KR102858391B1 - 하전 입자선 장치 - Google Patents

하전 입자선 장치

Info

Publication number
KR102858391B1
KR102858391B1 KR1020247012370A KR20247012370A KR102858391B1 KR 102858391 B1 KR102858391 B1 KR 102858391B1 KR 1020247012370 A KR1020247012370 A KR 1020247012370A KR 20247012370 A KR20247012370 A KR 20247012370A KR 102858391 B1 KR102858391 B1 KR 102858391B1
Authority
KR
South Korea
Prior art keywords
deformation
load
unit
driving force
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020247012370A
Other languages
English (en)
Korean (ko)
Other versions
KR20240053009A (ko
Inventor
히로히사 에노모또
겐이찌 니시나까
Original Assignee
주식회사 히타치하이테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 히타치하이테크 filed Critical 주식회사 히타치하이테크
Publication of KR20240053009A publication Critical patent/KR20240053009A/ko
Application granted granted Critical
Publication of KR102858391B1 publication Critical patent/KR102858391B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20207—Tilt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20278—Motorised movement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Beam Exposure (AREA)
KR1020247012370A 2021-12-28 2021-12-28 하전 입자선 장치 Active KR102858391B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/048759 WO2023127083A1 (ja) 2021-12-28 2021-12-28 荷電粒子線装置

Publications (2)

Publication Number Publication Date
KR20240053009A KR20240053009A (ko) 2024-04-23
KR102858391B1 true KR102858391B1 (ko) 2025-09-12

Family

ID=86998392

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247012370A Active KR102858391B1 (ko) 2021-12-28 2021-12-28 하전 입자선 장치

Country Status (4)

Country Link
US (1) US20240404782A1 (https=)
JP (1) JP7646035B2 (https=)
KR (1) KR102858391B1 (https=)
WO (1) WO2023127083A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996020495A3 (en) 1994-12-28 1996-09-06 Univ Delft Tech Specimen holder for an electron microscope and device and method for mounting a specimen in an electron microscope
CN204558415U (zh) 2015-02-15 2015-08-12 北京工业大学 一种透射电子显微镜用双轴倾转样品台
JP2015220057A (ja) 2014-05-16 2015-12-07 株式会社メルビル 試料ホルダー

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5225291B2 (https=) * 1973-06-06 1977-07-06
JPS53113057U (https=) * 1977-02-16 1978-09-08
JPS61116062U (https=) * 1984-12-28 1986-07-22
JPH07262955A (ja) * 1994-03-23 1995-10-13 Jeol Ltd ２軸傾斜試料ホルダ
JP2004063463A (ja) 1996-08-08 2004-02-26 Hitachi Ltd 電子顕微鏡の運転方法及び電子顕微鏡

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996020495A3 (en) 1994-12-28 1996-09-06 Univ Delft Tech Specimen holder for an electron microscope and device and method for mounting a specimen in an electron microscope
JP2015220057A (ja) 2014-05-16 2015-12-07 株式会社メルビル 試料ホルダー
CN204558415U (zh) 2015-02-15 2015-08-12 北京工业大学 一种透射电子显微镜用双轴倾转样品台

Also Published As

Publication number Publication date
JP7646035B2 (ja) 2025-03-14
JPWO2023127083A1 (https=) 2023-07-06
WO2023127083A1 (ja) 2023-07-06
US20240404782A1 (en) 2024-12-05
KR20240053009A (ko) 2024-04-23

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