JP7428640B2 - セラミック絶縁体及びアルミニウムスリーブを備えた電気コネクタ及びその製造方法 - Google Patents
セラミック絶縁体及びアルミニウムスリーブを備えた電気コネクタ及びその製造方法 Download PDFInfo
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- JP7428640B2 JP7428640B2 JP2020522696A JP2020522696A JP7428640B2 JP 7428640 B2 JP7428640 B2 JP 7428640B2 JP 2020522696 A JP2020522696 A JP 2020522696A JP 2020522696 A JP2020522696 A JP 2020522696A JP 7428640 B2 JP7428640 B2 JP 7428640B2
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 183
- 229910052782 aluminium Inorganic materials 0.000 title claims description 181
- 239000000919 ceramic Substances 0.000 title claims description 140
- 238000000034 method Methods 0.000 title claims description 60
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 239000012212 insulator Substances 0.000 title description 18
- 238000005219 brazing Methods 0.000 claims description 66
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims description 45
- 239000004020 conductor Substances 0.000 claims description 39
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 28
- 230000008569 process Effects 0.000 description 22
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 17
- 229910052751 metal Inorganic materials 0.000 description 16
- 239000002184 metal Substances 0.000 description 16
- 229910052759 nickel Inorganic materials 0.000 description 14
- 229910000833 kovar Inorganic materials 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 230000035515 penetration Effects 0.000 description 13
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 10
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 238000005304 joining Methods 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 5
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 5
- 238000001816 cooling Methods 0.000 description 5
- 230000000149 penetrating effect Effects 0.000 description 5
- 229910052726 zirconium Inorganic materials 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 229910052748 manganese Inorganic materials 0.000 description 3
- 239000011572 manganese Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052756 noble gas Inorganic materials 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000005253 cladding Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 150000002835 noble gases Chemical class 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000005667 attractant Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 230000031902 chemoattractant activity Effects 0.000 description 1
- YCKOAAUKSGOOJH-UHFFFAOYSA-N copper silver Chemical compound [Cu].[Ag].[Ag] YCKOAAUKSGOOJH-UHFFFAOYSA-N 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
- H01J5/32—Seals for leading-in conductors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/28—Selection of soldering or welding materials proper with the principal constituent melting at less than 950 degrees C
- B23K35/286—Al as the principal constituent
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/28—Manufacture of leading-in conductors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
- H02G3/00—Installations of electric cables or lines or protective tubing therefor in or on buildings, equivalent structures or vehicles
- H02G3/22—Installations of cables or lines through walls, floors or ceilings, e.g. into buildings
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/34—Oxidic
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/60—Forming at the joining interface or in the joining layer specific reaction phases or zones, e.g. diffusion of reactive species from the interlayer to the substrate or from a substrate to the joining interface, carbide forming at the joining interface
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/46—Bases; Cases
- H01R13/52—Dustproof, splashproof, drip-proof, waterproof, or flameproof cases
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- H01—ELECTRIC ELEMENTS
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- H01R9/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, e.g. terminal strips or terminal blocks; Terminals or binding posts mounted upon a base or in a case; Bases therefor
- H01R9/16—Fastening of connecting parts to base or case; Insulating connecting parts from base or case
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- H01—ELECTRIC ELEMENTS
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- H01R9/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, e.g. terminal strips or terminal blocks; Terminals or binding posts mounted upon a base or in a case; Bases therefor
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- H01R9/223—Insulating enclosures for terminals
Description
本出願は、2017年10月24日出願のElliot他の米国出願番号62/576,083の優先権を主張するものであり、その開示内容全体は、引用により本明細書に組み込まれる。
本発明は、電気コネクタに関し、より詳細には、真空チャンバと共に使用するための電気コネクタに関する。
Claims (9)
- 絶縁された電気的フィードスルー又は電気的終端ユニットを製造するための方法であって、
第1の端部及び第2の端部を有するセラミック部品であって、前記セラミック部品の中に前記第1の端部から延びて内面を形成する孔を有する、セラミック部品を準備するステップと、
前記孔の中にアルミニウムを配置するステップと、
前記孔の中で前記アルミニウムをろう付けして前記孔の中に該孔の内面と気密接合しかつ中心部を有するアルミニウム構造体を生成するステップと、
前記アルミニウム構造体の前記中心部を除去して前記アルミニウム構造体を貫通する通路を生成するステップと、
前記アルミニウム構造体の周りの前記第1の端部における前記セラミック部品の一部を除去して前記アルミニウム構造体の外面の一部を露出させて、これにより前記セラミック部品の前記内面に気密接合されかつ前記セラミック部品の前記第1の端部から延びる中空アルミニウム構造体をもたらすステップと、を含む、
ことを特徴とする方法。 - 中空アルミニウム構造体を貫通して延びる少なくとも1つの導電体を準備するステップをさらに含む、
請求項1に記載の方法。 - 前記少なくとも1つの導電体は、前記中空アルミニウム構造体から電気的に絶縁される、
請求項2に記載の方法。 - 前記セラミック部品は環状セラミック部品であり、前記環状セラミック部品の前記第2の端部にエンドキャップをろう付けするステップと、前記少なくとも1つの導電体を前記エンドキャップに接合するステップと、をさらに含む、
請求項2に記載の方法。 - 前記アルミニウム構造体は、アルミニウム棒である、
請求項1に記載の方法。 - 前記中空アルミニウム構造体は、アルミニウム管である、
請求項5に記載の方法。 - 前記ろう付けは、770℃又はそれ以上、800℃又はそれ以上、及び770℃から1200℃の範囲から成る群から選択された温度でアルミニウムをろう付けするステップを含む、
請求項1ないし6のいずれか1項に記載の方法。 - 前記ろう付けは、1×10E-4トル又はそれ以下及び5×10E-5トル又はそれ以下から成る群から選択された圧力でアルミニウムをろう付けするステップを含む、
請求項1ないし6のいずれか1項に記載の方法。 - 前記アルミニウムは、89重量%アルミニウムよりも大きなアルミニウム、92重量%アルミニウムよりも大きなアルミニウム、98重量%アルミニウムよりも大きなアルミニウム、99重量%アルミニウムよりも大きなアルミニウム、99.5重量%アルミニウムよりも大きなアルミニウム、99.99重量%アルミニウムよりも大きなアルミニウムから成る群から選択されたアルミニウムを含む、
請求項1ないし6のいずれか1項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762576083P | 2017-10-24 | 2017-10-24 | |
US62/576,083 | 2017-10-24 | ||
PCT/US2018/057414 WO2019084210A1 (en) | 2017-10-24 | 2018-10-24 | ELECTRICAL CONNECTOR WITH CERAMIC INSULATION AND ALUMINUM SLEEVE AND METHOD FOR MANUFACTURING THE SAME |
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Publication Number | Publication Date |
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JP2021500709A JP2021500709A (ja) | 2021-01-07 |
JP2021500709A5 JP2021500709A5 (ja) | 2021-12-02 |
JP7428640B2 true JP7428640B2 (ja) | 2024-02-06 |
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JP2020522696A Active JP7428640B2 (ja) | 2017-10-24 | 2018-10-24 | セラミック絶縁体及びアルミニウムスリーブを備えた電気コネクタ及びその製造方法 |
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EP (1) | EP3701547B1 (ja) |
JP (1) | JP7428640B2 (ja) |
KR (1) | KR20200079272A (ja) |
CN (1) | CN111373487A (ja) |
TW (1) | TWI791057B (ja) |
WO (1) | WO2019084210A1 (ja) |
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2018
- 2018-10-24 JP JP2020522696A patent/JP7428640B2/ja active Active
- 2018-10-24 TW TW107137588A patent/TWI791057B/zh active
- 2018-10-24 EP EP18870123.9A patent/EP3701547B1/en active Active
- 2018-10-24 CN CN201880069326.6A patent/CN111373487A/zh active Pending
- 2018-10-24 US US16/169,938 patent/US11028021B2/en active Active
- 2018-10-24 WO PCT/US2018/057414 patent/WO2019084210A1/en active Search and Examination
- 2018-10-24 KR KR1020207014589A patent/KR20200079272A/ko not_active Application Discontinuation
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Also Published As
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EP3701547A1 (en) | 2020-09-02 |
US20210292246A1 (en) | 2021-09-23 |
WO2019084210A1 (en) | 2019-05-02 |
US11028021B2 (en) | 2021-06-08 |
WO2019084210A9 (en) | 2019-10-17 |
US20190194078A1 (en) | 2019-06-27 |
JP2021500709A (ja) | 2021-01-07 |
TW201933689A (zh) | 2019-08-16 |
EP3701547A4 (en) | 2021-08-11 |
CN111373487A (zh) | 2020-07-03 |
KR20200079272A (ko) | 2020-07-02 |
EP3701547B1 (en) | 2023-04-19 |
TWI791057B (zh) | 2023-02-01 |
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