JP7625411B2 - 搬送装置、生産システム、及び物品の製造方法 - Google Patents

搬送装置、生産システム、及び物品の製造方法 Download PDF

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Publication number
JP7625411B2
JP7625411B2 JP2020203785A JP2020203785A JP7625411B2 JP 7625411 B2 JP7625411 B2 JP 7625411B2 JP 2020203785 A JP2020203785 A JP 2020203785A JP 2020203785 A JP2020203785 A JP 2020203785A JP 7625411 B2 JP7625411 B2 JP 7625411B2
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mover
sensor
sensors
information
coefficient
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JP2021126040A (ja
JP2021126040A5 (enExample
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拓馬 橋詰
公介 勝浦
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Canon Inc
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Canon Inc
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Priority to US17/146,797 priority Critical patent/US11472638B2/en
Priority to CN202110160793.3A priority patent/CN113247592B/zh
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JP2020203785A 2020-02-07 2020-12-08 搬送装置、生産システム、及び物品の製造方法 Active JP7625411B2 (ja)

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US17/146,797 US11472638B2 (en) 2020-02-07 2021-01-12 Conveyance apparatus, production system, and method for manufacturing article
CN202110160793.3A CN113247592B (zh) 2020-02-07 2021-02-05 输送设备、生产系统以及用于制造物品的方法

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JP2020019511 2020-02-07
JP2020019511 2020-02-07

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JP2021126040A JP2021126040A (ja) 2021-08-30
JP2021126040A5 JP2021126040A5 (enExample) 2023-12-12
JP7625411B2 true JP7625411B2 (ja) 2025-02-03

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023087446A (ja) * 2021-12-13 2023-06-23 キヤノン株式会社 搬送装置
CN115822410A (zh) * 2022-12-19 2023-03-21 杭州双星五金有限公司 一种直线电机型移门控制装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004187401A (ja) 2002-12-03 2004-07-02 Nikon Corp リニアモータ装置、ステージ装置、及び露光装置
JP2006201092A (ja) 2005-01-21 2006-08-03 Yaskawa Electric Corp ６自由度移動体の位置・姿勢計測方法および位置・姿勢計測装置
JP2019168356A (ja) 2018-03-23 2019-10-03 株式会社東京精密 表面形状測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004187401A (ja) 2002-12-03 2004-07-02 Nikon Corp リニアモータ装置、ステージ装置、及び露光装置
JP2006201092A (ja) 2005-01-21 2006-08-03 Yaskawa Electric Corp ６自由度移動体の位置・姿勢計測方法および位置・姿勢計測装置
JP2019168356A (ja) 2018-03-23 2019-10-03 株式会社東京精密 表面形状測定装置

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