CN115803595A - 使用通过光学干涉仪的光学信号传输之温度测量系统及方法 - Google Patents
使用通过光学干涉仪的光学信号传输之温度测量系统及方法 Download PDFInfo
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- CN115803595A CN115803595A CN202180031802.7A CN202180031802A CN115803595A CN 115803595 A CN115803595 A CN 115803595A CN 202180031802 A CN202180031802 A CN 202180031802A CN 115803595 A CN115803595 A CN 115803595A
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- optical signal
- temperature
- interferometer
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- measured
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
- G01K11/3206—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K15/00—Testing or calibrating of thermometers
- G01K15/005—Calibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063034063P | 2020-06-03 | 2020-06-03 | |
| US63/034063 | 2020-06-03 | ||
| PCT/US2021/035767 WO2021247912A1 (en) | 2020-06-03 | 2021-06-03 | Temperature measurement system and method using optical signal transmission through an optical interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115803595A true CN115803595A (zh) | 2023-03-14 |
Family
ID=76730991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202180031802.7A Pending CN115803595A (zh) | 2020-06-03 | 2021-06-03 | 使用通过光学干涉仪的光学信号传输之温度测量系统及方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11906368B2 (enExample) |
| EP (1) | EP4162245A1 (enExample) |
| JP (1) | JP7554291B2 (enExample) |
| KR (1) | KR102745808B1 (enExample) |
| CN (1) | CN115803595A (enExample) |
| TW (1) | TWI858261B (enExample) |
| WO (1) | WO2021247912A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI871469B (zh) | 2020-06-03 | 2025-02-01 | 美商富克有限公司 | 使用共振器差分技術之光子裝置 |
| CN112834072B (zh) * | 2021-02-08 | 2021-09-24 | 广东海洋大学 | 一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器 |
| WO2023183064A1 (en) | 2022-03-22 | 2023-09-28 | Fluke Corporation | Temperature measurement system and method using multimode of an optical resonator |
| US12498275B2 (en) | 2023-01-31 | 2025-12-16 | Fluke Corporation | Temperature measurement using fabry-pãƒâ€°rot resonator on end of optical fiber |
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| US4515430A (en) * | 1980-09-15 | 1985-05-07 | Massachusetts Institute Of Technology | Integrated optical transducers |
| GB8310835D0 (en) * | 1983-04-21 | 1983-05-25 | Jackson D A | Remote temperature sensor |
| US4974961A (en) * | 1986-09-12 | 1990-12-04 | Jackson David A | Optical fibre measuring system |
| CH684212A5 (fr) * | 1990-10-16 | 1994-07-29 | Suisse Electronique Microtech | Dispositif optique à interférométrie en lumière blanche. |
| US5317524A (en) * | 1991-09-19 | 1994-05-31 | Allied-Signal Inc. | Spectral signal analyzer system |
| US6243506B1 (en) * | 1997-07-18 | 2001-06-05 | National Science Council | Optical frequency and temperature sensor system |
| JP2001041847A (ja) * | 1999-07-28 | 2001-02-16 | Fujikura Ltd | 光ファイバ干渉型センサおよび光ファイバ干渉型信号検出方法 |
| DE19960370C2 (de) * | 1999-12-14 | 2001-11-22 | Rubitec Gesellschaft Fuer Innovation & Technologie Ruhr Univ Bochum Mbh | Optischer Temperatursensor |
| DE10301416B3 (de) * | 2003-01-16 | 2004-07-15 | Medizinisches Laserzentrum Lübeck GmbH | Verfahren und Vorrichtung zur kontaktlosen Temperaturüberwachung und -regelung |
| US20040208421A1 (en) * | 2003-04-17 | 2004-10-21 | Alps Electric Co., Ltd. | Mach-zehnder interferometer optical switch and mach-zehnder interferometer temperature sensor |
| CA2502275C (en) * | 2004-03-26 | 2008-08-05 | University Of New Brunswick | System and method for resolution enhancement of a distributed sensor |
| US7327472B2 (en) * | 2004-07-23 | 2008-02-05 | Nusensors, Inc. | High temperature, minimally invasive optical sensing modules |
| JP4742279B2 (ja) * | 2005-07-05 | 2011-08-10 | 国立大学法人広島大学 | 温度測定装置及びこれを利用した熱処理装置、温度測定方法 |
| US7796262B1 (en) * | 2007-05-31 | 2010-09-14 | Nomadics, Inc. | Integrated optical resonator device for measuring chemical and biological analyte concentrations |
| US8096704B2 (en) * | 2008-05-27 | 2012-01-17 | Nusensors, Inc. | Extreme temperature robust optical sensor designs and fault-tolerant signal processing |
| KR101062021B1 (ko) * | 2009-05-13 | 2011-09-05 | 인하대학교 산학협력단 | 간섭무늬 측정을 이용한 전기광학 및 열광학 계수 측정시스템 그리고 이를 이용한 전기광학 및 열광학 계수 측정방법 |
| CN101825480B (zh) * | 2010-01-29 | 2011-06-08 | 浙江大学 | 一种基于宽带光源和级连光波导滤波器的光传感器 |
| JP5591565B2 (ja) * | 2010-03-12 | 2014-09-17 | 東京エレクトロン株式会社 | 温度測定用プローブ、温度測定システム及びこれを用いた温度測定方法 |
| JP5894993B2 (ja) * | 2010-09-08 | 2016-03-30 | ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー | スローライトファイバブラッググレーティングセンサ |
| US20170276870A1 (en) * | 2010-11-30 | 2017-09-28 | Tshwane University Of Technology | Cmos based micro-photonic systems |
| JP5730638B2 (ja) * | 2011-03-28 | 2015-06-10 | 東京エレクトロン株式会社 | 基板処理装置の処理室内構成部材及びその温度測定方法 |
| US8670124B2 (en) * | 2012-01-31 | 2014-03-11 | Nokia Corporation | Apparatus and method for converting sensor input signals into digital output signals |
| US9846060B2 (en) * | 2013-03-28 | 2017-12-19 | Frauhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Optical sensor arrangement and method for measuring an observable |
| US9726553B2 (en) * | 2013-06-11 | 2017-08-08 | The United States Of America, As Represented By The Secretary Of Commerce | Optical temperature sensor and use of same |
| JP2015099711A (ja) * | 2013-11-20 | 2015-05-28 | 株式会社日立製作所 | センサ光回路並びにリチウムイオン二次電池 |
| WO2015090448A1 (en) * | 2013-12-20 | 2015-06-25 | Abb Technology Ag | Optical sensor |
| JP6236369B2 (ja) * | 2014-09-03 | 2017-11-22 | 日本電信電話株式会社 | 光ファイバの温度・歪み分布測定方法および装置 |
| US9958605B2 (en) * | 2015-12-01 | 2018-05-01 | Rhode Island Board Of Education, State Of Rhode Island And Providence Plantations | Weak reflection terahertz fiber optic devices for distributed sensing applications |
| US10173262B2 (en) * | 2016-02-04 | 2019-01-08 | The Aerospace Corporation | Systems and methods for monitoring temperature using acoustic waves during processing of a material |
| CN105698871B (zh) * | 2016-03-29 | 2018-08-21 | 天津大学 | 基于光频域反射的分布式应变温度同时测量装置及方法 |
| US10056733B1 (en) * | 2017-03-08 | 2018-08-21 | Inphi Corporation | Wavelength locker integrated with a silicon photonics system |
| JP6828227B2 (ja) * | 2017-04-27 | 2021-02-10 | アンリツ株式会社 | 光周波数領域反射測定装置及び光周波数領域反射測定方法 |
| US11346770B2 (en) * | 2018-03-29 | 2022-05-31 | Khalifa University of Science and Technology | Optical fiber sensor for salinity and temperature measurement |
| US10955617B2 (en) * | 2018-10-01 | 2021-03-23 | Government Of The United States Of America, As Represented By The Secretary Of Commerce | High-resolution photonic thermometer article |
| PL235969B1 (pl) * | 2018-10-18 | 2020-11-16 | El Cab Spolka Z Ograniczona Odpowiedzialnoscia | Urządzenie do monitorowania temperatury, sposób monitorowania temperatury oraz system monitorowania temperatury |
| US11385130B2 (en) * | 2019-02-22 | 2022-07-12 | Ryan Seeley | Multi-spectral feature sensing techniques and sensors for determining a phase shift by comparing a measured narrowband response to a known wideband response |
| US10900838B1 (en) * | 2019-09-20 | 2021-01-26 | Honeywell International Inc. | Wavemeter system using a set of optical chips |
| US20210164853A1 (en) * | 2019-11-29 | 2021-06-03 | Meggitt Sa | Optical sensor for the measurement of physical parameters in harsh environments and methods of making and using the same |
| US11255746B2 (en) * | 2019-12-06 | 2022-02-22 | Government Of The United States Of America, As Represented By The Secretary Of Commerce | Photonic resonator analyzer and characterizing a photonic resonator |
| WO2021156731A1 (en) | 2020-02-03 | 2021-08-12 | Onpoint Technologies, Llc | Temperature sensor and temperature-measurement method |
| US11747133B2 (en) * | 2020-04-28 | 2023-09-05 | Board Of Trustees Of Michigan State University | Demodulation of fiber optic interferometric sensors |
| TWI871469B (zh) | 2020-06-03 | 2025-02-01 | 美商富克有限公司 | 使用共振器差分技術之光子裝置 |
| KR102490915B1 (ko) * | 2020-07-14 | 2023-01-20 | 서울시립대학교 산학협력단 | 마하-젠더 간섭계 및 이를 이용한 센서 |
-
2021
- 2021-06-03 US US17/338,454 patent/US11906368B2/en active Active
- 2021-06-03 KR KR1020227042193A patent/KR102745808B1/ko active Active
- 2021-06-03 EP EP21736786.1A patent/EP4162245A1/en active Pending
- 2021-06-03 CN CN202180031802.7A patent/CN115803595A/zh active Pending
- 2021-06-03 WO PCT/US2021/035767 patent/WO2021247912A1/en not_active Ceased
- 2021-06-03 JP JP2022574427A patent/JP7554291B2/ja active Active
- 2021-06-03 TW TW110120285A patent/TWI858261B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| EP4162245A1 (en) | 2023-04-12 |
| TWI858261B (zh) | 2024-10-11 |
| KR20230017791A (ko) | 2023-02-06 |
| US20210381908A1 (en) | 2021-12-09 |
| JP2023528463A (ja) | 2023-07-04 |
| US11906368B2 (en) | 2024-02-20 |
| JP7554291B2 (ja) | 2024-09-19 |
| TW202217253A (zh) | 2022-05-01 |
| KR102745808B1 (ko) | 2024-12-20 |
| WO2021247912A1 (en) | 2021-12-09 |
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