JP7554291B2 - 光干渉計を介した光信号の伝送を利用する温度測定システム及び方法 - Google Patents

光干渉計を介した光信号の伝送を利用する温度測定システム及び方法 Download PDF

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JP7554291B2
JP7554291B2 JP2022574427A JP2022574427A JP7554291B2 JP 7554291 B2 JP7554291 B2 JP 7554291B2 JP 2022574427 A JP2022574427 A JP 2022574427A JP 2022574427 A JP2022574427 A JP 2022574427A JP 7554291 B2 JP7554291 B2 JP 7554291B2
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optical signal
temperature
interferometer
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arm
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JP2023528463A5 (enExample
JP2023528463A (ja
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モハマド アミン タダヨン，
ケビン アール． ウィリアムソン，
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Fluke Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
    • G01K11/3206—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K15/00—Testing or calibrating of thermometers
    • G01K15/005—Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP2022574427A 2020-06-03 2021-06-03 光干渉計を介した光信号の伝送を利用する温度測定システム及び方法 Active JP7554291B2 (ja)

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US202063034063P 2020-06-03 2020-06-03
US63/034,063 2020-06-03
PCT/US2021/035767 WO2021247912A1 (en) 2020-06-03 2021-06-03 Temperature measurement system and method using optical signal transmission through an optical interferometer

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JP2023528463A JP2023528463A (ja) 2023-07-04
JP2023528463A5 JP2023528463A5 (enExample) 2024-05-21
JP7554291B2 true JP7554291B2 (ja) 2024-09-19

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EP (1) EP4162245A1 (enExample)
JP (1) JP7554291B2 (enExample)
KR (1) KR102745808B1 (enExample)
CN (1) CN115803595A (enExample)
TW (1) TWI858261B (enExample)
WO (1) WO2021247912A1 (enExample)

Families Citing this family (4)

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Publication number Priority date Publication date Assignee Title
TWI871469B (zh) 2020-06-03 2025-02-01 美商富克有限公司 使用共振器差分技術之光子裝置
CN112834072B (zh) * 2021-02-08 2021-09-24 广东海洋大学 一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器
WO2023183064A1 (en) 2022-03-22 2023-09-28 Fluke Corporation Temperature measurement system and method using multimode of an optical resonator
US12498275B2 (en) 2023-01-31 2025-12-16 Fluke Corporation Temperature measurement using fabry-pãƒâ€°rot resonator on end of optical fiber

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001041847A (ja) 1999-07-28 2001-02-16 Fujikura Ltd 光ファイバ干渉型センサおよび光ファイバ干渉型信号検出方法
JP2018185278A (ja) 2017-04-27 2018-11-22 アンリツ株式会社 光周波数領域反射測定装置及び光周波数領域反射測定方法

Family Cites Families (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4515430A (en) * 1980-09-15 1985-05-07 Massachusetts Institute Of Technology Integrated optical transducers
GB8310835D0 (en) * 1983-04-21 1983-05-25 Jackson D A Remote temperature sensor
US4974961A (en) * 1986-09-12 1990-12-04 Jackson David A Optical fibre measuring system
CH684212A5 (fr) * 1990-10-16 1994-07-29 Suisse Electronique Microtech Dispositif optique à interférométrie en lumière blanche.
US5317524A (en) * 1991-09-19 1994-05-31 Allied-Signal Inc. Spectral signal analyzer system
US6243506B1 (en) * 1997-07-18 2001-06-05 National Science Council Optical frequency and temperature sensor system
DE19960370C2 (de) * 1999-12-14 2001-11-22 Rubitec Gesellschaft Fuer Innovation & Technologie Ruhr Univ Bochum Mbh Optischer Temperatursensor
DE10301416B3 (de) * 2003-01-16 2004-07-15 Medizinisches Laserzentrum Lübeck GmbH Verfahren und Vorrichtung zur kontaktlosen Temperaturüberwachung und -regelung
US20040208421A1 (en) * 2003-04-17 2004-10-21 Alps Electric Co., Ltd. Mach-zehnder interferometer optical switch and mach-zehnder interferometer temperature sensor
CA2502275C (en) * 2004-03-26 2008-08-05 University Of New Brunswick System and method for resolution enhancement of a distributed sensor
US7327472B2 (en) * 2004-07-23 2008-02-05 Nusensors, Inc. High temperature, minimally invasive optical sensing modules
JP4742279B2 (ja) * 2005-07-05 2011-08-10 国立大学法人広島大学 温度測定装置及びこれを利用した熱処理装置、温度測定方法
US7796262B1 (en) * 2007-05-31 2010-09-14 Nomadics, Inc. Integrated optical resonator device for measuring chemical and biological analyte concentrations
US8096704B2 (en) * 2008-05-27 2012-01-17 Nusensors, Inc. Extreme temperature robust optical sensor designs and fault-tolerant signal processing
KR101062021B1 (ko) * 2009-05-13 2011-09-05 인하대학교 산학협력단 간섭무늬 측정을 이용한 전기광학 및 열광학 계수 측정시스템 그리고 이를 이용한 전기광학 및 열광학 계수 측정방법
CN101825480B (zh) * 2010-01-29 2011-06-08 浙江大学 一种基于宽带光源和级连光波导滤波器的光传感器
JP5591565B2 (ja) * 2010-03-12 2014-09-17 東京エレクトロン株式会社 温度測定用プローブ、温度測定システム及びこれを用いた温度測定方法
JP5894993B2 (ja) * 2010-09-08 2016-03-30 ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー スローライトファイバブラッググレーティングセンサ
US20170276870A1 (en) * 2010-11-30 2017-09-28 Tshwane University Of Technology Cmos based micro-photonic systems
JP5730638B2 (ja) * 2011-03-28 2015-06-10 東京エレクトロン株式会社 基板処理装置の処理室内構成部材及びその温度測定方法
US8670124B2 (en) * 2012-01-31 2014-03-11 Nokia Corporation Apparatus and method for converting sensor input signals into digital output signals
US9846060B2 (en) * 2013-03-28 2017-12-19 Frauhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Optical sensor arrangement and method for measuring an observable
US9726553B2 (en) * 2013-06-11 2017-08-08 The United States Of America, As Represented By The Secretary Of Commerce Optical temperature sensor and use of same
JP2015099711A (ja) * 2013-11-20 2015-05-28 株式会社日立製作所 センサ光回路並びにリチウムイオン二次電池
WO2015090448A1 (en) * 2013-12-20 2015-06-25 Abb Technology Ag Optical sensor
JP6236369B2 (ja) * 2014-09-03 2017-11-22 日本電信電話株式会社 光ファイバの温度・歪み分布測定方法および装置
US9958605B2 (en) * 2015-12-01 2018-05-01 Rhode Island Board Of Education, State Of Rhode Island And Providence Plantations Weak reflection terahertz fiber optic devices for distributed sensing applications
US10173262B2 (en) * 2016-02-04 2019-01-08 The Aerospace Corporation Systems and methods for monitoring temperature using acoustic waves during processing of a material
CN105698871B (zh) * 2016-03-29 2018-08-21 天津大学 基于光频域反射的分布式应变温度同时测量装置及方法
US10056733B1 (en) * 2017-03-08 2018-08-21 Inphi Corporation Wavelength locker integrated with a silicon photonics system
US11346770B2 (en) * 2018-03-29 2022-05-31 Khalifa University of Science and Technology Optical fiber sensor for salinity and temperature measurement
US10955617B2 (en) * 2018-10-01 2021-03-23 Government Of The United States Of America, As Represented By The Secretary Of Commerce High-resolution photonic thermometer article
PL235969B1 (pl) * 2018-10-18 2020-11-16 El Cab Spolka Z Ograniczona Odpowiedzialnoscia Urządzenie do monitorowania temperatury, sposób monitorowania temperatury oraz system monitorowania temperatury
US11385130B2 (en) * 2019-02-22 2022-07-12 Ryan Seeley Multi-spectral feature sensing techniques and sensors for determining a phase shift by comparing a measured narrowband response to a known wideband response
US10900838B1 (en) * 2019-09-20 2021-01-26 Honeywell International Inc. Wavemeter system using a set of optical chips
US20210164853A1 (en) * 2019-11-29 2021-06-03 Meggitt Sa Optical sensor for the measurement of physical parameters in harsh environments and methods of making and using the same
US11255746B2 (en) * 2019-12-06 2022-02-22 Government Of The United States Of America, As Represented By The Secretary Of Commerce Photonic resonator analyzer and characterizing a photonic resonator
WO2021156731A1 (en) 2020-02-03 2021-08-12 Onpoint Technologies, Llc Temperature sensor and temperature-measurement method
US11747133B2 (en) * 2020-04-28 2023-09-05 Board Of Trustees Of Michigan State University Demodulation of fiber optic interferometric sensors
TWI871469B (zh) 2020-06-03 2025-02-01 美商富克有限公司 使用共振器差分技術之光子裝置
KR102490915B1 (ko) * 2020-07-14 2023-01-20 서울시립대학교 산학협력단 마하-젠더 간섭계 및 이를 이용한 센서

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001041847A (ja) 1999-07-28 2001-02-16 Fujikura Ltd 光ファイバ干渉型センサおよび光ファイバ干渉型信号検出方法
JP2018185278A (ja) 2017-04-27 2018-11-22 アンリツ株式会社 光周波数領域反射測定装置及び光周波数領域反射測定方法

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EP4162245A1 (en) 2023-04-12
TWI858261B (zh) 2024-10-11
KR20230017791A (ko) 2023-02-06
US20210381908A1 (en) 2021-12-09
JP2023528463A (ja) 2023-07-04
US11906368B2 (en) 2024-02-20
TW202217253A (zh) 2022-05-01
KR102745808B1 (ko) 2024-12-20
CN115803595A (zh) 2023-03-14
WO2021247912A1 (en) 2021-12-09

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