ko) 2025-09-12

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