JP7491702B2 - ミラーユニット - Google Patents
ミラーユニット Download PDFInfo
- Publication number
- JP7491702B2 JP7491702B2 JP2020011753A JP2020011753A JP7491702B2 JP 7491702 B2 JP7491702 B2 JP 7491702B2 JP 2020011753 A JP2020011753 A JP 2020011753A JP 2020011753 A JP2020011753 A JP 2020011753A JP 7491702 B2 JP7491702 B2 JP 7491702B2
- Authority
- JP
- Japan
- Prior art keywords
- wall portion
- window member
- mirror
- movable part
- frame member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003287 optical effect Effects 0.000 claims description 54
- 239000000463 material Substances 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 239000010931 gold Substances 0.000 description 7
- 239000010949 copper Substances 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000007769 metal material Substances 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 229910001020 Au alloy Inorganic materials 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
- G02B27/0031—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for scanning purposes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Description
[ミラーユニットの全体構成]
[光走査デバイスの構成]
[パッケージの構成]
[作用及び効果]
Claims (4)
- 所定の軸線周りに揺動可能に構成された可動部、及び前記可動部上に設けられたミラー面を有する光走査デバイスと、
第1方向から見た場合に前記ミラー面を囲むように配置された枠部材と、
前記枠部材の開口を覆うように前記枠部材上に配置された平板状の窓部材と、を備え、
前記枠部材は、前記第1方向に垂直な第2方向において互いに向かい合う第1壁部及び第2壁部を有し、
前記軸線は、前記第1方向及び前記第2方向の双方に垂直であり、
前記第1壁部の高さは、前記第2壁部の高さよりも高く、
前記窓部材は、前記第1壁部の頂面上及び前記第2壁部の頂面上に配置され、前記ミラー面に対して傾斜しており、
前記ミラー面を通り且つ前記第1方向及び前記第2方向の双方に平行な断面において、前記ミラー面における前記第1壁部側の第1端と、前記窓部材において前記枠部材とは反対側の外表面と第1側面とにより前記第1壁部側に形成された第1角部とを通る第1直線から、前記第1壁部が離れており、
前記断面において、前記ミラー面における前記第2壁部側の第2端と、前記窓部材において前記外表面と第2側面とにより前記第2壁部側に形成された第2角部とを通る第2直線から、前記第2壁部が離れている、ミラーユニット。 - 前記可動部が前記軸線周りに最大振れ角まで回転した状態において、前記第1直線から前記第1壁部が離れている、請求項1に記載のミラーユニット。
- 前記第1壁部の内側面と前記窓部材における前記枠部材側の内表面との間の境界部には、前記第1壁部と前記窓部材との間の接合材によりフィレットが形成されており、
前記断面において、前記第1直線から前記フィレットが離れている、請求項1又は2に記載のミラーユニット。 - 前記窓部材の厚さは、前記第1壁部の厚さよりも薄い、請求項1~3のいずれか一項に記載のミラーユニット。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/775,456 US11372240B2 (en) | 2019-01-30 | 2020-01-29 | Mirror unit |
US17/749,697 US11782267B2 (en) | 2019-01-30 | 2022-05-20 | Mirror unit |
US18/103,030 US11835716B2 (en) | 2019-01-30 | 2023-01-30 | Mirror unit |
US18/382,777 US20240053603A1 (en) | 2019-01-30 | 2023-10-23 | Mirror unit |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019014610 | 2019-01-30 | ||
JP2019014610 | 2019-01-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020122963A JP2020122963A (ja) | 2020-08-13 |
JP7491702B2 true JP7491702B2 (ja) | 2024-05-28 |
Family
ID=71733655
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020010837A Active JP7414553B2 (ja) | 2019-01-30 | 2020-01-27 | 光学ユニット |
JP2020011754A Active JP7438767B2 (ja) | 2019-01-30 | 2020-01-28 | ミラーユニット |
JP2020011753A Active JP7491702B2 (ja) | 2019-01-30 | 2020-01-28 | ミラーユニット |
JP2023223230A Pending JP2024026612A (ja) | 2019-01-30 | 2023-12-28 | 光学ユニット |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020010837A Active JP7414553B2 (ja) | 2019-01-30 | 2020-01-27 | 光学ユニット |
JP2020011754A Active JP7438767B2 (ja) | 2019-01-30 | 2020-01-28 | ミラーユニット |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023223230A Pending JP2024026612A (ja) | 2019-01-30 | 2023-12-28 | 光学ユニット |
Country Status (2)
Country | Link |
---|---|
US (7) | US11333882B2 (ja) |
JP (4) | JP7414553B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7181051B2 (ja) * | 2018-10-18 | 2022-11-30 | シャープ株式会社 | 原稿搬送装置および画像形成装置 |
JP7414553B2 (ja) * | 2019-01-30 | 2024-01-16 | 浜松ホトニクス株式会社 | 光学ユニット |
DE112021004309T5 (de) * | 2020-10-13 | 2023-05-25 | Fanuc Corporation | Galvano-Scanner und Laserbearbeitungsvorrichtung, die diesen verwendet |
DE102021204467A1 (de) | 2021-05-04 | 2022-11-10 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanisches Schwingungssystem |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008183636A (ja) | 2007-01-26 | 2008-08-14 | Sony Corp | Memsデバイス、memsデバイスの製造方法、及び電子機器 |
JP2013246361A (ja) | 2012-05-28 | 2013-12-09 | Jvc Kenwood Corp | 2軸偏向電磁駆動型光偏向器 |
JP2017215352A (ja) | 2016-05-30 | 2017-12-07 | 株式会社リコー | 電子部品装置及びその製造方法、光偏向装置 |
JP2018037582A (ja) | 2016-09-01 | 2018-03-08 | 日機装株式会社 | 光半導体装置および光半導体装置の製造方法 |
JP2018132741A (ja) | 2017-02-17 | 2018-08-23 | スタンレー電気株式会社 | 電子部品用パッケージ及び電子部品用パッケージの製造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6295154B1 (en) | 1998-06-05 | 2001-09-25 | Texas Instruments Incorporated | Optical switching apparatus |
US20040232535A1 (en) * | 2003-05-22 | 2004-11-25 | Terry Tarn | Microelectromechanical device packages with integral heaters |
KR100667291B1 (ko) * | 2005-07-27 | 2007-01-12 | 삼성전자주식회사 | 마이크로 미러 소자 패키지 및 그 제조방법 |
DE102007050002A1 (de) | 2007-10-16 | 2009-04-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikromechanisches Sensor- oder Aktorbauelement und Verfahren zur Herstellung von mikromechanischen Sensor- oder Aktorbauelementen |
DE102008040528B4 (de) | 2008-07-18 | 2018-11-08 | Robert Bosch Gmbh | Herstellungsverfahren für ein mikromechanisches Bauteil und ein mikromechanisches Bauteil |
US9778549B2 (en) * | 2012-05-07 | 2017-10-03 | Panasonic Intellectual Property Management Co., Ltd. | Optical element |
DE102012217793A1 (de) * | 2012-09-28 | 2014-04-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Herstellungsverfahren |
WO2016093066A1 (ja) | 2014-12-08 | 2016-06-16 | 株式会社リコー | 光偏向器、画像表示装置及び物体装置 |
JP6926408B2 (ja) | 2016-07-27 | 2021-08-25 | 株式会社リコー | 光スキャナパッケージおよびその製造方法および光走査装置および画像投射装置 |
JP2019021670A (ja) | 2017-07-12 | 2019-02-07 | 日本電気硝子株式会社 | 積層セラミック基板及び積層セラミックパッケージ |
JP7414553B2 (ja) * | 2019-01-30 | 2024-01-16 | 浜松ホトニクス株式会社 | 光学ユニット |
US11372238B2 (en) | 2019-01-30 | 2022-06-28 | Hamamatsu Photonics K.K. | Mirror unit |
-
2020
- 2020-01-27 JP JP2020010837A patent/JP7414553B2/ja active Active
- 2020-01-27 US US16/752,941 patent/US11333882B2/en active Active
- 2020-01-28 JP JP2020011754A patent/JP7438767B2/ja active Active
- 2020-01-28 JP JP2020011753A patent/JP7491702B2/ja active Active
- 2020-01-29 US US16/775,456 patent/US11372240B2/en active Active
-
2022
- 2022-04-18 US US17/722,757 patent/US11598951B2/en active Active
- 2022-05-20 US US17/749,697 patent/US11782267B2/en active Active
-
2023
- 2023-01-30 US US18/103,030 patent/US11835716B2/en active Active
- 2023-01-31 US US18/103,572 patent/US11977223B2/en active Active
- 2023-10-23 US US18/382,777 patent/US20240053603A1/en active Pending
- 2023-12-28 JP JP2023223230A patent/JP2024026612A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008183636A (ja) | 2007-01-26 | 2008-08-14 | Sony Corp | Memsデバイス、memsデバイスの製造方法、及び電子機器 |
JP2013246361A (ja) | 2012-05-28 | 2013-12-09 | Jvc Kenwood Corp | 2軸偏向電磁駆動型光偏向器 |
JP2017215352A (ja) | 2016-05-30 | 2017-12-07 | 株式会社リコー | 電子部品装置及びその製造方法、光偏向装置 |
JP2018037582A (ja) | 2016-09-01 | 2018-03-08 | 日機装株式会社 | 光半導体装置および光半導体装置の製造方法 |
JP2018132741A (ja) | 2017-02-17 | 2018-08-23 | スタンレー電気株式会社 | 電子部品用パッケージ及び電子部品用パッケージの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20200278533A1 (en) | 2020-09-03 |
US20230168493A1 (en) | 2023-06-01 |
US11977223B2 (en) | 2024-05-07 |
US20240053603A1 (en) | 2024-02-15 |
US11598951B2 (en) | 2023-03-07 |
JP2020122961A (ja) | 2020-08-13 |
US20220276487A1 (en) | 2022-09-01 |
JP7438767B2 (ja) | 2024-02-27 |
US11372240B2 (en) | 2022-06-28 |
US11835716B2 (en) | 2023-12-05 |
US11333882B2 (en) | 2022-05-17 |
JP2024026612A (ja) | 2024-02-28 |
US20220236558A1 (en) | 2022-07-28 |
US20200241289A1 (en) | 2020-07-30 |
US20230168494A1 (en) | 2023-06-01 |
JP7414553B2 (ja) | 2024-01-16 |
JP2020122963A (ja) | 2020-08-13 |
JP2020122964A (ja) | 2020-08-13 |
US11782267B2 (en) | 2023-10-10 |
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