JP2021126040A5 - - Google Patents

Download PDF

Info

Publication number
JP2021126040A5
JP2021126040A5 JP2020203785A JP2020203785A JP2021126040A5 JP 2021126040 A5 JP2021126040 A5 JP 2021126040A5 JP 2020203785 A JP2020203785 A JP 2020203785A JP 2020203785 A JP2020203785 A JP 2020203785A JP 2021126040 A5 JP2021126040 A5 JP 2021126040A5
Authority
JP
Japan
Prior art keywords
movable element
sensors
coefficient
region
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2020203785A
Other languages
English (en)
Japanese (ja)
Other versions
JP7625411B2 (ja
JP2021126040A (ja
Filing date
Publication date
Application filed filed Critical
Priority to US17/146,797 priority Critical patent/US11472638B2/en
Priority to CN202110160793.3A priority patent/CN113247592B/zh
Publication of JP2021126040A publication Critical patent/JP2021126040A/ja
Publication of JP2021126040A5 publication Critical patent/JP2021126040A5/ja
Application granted granted Critical
Publication of JP7625411B2 publication Critical patent/JP7625411B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2020203785A 2020-02-07 2020-12-08 搬送装置、生産システム、及び物品の製造方法 Active JP7625411B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US17/146,797 US11472638B2 (en) 2020-02-07 2021-01-12 Conveyance apparatus, production system, and method for manufacturing article
CN202110160793.3A CN113247592B (zh) 2020-02-07 2021-02-05 输送设备、生产系统以及用于制造物品的方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020019511 2020-02-07
JP2020019511 2020-02-07

Publications (3)

Publication Number Publication Date
JP2021126040A JP2021126040A (ja) 2021-08-30
JP2021126040A5 true JP2021126040A5 (enExample) 2023-12-12
JP7625411B2 JP7625411B2 (ja) 2025-02-03

Family

ID=77460222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020203785A Active JP7625411B2 (ja) 2020-02-07 2020-12-08 搬送装置、生産システム、及び物品の製造方法

Country Status (1)

Country Link
JP (1) JP7625411B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023087446A (ja) * 2021-12-13 2023-06-23 キヤノン株式会社 搬送装置
CN115822410A (zh) * 2022-12-19 2023-03-21 杭州双星五金有限公司 一种直线电机型移门控制装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4314555B2 (ja) 2002-12-03 2009-08-19 株式会社ニコン リニアモータ装置、ステージ装置、及び露光装置
JP2006201092A (ja) 2005-01-21 2006-08-03 Yaskawa Electric Corp ６自由度移動体の位置・姿勢計測方法および位置・姿勢計測装置
JP7259198B2 (ja) 2018-03-23 2023-04-18 株式会社東京精密 表面形状測定装置

Similar Documents

Publication Publication Date Title
JP2021126040A5 (enExample)
TWI505055B (zh) Moving body system and moving body transition control method
JP2020028212A5 (enExample)
US10239418B2 (en) Multi-trajectory track and mover system
EP3081511A3 (en) Method for positioning an autonomous vehicle in a warehouse and maintenance system
JP2014217077A5 (enExample)
JP2013053006A5 (ja) シート処理装置及びその制御方法
WO2008064090A3 (en) Robot calibration system and method for wafer handling robots in a cmp system
US20140271061A1 (en) Manufacturing system, robot cell apparatus, and method of manufacturing product
JP2009155030A5 (enExample)
CN109478066A (zh) 移动机器人以及控制方法
CN103264919A (zh) 一种卷材纠偏控制系统
JP2013521591A5 (enExample)
JP2019062614A5 (enExample)
EP2278409A3 (en) Extended registration control of a sheet in a media handling assembly
AU2012320142A8 (en) Method and device for feeding products to a processing station
KR102788789B1 (ko) 반송 시스템, 가동 요소, 제어 장치, 제어 방법 및 물품의 제조 방법
JP7451205B2 (ja) 搬送装置および物品の製造方法
US11181393B2 (en) Encoder system for position determination with varying scale
JP6606187B2 (ja) ブランクをプレス機に載せる方法およびシステム
JP2021126040A (ja) 搬送装置、生産システム、及び物品の製造方法
JP2016081159A (ja) 移動体
JP2023083978A5 (enExample)
KR101342656B1 (ko) 8채널 감지센서를 갖는 라인 트레이서
US12438483B2 (en) Transport apparatus