JP7634323B2 - 匂い検出装置及び匂い検出方法 - Google Patents

匂い検出装置及び匂い検出方法 Download PDF

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Publication number
JP7634323B2
JP7634323B2 JP2022570889A JP2022570889A JP7634323B2 JP 7634323 B2 JP7634323 B2 JP 7634323B2 JP 2022570889 A JP2022570889 A JP 2022570889A JP 2022570889 A JP2022570889 A JP 2022570889A JP 7634323 B2 JP7634323 B2 JP 7634323B2
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Prior art keywords
sensor
gas
chamber
flow path
detection device
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English (en)
Japanese (ja)
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JPWO2022137438A1 (https=
JPWO2022137438A5 (https=
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順二 尾下
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Taiyo Yuden Co Ltd
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Taiyo Yuden Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G01N2291/0215—Mixtures of three or more gases, e.g. air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices

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  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2022570889A 2020-12-24 2020-12-24 匂い検出装置及び匂い検出方法 Active JP7634323B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/048470 WO2022137438A1 (ja) 2020-12-24 2020-12-24 匂い検出装置及び匂い検出方法

Publications (3)

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JPWO2022137438A1 JPWO2022137438A1 (https=) 2022-06-30
JPWO2022137438A5 JPWO2022137438A5 (https=) 2023-09-13
JP7634323B2 true JP7634323B2 (ja) 2025-02-21

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JP2022570889A Active JP7634323B2 (ja) 2020-12-24 2020-12-24 匂い検出装置及び匂い検出方法

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US (1) US12461071B2 (https=)
JP (1) JP7634323B2 (https=)
WO (1) WO2022137438A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023042559A1 (ja) * 2021-09-14 2023-03-23 太陽誘電株式会社 におい測定装置、脱離処理装置及びにおい測定方法
WO2023119851A1 (ja) * 2021-12-24 2023-06-29 太陽誘電株式会社 におい測定装置、においセンサの制御方法、およびにおい測定装置のクリーニング方法
US20240053315A1 (en) * 2022-08-09 2024-02-15 Triple Win Technology(Shenzhen) Co.Ltd. Gas sampling mechanism and gas analysis device having the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002168748A (ja) 2000-12-01 2002-06-14 Ebara Corp ケミカルフィルタ終点検知モニター、該モニターを備えた基板搬送容器、基板搬送容器充電ステーション、及び、ケミカルフィルタ終点検知方法
JP2018536984A (ja) 2015-10-05 2018-12-13 ブルックス シーシーエス ゲーエムベーハーＢｒｏｏｋｓ ＣＣＳ ＧｍｂＨ 半導体システムにおける湿度制御

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0514197Y2 (https=) * 1986-01-23 1993-04-15
JP3704854B2 (ja) 1996-12-11 2005-10-12 株式会社島津製作所 におい測定装置
JPH1183820A (ja) * 1997-09-01 1999-03-26 Mitsubishi Electric Corp におい測定装置
JP3552999B2 (ja) 2000-07-19 2004-08-11 光明理化学工業株式会社 ガス測定器及びガス測定方法
CA2931609A1 (en) * 2013-12-04 2015-06-11 Pocared Diagnostics Ltd. Filter arrangement with slider valve and method for using the same
JP6467194B2 (ja) 2014-11-07 2019-02-06 日本碍子株式会社 評価装置及び評価方法
CN109716099A (zh) * 2016-09-30 2019-05-03 京瓷株式会社 传感器模块以及检测方法
JP2019120561A (ja) 2017-12-28 2019-07-22 京セラ株式会社 センサモジュール
CN114088594B (zh) * 2020-08-24 2024-05-28 中国石油天然气股份有限公司 在线气体预处理系统性能确定装置及方法
WO2023119851A1 (ja) * 2021-12-24 2023-06-29 太陽誘電株式会社 におい測定装置、においセンサの制御方法、およびにおい測定装置のクリーニング方法
US12117188B2 (en) * 2022-05-31 2024-10-15 Lennox Industries Inc. Indoor air quality monitors for commercial HVAC systems

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002168748A (ja) 2000-12-01 2002-06-14 Ebara Corp ケミカルフィルタ終点検知モニター、該モニターを備えた基板搬送容器、基板搬送容器充電ステーション、及び、ケミカルフィルタ終点検知方法
JP2018536984A (ja) 2015-10-05 2018-12-13 ブルックス シーシーエス ゲーエムベーハーＢｒｏｏｋｓ ＣＣＳ ＧｍｂＨ 半導体システムにおける湿度制御

Also Published As

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JPWO2022137438A1 (https=) 2022-06-30
US20230324344A1 (en) 2023-10-12
US12461071B2 (en) 2025-11-04
WO2022137438A1 (ja) 2022-06-30

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