JP7490597B2 - 半導体装置およびその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 195
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 238000000034 method Methods 0.000 claims description 12
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052796 boron Inorganic materials 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 5
- 229910052698 phosphorus Inorganic materials 0.000 claims description 5
- 239000011574 phosphorus Substances 0.000 claims description 5
- 239000005368 silicate glass Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 175
- 229910052751 metal Inorganic materials 0.000 description 48
- 239000002184 metal Substances 0.000 description 48
- 239000012535 impurity Substances 0.000 description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 229910052814 silicon oxide Inorganic materials 0.000 description 16
- 238000005229 chemical vapour deposition Methods 0.000 description 15
- 238000005530 etching Methods 0.000 description 15
- 239000005380 borophosphosilicate glass Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000003213 activating effect Effects 0.000 description 4
- 238000001020 plasma etching Methods 0.000 description 4
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- 239000011734 sodium Substances 0.000 description 3
- 229910001415 sodium ion Inorganic materials 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- GDFCWFBWQUEQIJ-UHFFFAOYSA-N [B].[P] Chemical compound [B].[P] GDFCWFBWQUEQIJ-UHFFFAOYSA-N 0.000 description 1
- 238000000779 annular dark-field scanning transmission electron microscopy Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
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- 238000005546 reactive sputtering Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66734—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
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- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
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Description
Claims (7)
- 第1導電形の第1半導体層と、第2導電形の第2半導体層と、第1導電形の第3半導体層と、を含む半導体部と、
前記半導体部の裏面側に設けられた第1電極と、
前記半導体部の表面側に設けられた第2電極であって、前記第1半導体層は、前記第1電極と前記第2電極との間に延在し、前記第2半導体層は、前記第1半導体層と前記第2電極との間に設けられ、前記第3半導体層は、前記第2半導体層と前記第2電極との間に設けられる、第2電極と、
前記半導体部内に設けられ、前記第1電極から前記第2電極に向かう第2方向と交差する第1方向において並ぶ第1制御部および第2制御部と、前記第1制御部および前記第2制御部を一体化する接続部と、を含む制御電極と、
前記制御電極の第1制御部または第2制御部と第2半導体層との間に設けられる第1絶縁膜と、
前記第1制御部と前記第2制御部との間に設けられ、前記第1制御部および前記第2制御部を覆う第2絶縁膜と、
前記第1制御部と前記第2電極との間に位置する第1部分と、前記第2制御部と前記第2電極との間に位置する第2部分と、前記第1部分と前記第2部分との間に位置し、前記第1制御部と前記第2制御部との間に延在する第3部分と、を含む第3絶縁膜であって、前記第2絶縁膜は、前記制御電極と前記第3絶縁膜との間に設けられる、第3絶縁膜と、 前記半導体部内に設けられ、前記第2方向に延在する第3電極であって、前記第1電極と前記第3絶縁膜の前記第3部分との間に位置する部分と、前記第1電極と前記制御電極の前記接続部との間に位置する部分と、を有する第3電極と、
前記第1半導体層と前記第3電極との間に位置する第4絶縁膜であって、前記制御電極の前記第1制御部および前記第2制御部は、前記第2電極と前記第4絶縁膜との間に設けられる第4絶縁膜と、
前記第3絶縁膜の前記第3部分と前記第3電極との間、および、前記制御電極の前記接続部と前記第3電極との間に設けられる第5絶縁膜と、
前記制御電極の前記接続部と前記第5絶縁膜との間に設けられ、前記第5絶縁膜の材料とは異なる材料を含む第6絶縁膜と、
を備えた半導体装置。 - 前記第3電極から前記第1電極に至る距離は、前記制御電極から前記第1電極に至る距離よりも短い請求項1記載の半導体装置。
- 前記第2絶縁膜は、前記第3電極と前記第3絶縁膜との間に位置する部分を有し、
前記第2絶縁膜の前記部分は、前記第4絶縁膜中に延在する請求項1または2に記載の半導体装置。 - 前記第3絶縁膜は、ボロンおよびリンを含むシリケートガラスである請求項1~3のいずれか1つに記載の半導体装置。
- 前記制御電極の前記第1制御部および前記第2制御部は、それぞれ、前記第1方向の第1幅を有し、前記第4絶縁膜に接するように設けられ、
前記第4絶縁膜は、前記制御電極に接する部分において、前記第1方向の第2幅を有し、前記第2幅は、前記第1幅よりも広い請求項1~4のいずれか1つに記載の半導体装置。 - 第1制御部および第2制御部を有するゲート電極と、フィールドプレートと、を含むトレンチゲート構造を有する半導体装置の製造方法であって、
半導体ウェーハにトレンチを形成する工程と、
前記トレンチの内部に第1スペースを残して、前記トレンチの内面を覆うフィールドプレート絶縁膜を形成する工程と、
前記第1スペースを埋め込んだ第1導電膜を形成する工程と、
前記第1導電膜の前記トレンチの底部に位置する部分を残して、前記第1導電膜を除去することにより、前記トレンチの底部に前記フィールドプレートを形成する工程と、
前記第1導電膜の除去により前記フィールドプレート絶縁膜中に形成された第2スペース内において、前記フィールドプレートを熱酸化し、前記フィールドプレート上に第1中間絶縁膜を形成する工程と、
前記第2スペースを埋め込んだ第2中間絶縁膜を、前記第1中間絶縁膜上に形成する工程と、
前記トレンチの上部において、前記第2中間絶縁膜および前記フィールドプレート絶縁膜のそれぞれを部分的に除去することにより、前記半導体ウェーハの一部を露出させた第3スペースを形成する工程と、
前記第3スペースに露出された前記第2中間絶縁膜の残りの部分を除去する工程と、
前記第3スペースに露出された前記半導体ウェーハの前記一部を熱酸化してゲート絶縁膜を形成する工程と、
前記第3スペース内に、前記ゲート絶縁膜、前記フィールドプレート絶縁膜および前記第1中間絶縁膜を覆う第2導電膜を形成する工程と、
前記第2導電膜の前記第1中間絶縁膜上に形成された部分を選択的に除去し、前記ゲート電極の前記第1制御部および前記第2制御部を形成する工程と、
を備えた方法。 - 前記ゲート電極は、前記第1制御部と前記第2制御部とをつなぐ接続部を有するように形成され、
前記第2中間絶縁膜の前記残りの部分は、前記ゲート電極の前記接続部と前記第1中間絶縁膜との間に残るように除去される請求項6記載の方法。
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JP2018022858A (ja) | 2016-07-22 | 2018-02-08 | サンケン電気株式会社 | 半導体装置 |
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JP2020004883A (ja) | 2018-06-29 | 2020-01-09 | 京セラ株式会社 | 半導体装置、電気装置及び半導体装置の製造方法 |
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JP2013065774A (ja) * | 2011-09-20 | 2013-04-11 | Toshiba Corp | 半導体装置およびその製造方法 |
CN104854705B (zh) * | 2013-05-31 | 2018-01-09 | 富士电机株式会社 | 半导体装置的制造方法 |
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JP6817895B2 (ja) * | 2017-05-24 | 2021-01-20 | 株式会社東芝 | 半導体装置 |
JP6818712B2 (ja) * | 2018-03-22 | 2021-01-20 | 株式会社東芝 | 半導体装置 |
JP7077251B2 (ja) * | 2019-02-25 | 2022-05-30 | 株式会社東芝 | 半導体装置 |
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JP2012009545A (ja) | 2010-06-23 | 2012-01-12 | Toshiba Corp | 半導体装置の製造方法 |
JP2012204590A (ja) | 2011-03-25 | 2012-10-22 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2018022858A (ja) | 2016-07-22 | 2018-02-08 | サンケン電気株式会社 | 半導体装置 |
JP2019057537A (ja) | 2017-09-19 | 2019-04-11 | 株式会社東芝 | 半導体装置 |
JP2020004883A (ja) | 2018-06-29 | 2020-01-09 | 京セラ株式会社 | 半導体装置、電気装置及び半導体装置の製造方法 |
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