JP7026205B2 - 電子顕微鏡 - Google Patents
電子顕微鏡 Download PDFInfo
- Publication number
- JP7026205B2 JP7026205B2 JP2020507236A JP2020507236A JP7026205B2 JP 7026205 B2 JP7026205 B2 JP 7026205B2 JP 2020507236 A JP2020507236 A JP 2020507236A JP 2020507236 A JP2020507236 A JP 2020507236A JP 7026205 B2 JP7026205 B2 JP 7026205B2
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- Prior art keywords
- sample
- spherical
- spherical surface
- sample holder
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20207—Tilt
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20214—Rotation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20221—Translation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2802—Transmission microscopes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
これら機構により、試料ホルダ103の回転軸117はつねに球形支点106の球中心と一致している。本実施例においては試料移動機構として、回転ベース111、回転筒123、試料ホルダ外筒107、試料ホルダ103、調整機構等を有する試料移動機構を一例として説明したが、試料移動機構は任意の構成で設けても良く、第2の球面受け119が、試料移動機構の一部である回転ベース111に設けられた一例を説明したが、第2の球面受け119は、試料移動機構の任意の箇所に設けることが可能である。
Claims (2)
- サイドエントリーステージを備えた電子顕微鏡において、
鏡体と、
試料を搭載する試料ホルダと、
前記鏡体に固定され、前記試料ホルダの先端に備えた球形支点と摺動する第1の球面受けと、
前記鏡体に設けられた球面部と、
前記鏡体の外部に設けられた第2の球面受けと、を備え、
前記球面部と前記第2の球面受けとの接触部において、前記球面部と前記第2の球面受けが摺動し、該摺動の軌道が前記第1の球面受けの中心軸を中心とする球面に沿うことを特徴とする電子顕微鏡。 - 請求項1記載の電子顕微鏡において、
前記球面部が可動式であり、該球面部の位置を調整する位置調整機構を有することを特徴とする電子顕微鏡。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2018/011623 WO2019180904A1 (ja) | 2018-03-23 | 2018-03-23 | 電子顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019180904A1 JPWO2019180904A1 (ja) | 2021-01-14 |
JP7026205B2 true JP7026205B2 (ja) | 2022-02-25 |
Family
ID=67988415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020507236A Active JP7026205B2 (ja) | 2018-03-23 | 2018-03-23 | 電子顕微鏡 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11164717B2 (ja) |
JP (1) | JP7026205B2 (ja) |
CN (1) | CN111566775B (ja) |
DE (1) | DE112018006293B4 (ja) |
WO (1) | WO2019180904A1 (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015207482A (ja) | 2014-04-22 | 2015-11-19 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および荷電粒子線装置の試料ステージ |
JP2016103387A (ja) | 2014-11-28 | 2016-06-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP2016173943A (ja) | 2015-03-17 | 2016-09-29 | 株式会社日立製作所 | 試料ホルダ、ステージ装置およびそれを用いた荷電粒子線装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6431337A (en) * | 1987-07-28 | 1989-02-01 | Hitachi Ltd | Sample shifting/inclining device for electron microscope or the like |
JPH08106873A (ja) * | 1994-10-04 | 1996-04-23 | Hitachi Ltd | 電子顕微鏡装置 |
WO2000010191A1 (en) | 1998-08-12 | 2000-02-24 | Gatan, Inc. | Double tilt and rotate specimen holder for a transmission electron microscope |
JP2001312989A (ja) | 2000-04-28 | 2001-11-09 | Inst Of Physical & Chemical Res | 電子顕微鏡用試料ステージ |
JP4073271B2 (ja) | 2002-08-15 | 2008-04-09 | 日本電子株式会社 | 試料ホルダ支持装置 |
US8089053B1 (en) * | 2009-11-10 | 2012-01-03 | Dudley Finch | Dynamically tilting specimen holder for stereo and tomographic imaging in a transmission electron microscope using a combination of micro electro mechanical systems (MEMS) and piezoelectric transducers (PZTs) |
JP2014038786A (ja) * | 2012-08-20 | 2014-02-27 | Hitachi High-Technologies Corp | 荷電粒子線装置及び試料移動装置 |
-
2018
- 2018-03-23 CN CN201880085852.1A patent/CN111566775B/zh active Active
- 2018-03-23 WO PCT/JP2018/011623 patent/WO2019180904A1/ja active Application Filing
- 2018-03-23 US US16/961,567 patent/US11164717B2/en active Active
- 2018-03-23 DE DE112018006293.7T patent/DE112018006293B4/de active Active
- 2018-03-23 JP JP2020507236A patent/JP7026205B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015207482A (ja) | 2014-04-22 | 2015-11-19 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および荷電粒子線装置の試料ステージ |
JP2016103387A (ja) | 2014-11-28 | 2016-06-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP2016173943A (ja) | 2015-03-17 | 2016-09-29 | 株式会社日立製作所 | 試料ホルダ、ステージ装置およびそれを用いた荷電粒子線装置 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2019180904A1 (ja) | 2021-01-14 |
US11164717B2 (en) | 2021-11-02 |
DE112018006293B4 (de) | 2023-01-19 |
CN111566775B (zh) | 2023-06-13 |
CN111566775A (zh) | 2020-08-21 |
US20210066024A1 (en) | 2021-03-04 |
DE112018006293T5 (de) | 2020-10-01 |
WO2019180904A1 (ja) | 2019-09-26 |
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