JP7426656B2 - 焦点距離調整装置及びレーザ加工装置 - Google Patents

焦点距離調整装置及びレーザ加工装置 Download PDF

Info

Publication number
JP7426656B2
JP7426656B2 JP2020064001A JP2020064001A JP7426656B2 JP 7426656 B2 JP7426656 B2 JP 7426656B2 JP 2020064001 A JP2020064001 A JP 2020064001A JP 2020064001 A JP2020064001 A JP 2020064001A JP 7426656 B2 JP7426656 B2 JP 7426656B2
Authority
JP
Japan
Prior art keywords
lens
focal length
shaft body
optical axis
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020064001A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021162715A (ja
JP2021162715A5 (https=
Inventor
明久 松本
浩之 松井
直哉 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2020064001A priority Critical patent/JP7426656B2/ja
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Priority to EP21779025.2A priority patent/EP4130834A4/en
Priority to CN202190000352.0U priority patent/CN220259847U/zh
Priority to PCT/JP2021/002582 priority patent/WO2021199621A1/ja
Priority to KR1020227023198A priority patent/KR102651772B1/ko
Priority to US17/791,453 priority patent/US20230061666A1/en
Priority to TW110103372A priority patent/TWI759091B/zh
Publication of JP2021162715A publication Critical patent/JP2021162715A/ja
Publication of JP2021162715A5 publication Critical patent/JP2021162715A5/ja
Application granted granted Critical
Publication of JP7426656B2 publication Critical patent/JP7426656B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Lens Barrels (AREA)
JP2020064001A 2020-03-31 2020-03-31 焦点距離調整装置及びレーザ加工装置 Active JP7426656B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2020064001A JP7426656B2 (ja) 2020-03-31 2020-03-31 焦点距離調整装置及びレーザ加工装置
CN202190000352.0U CN220259847U (zh) 2020-03-31 2021-01-26 焦点距离调节装置以及激光加工装置
PCT/JP2021/002582 WO2021199621A1 (ja) 2020-03-31 2021-01-26 焦点距離調整装置及びレーザ加工装置
KR1020227023198A KR102651772B1 (ko) 2020-03-31 2021-01-26 초점 거리 조정 장치 및 레이저 가공 장치
EP21779025.2A EP4130834A4 (en) 2020-03-31 2021-01-26 FOCAL DISTANCE ADJUSTMENT DEVICE AND LASER TREATMENT DEVICE
US17/791,453 US20230061666A1 (en) 2020-03-31 2021-01-26 Focal length adjusting device and laser processing device
TW110103372A TWI759091B (zh) 2020-03-31 2021-01-29 焦點距離調整裝置以及雷射加工裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020064001A JP7426656B2 (ja) 2020-03-31 2020-03-31 焦点距離調整装置及びレーザ加工装置

Publications (3)

Publication Number Publication Date
JP2021162715A JP2021162715A (ja) 2021-10-11
JP2021162715A5 JP2021162715A5 (https=) 2023-02-09
JP7426656B2 true JP7426656B2 (ja) 2024-02-02

Family

ID=77929067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020064001A Active JP7426656B2 (ja) 2020-03-31 2020-03-31 焦点距離調整装置及びレーザ加工装置

Country Status (7)

Country Link
US (1) US20230061666A1 (https=)
EP (1) EP4130834A4 (https=)
JP (1) JP7426656B2 (https=)
KR (1) KR102651772B1 (https=)
CN (1) CN220259847U (https=)
TW (1) TWI759091B (https=)
WO (1) WO2021199621A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114346433B (zh) * 2022-01-14 2024-08-23 深圳市优控激光科技有限公司 激光焊接枪
WO2024049203A1 (ko) 2022-09-02 2024-03-07 주식회사 시클리드 항 ctla-4 모노클로날 항체 및 이의 용도

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005238327A (ja) 2003-10-30 2005-09-08 Sunx Ltd レーザマーキング装置
WO2009004787A1 (ja) 2007-07-04 2009-01-08 Panasonic Corporation カメラ装置および駆動機構

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0966357A (ja) 1995-08-30 1997-03-11 Daiki Alum Kogyosho:Kk 浸漬ヒーターの取付構造
JPH0966375A (ja) * 1995-08-31 1997-03-11 Sony Corp レーザマーキング装置
JP2005237327A (ja) * 2004-02-27 2005-09-08 Sanmei Electric Co Ltd 植物栽培方法と植物栽培用容器
JP5133568B2 (ja) * 2007-01-11 2013-01-30 株式会社ディスコ レーザー加工装置
JP4345030B2 (ja) * 2007-06-12 2009-10-14 ソニー株式会社 光ディスク装置及び集光位置補正方法
JP2009291811A (ja) 2008-06-05 2009-12-17 Cmet Inc 焦点位置調整装置、及びレーザ加工装置
JP5707079B2 (ja) * 2010-09-30 2015-04-22 パナソニック デバイスＳｕｎｘ株式会社 レーザ加工装置
FR2973118B1 (fr) * 2011-03-24 2013-08-23 Centre Nat Rech Scient Dispositif numerique et adaptatif de focalisation d'un faisceau laser
KR101542680B1 (ko) * 2013-01-03 2015-08-06 주식회사 나노포토닉스 삼차원 광학적 조향장치와 유한한 크기의 물체면을 가지는 대물 렌즈 및 그로부터 출력되는 발산광의 발산각과 빔 직경을 동시에 조절할 수 있는 z 스캐너
KR20180108853A (ko) * 2016-07-04 2018-10-04 미쓰비시덴키 가부시키가이샤 레이저 장치 및 레이저 가공기
CN107350227A (zh) * 2017-09-05 2017-11-17 镇江金海创科技有限公司 焦距可调式激光清洗振镜
JP2022135789A (ja) * 2021-03-05 2022-09-15 パナソニックＩｐマネジメント株式会社 レーザ加工装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005238327A (ja) 2003-10-30 2005-09-08 Sunx Ltd レーザマーキング装置
WO2009004787A1 (ja) 2007-07-04 2009-01-08 Panasonic Corporation カメラ装置および駆動機構

Also Published As

Publication number Publication date
US20230061666A1 (en) 2023-03-02
JP2021162715A (ja) 2021-10-11
KR102651772B1 (ko) 2024-03-28
KR20220111320A (ko) 2022-08-09
TW202138094A (zh) 2021-10-16
WO2021199621A1 (ja) 2021-10-07
EP4130834A4 (en) 2023-11-01
EP4130834A1 (en) 2023-02-08
CN220259847U (zh) 2023-12-29
TWI759091B (zh) 2022-03-21

Similar Documents

Publication Publication Date Title
JP5416492B2 (ja) レーザ光によるガラス基板加工装置
JP4386137B2 (ja) レーザ加工装置及びレーザ加工方法
KR20020047297A (ko) 레이저 가공 장치
JP7426656B2 (ja) 焦点距離調整装置及びレーザ加工装置
JP2008203434A (ja) 走査機構、被加工材の加工方法および加工装置
JP5667347B2 (ja) レーザ光によるガラス基板加工装置
JP2016132035A (ja) レーザ加工システム及び方法
JP3365388B2 (ja) レーザ加工光学装置
WO2020050148A1 (ja) レーザ光走査装置及びレーザ加工装置
EP2633940A1 (en) Laser processing device
CN104690423A (zh) 一种可实现零锥度和倒锥钻孔的加工装置及方法
JP2021162715A5 (https=)
CN213318327U (zh) 一种光束入射角可控的激光加工装置
JP5063402B2 (ja) レーザ加工装置
JPH0687088A (ja) レーザ加工装置
US6552299B2 (en) Laser-processing unit with observation device
JP3978108B2 (ja) レーザ加工装置
JP2007114435A (ja) スキャン光学ユニット及びその制御方法並びにレーザ加工装置
KR20140112136A (ko) 레이저 가공장치
JPS62197289A (ja) レ−ザ加工装置
JP2025166390A (ja) ガルバノスキャナユニット及びレーザ加工機
JPH0687089A (ja) レーザ加工装置
JPH06269971A (ja) レーザ加工装置
CN120460883A (zh) 一种可双光路切换的五轴激光加工设备
WO2009018856A1 (en) Three-dimensional scanning method using a telecentric beam

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230201

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230201

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231107

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231220

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240109

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240115

R151 Written notification of patent or utility model registration

Ref document number: 7426656

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151