JP7465287B2 - 自己形成バリア層を備えた低誘電率誘電体 - Google Patents
自己形成バリア層を備えた低誘電率誘電体 Download PDFInfo
- Publication number
- JP7465287B2 JP7465287B2 JP2021572887A JP2021572887A JP7465287B2 JP 7465287 B2 JP7465287 B2 JP 7465287B2 JP 2021572887 A JP2021572887 A JP 2021572887A JP 2021572887 A JP2021572887 A JP 2021572887A JP 7465287 B2 JP7465287 B2 JP 7465287B2
- Authority
- JP
- Japan
- Prior art keywords
- dielectric layer
- dopant gas
- layer
- barrier layer
- doped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000004888 barrier function Effects 0.000 title claims description 50
- 239000003989 dielectric material Substances 0.000 title description 4
- 238000000034 method Methods 0.000 claims description 65
- 239000007789 gas Substances 0.000 claims description 49
- 239000002019 doping agent Substances 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 39
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 25
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 22
- 230000008569 process Effects 0.000 claims description 20
- 238000000151 deposition Methods 0.000 claims description 16
- 239000012686 silicon precursor Substances 0.000 claims description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 229910021529 ammonia Inorganic materials 0.000 claims description 10
- 238000000137 annealing Methods 0.000 claims description 9
- 239000010949 copper Substances 0.000 claims description 8
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- JCXJVPUVTGWSNB-UHFFFAOYSA-N Nitrogen dioxide Chemical compound O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 5
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 5
- 125000004437 phosphorous atom Chemical group 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 76
- 238000012545 processing Methods 0.000 description 19
- 235000012431 wafers Nutrition 0.000 description 19
- 238000012546 transfer Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 9
- 230000008021 deposition Effects 0.000 description 8
- 239000010408 film Substances 0.000 description 8
- 125000004429 atom Chemical group 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 229910021478 group 5 element Inorganic materials 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000003085 diluting agent Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910000069 nitrogen hydride Inorganic materials 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76826—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. by contacting the layer with gases, liquids or plasmas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76834—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers formation of thin insulating films on the sidewalls or on top of conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
- H01L21/0214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material being a silicon oxynitride, e.g. SiON or SiON:H
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02304—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment formation of intermediate layers, e.g. buffer layers, layers to improve adhesion, lattice match or diffusion barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02337—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour
- H01L21/0234—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3215—Doping the layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76828—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. thermal treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Description
本開示の実施形態は、概して、低誘電率でバリア層を形成する方法に関する。
電子デバイス内のある材料から別の材料への元素の移動を防ぐことは、半導体技術において長い間認識されてきた問題であった。金属のような大きな原子の拡散を防ぐために、拡散バリアが開発された。
本開示の上記の特徴を詳細に理解することができるように、上記で簡単に要約した本開示のより具体的な説明を、実施形態を参照することによって行うことができ、そのいくつかを添付の図面に示す。しかしながら、本開示は他の等しく有効な実施形態も許容しうることから、添付の図面は本開示の典型的な実施形態のみを示しており、従って、本開示の範囲を限定すると見なすべきではないことに、留意されたい。
本開示のいくつかの例示的な実施形態を説明する前に、本開示が、以下の明細書の記載において記載される構成又は処理ステップの詳細に限定されないと了解されたい。本開示は、他の実施形態も可能であり、様々なやり方で実践又は実行することが可能である。
Claims (19)
- 誘電体バリア層を形成するための方法であって:
その上に金属表面を有する基板を、ジボランを含むドーパントガスに曝して、前記金属表面上にドーパントの層を提供することと;
前記基板をケイ素前駆体と、前記ドーパントガスと、プラズマとに曝してドープされた誘電体層を形成することにより、前記ドープされた誘電体層を堆積することと;
前記ドープされた誘電体層をアニーリングして、誘電体バリア層を形成することと
を含む方法。 - 前記金属表面が銅表面である、請求項1に記載の方法。
- 前記ドーパントガスが500sccmまでの流量で流される、請求項1に記載の方法。
- 前記ドーパントガスが本質的にジボランからなる、請求項1に記載の方法。
- 前記ドーパントガスがリン原子を含む、請求項1に記載の方法。
- 前記ドーパントガスがホスフィンを含む、請求項5に記載の方法。
- 前記ドーパントガスが窒素原子を含む、請求項1に記載の方法。
- 前記ドーパントガスが、窒素(N2)、アンモニア、NO2、及びN2Oのうちの1つ又は複数を含む、請求項7に記載の方法。
- 前記ドープされた誘電体層を堆積することが、炭素を含むケイ素前駆体及び酸素を含むプラズマガスを利用するプラズマ化学気相堆積プロセスによって実行される、請求項1に記載の方法。
- 前記ドープされた誘電体層がドープされたSiOC層を含む、請求項9に記載の方法。
- 前記ドープされた誘電体層をアニーリングすることが、N2を含む雰囲気中で実行される、請求項1に記載の方法。
- 前記ドープされた誘電体層が500℃未満の温度でアニーリングされる、請求項1に記載の方法。
- 前記ドープされた誘電体層が、1分~120分の範囲の期間アニーリングされる、請求項1に記載の方法。
- 前記アニーリングの後、弾性及び硬度のうちの少なくとも1つを改善するために、前記誘電体バリア層を処理プラズマに曝すことをさらに含む、請求項1に記載の方法。
- 前記処理プラズマがアンモニアを含む、請求項14に記載の方法。
- 前記処理プラズマが、250W~500Wの範囲の電力を有し、前記誘電体バリア層が20秒以下の間曝される、請求項14に記載の方法。
- 誘電体バリア層を形成するための方法であって:
その上に銅表面を有する基板を、ケイ素前駆体と、ホウ素原子、リン原子又は窒素原子のうちの1つ又は複数、及びジボランを含むドーパントガスと、プラズマとに曝してドープされた誘電体層を形成することにより、前記基板上に誘電体層を堆積することと;
前記ドープされた誘電体層を、窒素(N2)雰囲気中で500℃未満の温度で60分~120分の範囲の期間アニーリングして、誘電体バリア層を形成することと
を含む方法。 - 弾性及び硬度のうちの少なくとも1つを改善するために、アンモニアを含む処理プラズマに前記誘電体バリア層を曝すことをさらに含む、請求項17に記載の方法。
- 誘電体バリア層を形成するための方法であって:
その上に銅表面を有する基板を、ジボランを含み且つ50sccm~100sccmの範囲の流量を有するドーパントガスに曝して、処理された表面を形成することと;
前記基板をケイ素前駆体と、前記ドーパントガスと、プラズマとに曝してドープされた誘電体層を形成することにより、前記処理された表面上に誘電体層を堆積することと;
前記ドープされた誘電体層を、窒素(N2)雰囲気中で500℃未満の温度で90分~120分の範囲の期間アニーリングして、誘電体バリア層を形成することと;
前記誘電体バリア層を、アンモニアを含む処理プラズマに曝すことと
を含む方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962859087P | 2019-06-08 | 2019-06-08 | |
US62/859,087 | 2019-06-08 | ||
PCT/US2020/036583 WO2020251880A1 (en) | 2019-06-08 | 2020-06-08 | Low-k dielectric with self-forming barrier layer |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022535146A JP2022535146A (ja) | 2022-08-04 |
JP7465287B2 true JP7465287B2 (ja) | 2024-04-10 |
Family
ID=73650842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021572887A Active JP7465287B2 (ja) | 2019-06-08 | 2020-06-08 | 自己形成バリア層を備えた低誘電率誘電体 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11289369B2 (ja) |
JP (1) | JP7465287B2 (ja) |
KR (1) | KR20220005657A (ja) |
CN (1) | CN113939896A (ja) |
SG (1) | SG11202112689WA (ja) |
WO (1) | WO2020251880A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11830729B2 (en) * | 2021-01-08 | 2023-11-28 | Applied Materials, Inc. | Low-k boron carbonitride films |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000332108A (ja) | 1999-05-20 | 2000-11-30 | Nec Corp | 半導体装置及びその製造方法 |
JP2005019980A (ja) | 2003-05-29 | 2005-01-20 | Air Products & Chemicals Inc | 低誘電率有機ケイ酸塩ガラス膜の作製方法 |
JP2011054968A (ja) | 2009-09-03 | 2011-03-17 | Asm Japan Kk | PECVDによってSi−N結合を有するコンフォーマルな誘電体膜を形成する方法 |
JP2012510726A (ja) | 2008-12-01 | 2012-05-10 | エア プロダクツ アンド ケミカルズ インコーポレイテッド | 酸素含有前駆体を用いる誘電体バリアの堆積 |
JP2013502714A (ja) | 2009-09-29 | 2013-01-24 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 段階化キャップ層を有するパターニング可能low−k誘電体配線構造、エアギャップ包含配線構造、および製作方法 |
JP2014532304A (ja) | 2011-09-23 | 2014-12-04 | ノベラス・システムズ・インコーポレーテッドNovellus Systems Incorporated | プラズマ活性化されるコンフォーマル誘電体膜 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7008484B2 (en) | 2002-05-06 | 2006-03-07 | Applied Materials Inc. | Method and apparatus for deposition of low dielectric constant materials |
US20050048795A1 (en) * | 2003-08-27 | 2005-03-03 | Chung-Chi Ko | Method for ultra low-K dielectric deposition |
US7611996B2 (en) | 2004-03-31 | 2009-11-03 | Applied Materials, Inc. | Multi-stage curing of low K nano-porous films |
US7422776B2 (en) | 2004-08-24 | 2008-09-09 | Applied Materials, Inc. | Low temperature process to produce low-K dielectrics with low stress by plasma-enhanced chemical vapor deposition (PECVD) |
JP2008166374A (ja) * | 2006-12-27 | 2008-07-17 | Sharp Corp | 絶縁膜形成方法 |
US8764961B2 (en) * | 2008-01-15 | 2014-07-01 | Applied Materials, Inc. | Cu surface plasma treatment to improve gapfill window |
US7871929B2 (en) * | 2008-07-30 | 2011-01-18 | Tel Epion Inc. | Method of forming semiconductor devices containing metal cap layers |
TWI563539B (en) * | 2012-01-18 | 2016-12-21 | Sino American Silicon Prod Inc | Composite substrate, manufacturing method thereof and light emitting device having the same |
US10170299B2 (en) * | 2015-07-01 | 2019-01-01 | Applied Materials, Inc. | Method to reduce trap-induced capacitance in interconnect dielectric barrier stack |
WO2017062614A1 (en) * | 2015-10-06 | 2017-04-13 | Versum Materials Us, Llc | Methods for depositing a conformal metal or metalloid silicon nitride film |
US9711400B1 (en) * | 2016-06-07 | 2017-07-18 | International Business Machines Corporation | Interconnect structures with enhanced electromigration resistance |
-
2020
- 2020-06-08 US US16/895,541 patent/US11289369B2/en active Active
- 2020-06-08 KR KR1020227000561A patent/KR20220005657A/ko not_active Application Discontinuation
- 2020-06-08 JP JP2021572887A patent/JP7465287B2/ja active Active
- 2020-06-08 WO PCT/US2020/036583 patent/WO2020251880A1/en active Application Filing
- 2020-06-08 SG SG11202112689WA patent/SG11202112689WA/en unknown
- 2020-06-08 CN CN202080041895.7A patent/CN113939896A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000332108A (ja) | 1999-05-20 | 2000-11-30 | Nec Corp | 半導体装置及びその製造方法 |
JP2005019980A (ja) | 2003-05-29 | 2005-01-20 | Air Products & Chemicals Inc | 低誘電率有機ケイ酸塩ガラス膜の作製方法 |
JP2012510726A (ja) | 2008-12-01 | 2012-05-10 | エア プロダクツ アンド ケミカルズ インコーポレイテッド | 酸素含有前駆体を用いる誘電体バリアの堆積 |
JP2011054968A (ja) | 2009-09-03 | 2011-03-17 | Asm Japan Kk | PECVDによってSi−N結合を有するコンフォーマルな誘電体膜を形成する方法 |
JP2013502714A (ja) | 2009-09-29 | 2013-01-24 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 段階化キャップ層を有するパターニング可能low−k誘電体配線構造、エアギャップ包含配線構造、および製作方法 |
JP2014532304A (ja) | 2011-09-23 | 2014-12-04 | ノベラス・システムズ・インコーポレーテッドNovellus Systems Incorporated | プラズマ活性化されるコンフォーマル誘電体膜 |
Also Published As
Publication number | Publication date |
---|---|
TW202113921A (zh) | 2021-04-01 |
US11289369B2 (en) | 2022-03-29 |
KR20220005657A (ko) | 2022-01-13 |
WO2020251880A1 (en) | 2020-12-17 |
US20200388532A1 (en) | 2020-12-10 |
JP2022535146A (ja) | 2022-08-04 |
SG11202112689WA (en) | 2021-12-30 |
CN113939896A (zh) | 2022-01-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10395916B2 (en) | In-situ pre-clean for selectivity improvement for selective deposition | |
US20180144973A1 (en) | Electromigration Improvement Using Tungsten For Selective Cobalt Deposition On Copper Surfaces | |
TWI730990B (zh) | 用於沉積介電質阻障層以及含鋁的蝕刻終止層之方法 | |
JP7465287B2 (ja) | 自己形成バリア層を備えた低誘電率誘電体 | |
US8163343B2 (en) | Method of forming an aluminum oxide layer | |
US11189479B2 (en) | Diffusion barrier layer | |
US11270911B2 (en) | Doping of metal barrier layers | |
TWI840569B (zh) | 低k介電質之自形成阻障層 | |
US10643889B2 (en) | Pre-treatment method to improve selectivity in a selective deposition process | |
TW202231905A (zh) | 共形氧化矽膜沉積 | |
US11171047B2 (en) | Fluorine-doped nitride films for improved high-k reliability | |
US20240006235A1 (en) | Composite barrier layers | |
US20230070489A1 (en) | Doped tantalum-containing barrier films | |
US11587873B2 (en) | Binary metal liner layers | |
TW202105465A (zh) | 基於金屬的氫氣阻障 | |
KR20220113516A (ko) | 선택적 갭 충전을 위한 저온 플라즈마 사전-세정 | |
TW202333223A (zh) | 用於氧化鎢移除之氟化鎢浸泡及處理 | |
JP2024520404A (ja) | アモルファスシリコンベース取り除きおよびシールeot |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220914 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20231024 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20231026 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240124 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240319 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240329 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7465287 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |