JP7458853B2 - 光源装置、照明装置、及び露光装置。 - Google Patents

光源装置、照明装置、及び露光装置。 Download PDF

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Publication number
JP7458853B2
JP7458853B2 JP2020060987A JP2020060987A JP7458853B2 JP 7458853 B2 JP7458853 B2 JP 7458853B2 JP 2020060987 A JP2020060987 A JP 2020060987A JP 2020060987 A JP2020060987 A JP 2020060987A JP 7458853 B2 JP7458853 B2 JP 7458853B2
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Japan
Prior art keywords
led
light source
chip
source device
led chips
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Application number
JP2020060987A
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English (en)
Japanese (ja)
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JP2021162613A (ja
JP2021162613A5 (https=
Inventor
大輔 安永
健太郎 昼間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2020060987A priority Critical patent/JP7458853B2/ja
Priority to CN202110233730.6A priority patent/CN113467191A/zh
Priority to KR1020210036402A priority patent/KR102700446B1/ko
Publication of JP2021162613A publication Critical patent/JP2021162613A/ja
Publication of JP2021162613A5 publication Critical patent/JP2021162613A5/ja
Application granted granted Critical
Publication of JP7458853B2 publication Critical patent/JP7458853B2/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/56—Cooling arrangements using liquid coolants
    • F21V29/58—Cooling arrangements using liquid coolants characterised by the coolants
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
    • G03F7/70891—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
    • F21K9/00—Light sources using semiconductor devices as light-generating elements, e.g. using light-emitting diodes [LED] or lasers
    • F21K9/20—Light sources comprising attachment means
    • F21K9/23—Retrofit light sources for lighting devices with a single fitting for each light source, e.g. for substitution of incandescent lamps with bayonet or threaded fittings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50—Cooling arrangements
    • F21V29/502—Cooling arrangements characterised by the adaptation for cooling of specific components
    • F21V29/503—Cooling arrangements characterised by the adaptation for cooling of specific components of light sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/04—Refractors for light sources of lens shape
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B45/00—Circuit arrangements for operating light-emitting diodes [LED]
    • H05B45/10—Controlling the intensity of the light
    • H05B45/14—Controlling the intensity of the light using electrical feedback from LEDs or from LED modules
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2105/00—Planar light sources
    • F21Y2105/10—Planar light sources comprising a two-dimensional [2D] array of point-like light-generating elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00—Light-generating elements of semiconductor light sources
    • F21Y2115/10—Light-emitting diodes [LED]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Toxicology (AREA)
  • Atmospheric Sciences (AREA)
  • Led Device Packages (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2020060987A 2020-03-30 2020-03-30 光源装置、照明装置、及び露光装置。 Active JP7458853B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2020060987A JP7458853B2 (ja) 2020-03-30 2020-03-30 光源装置、照明装置、及び露光装置。
CN202110233730.6A CN113467191A (zh) 2020-03-30 2021-03-03 光源装置、照明装置以及曝光装置
KR1020210036402A KR102700446B1 (ko) 2020-03-30 2021-03-22 광원 장치, 조명 장치 및 노광 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020060987A JP7458853B2 (ja) 2020-03-30 2020-03-30 光源装置、照明装置、及び露光装置。

Publications (3)

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JP2021162613A JP2021162613A (ja) 2021-10-11
JP2021162613A5 JP2021162613A5 (https=) 2023-03-27
JP7458853B2 true JP7458853B2 (ja) 2024-04-01

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JP2020060987A Active JP7458853B2 (ja) 2020-03-30 2020-03-30 光源装置、照明装置、及び露光装置。

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JP (1) JP7458853B2 (https=)
KR (1) KR102700446B1 (https=)
CN (1) CN113467191A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2026046013A (ja) * 2024-08-30 2026-03-13 キヤノン株式会社 光源装置、露光装置、および、物品製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004274011A (ja) 2003-01-16 2004-09-30 Nikon Corp 照明光源装置、照明装置、露光装置、及び露光方法
JP2005316441A (ja) 2004-03-30 2005-11-10 Sanyo Electric Co Ltd 照明装置及び投写型映像表示装置
JP2005339881A (ja) 2004-05-25 2005-12-08 Hitachi Displays Ltd 照明装置、照明モジュール及び液晶表示装置
WO2010119872A1 (ja) 2009-04-13 2010-10-21 パナソニック電工株式会社 Ｌｅｄユニット
WO2015064470A1 (ja) 2013-10-30 2015-05-07 オリンパスメディカルシステムズ株式会社 光源装置及び内視鏡装置
JP2017045002A (ja) 2015-08-28 2017-03-02 キヤノン株式会社 光源装置及び投射型表示装置
JP2018031848A (ja) 2016-08-23 2018-03-01 株式会社リコー 光源装置、画像投写装置、及び光源装置の配置方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007073984A (ja) * 2003-01-16 2007-03-22 Nikon Corp 照明光源装置、露光装置及び露光方法
JP2006019412A (ja) * 2004-06-30 2006-01-19 Canon Inc 露光装置及びデバイスの製造方法
JP4148230B2 (ja) * 2005-03-01 2008-09-10 セイコーエプソン株式会社 冷却ユニットの製造方法、冷却ユニット、光学装置、並びにプロジェクタ
TWI345661B (en) * 2006-10-30 2011-07-21 Coretronic Corp Backlight module
JP5344809B2 (ja) 2007-11-21 2013-11-20 アルパイン株式会社 バックライト装置
JP2010098204A (ja) * 2008-10-20 2010-04-30 Stanley Electric Co Ltd 光源の冷却構造
JP2010278130A (ja) * 2009-05-27 2010-12-09 Toyota Motor Corp パワーデバイスの冷却装置及び燃料電池システム
KR101034935B1 (ko) * 2009-07-30 2011-05-17 박상희 방송 및 사진 촬영용 엘이디 조명장치
JP2016111268A (ja) * 2014-12-09 2016-06-20 キヤノン株式会社 冷却装置、照明光学系、露光装置、並びに物品の製造方法
CN104896330A (zh) * 2015-06-03 2015-09-09 中国科学院半导体研究所 Led光源模组
CN109844970B (zh) * 2016-07-28 2023-04-04 亮锐有限责任公司 具有反射侧覆层的发光器件封装
EP3301999B1 (en) * 2016-09-30 2020-06-17 HP Scitex Ltd Light emitting diode heatsink
JP6636996B2 (ja) * 2017-07-11 2020-01-29 ファナック株式会社 Ｌｄモジュール冷却装置及びレーザ装置
EP3495050A1 (en) * 2017-12-07 2019-06-12 Syddansk Universitet Fluid based cooling system
CN110095929A (zh) * 2018-01-29 2019-08-06 精工爱普生株式会社 投影仪

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004274011A (ja) 2003-01-16 2004-09-30 Nikon Corp 照明光源装置、照明装置、露光装置、及び露光方法
JP2005316441A (ja) 2004-03-30 2005-11-10 Sanyo Electric Co Ltd 照明装置及び投写型映像表示装置
JP2005339881A (ja) 2004-05-25 2005-12-08 Hitachi Displays Ltd 照明装置、照明モジュール及び液晶表示装置
WO2010119872A1 (ja) 2009-04-13 2010-10-21 パナソニック電工株式会社 Ｌｅｄユニット
WO2015064470A1 (ja) 2013-10-30 2015-05-07 オリンパスメディカルシステムズ株式会社 光源装置及び内視鏡装置
JP2017045002A (ja) 2015-08-28 2017-03-02 キヤノン株式会社 光源装置及び投射型表示装置
JP2018031848A (ja) 2016-08-23 2018-03-01 株式会社リコー 光源装置、画像投写装置、及び光源装置の配置方法

Also Published As

Publication number Publication date
KR102700446B1 (ko) 2024-08-30
JP2021162613A (ja) 2021-10-11
CN113467191A (zh) 2021-10-01
KR20210122109A (ko) 2021-10-08

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