FR2973118B1 - Dispositif numerique et adaptatif de focalisation d'un faisceau laser - Google Patents

Dispositif numerique et adaptatif de focalisation d'un faisceau laser

Info

Publication number
FR2973118B1
FR2973118B1 FR1100886A FR1100886A FR2973118B1 FR 2973118 B1 FR2973118 B1 FR 2973118B1 FR 1100886 A FR1100886 A FR 1100886A FR 1100886 A FR1100886 A FR 1100886A FR 2973118 B1 FR2973118 B1 FR 2973118B1
Authority
FR
France
Prior art keywords
focusing
digital
laser beam
adaptive device
adaptive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1100886A
Other languages
English (en)
Other versions
FR2973118A1 (fr
Inventor
Laurent Berthe
Matthieu Schneider
Marco Soscia
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LASER METROLOGIE
Centre National de la Recherche Scientifique CNRS
Ecole National Superieure dArts et Metiers ENSAM
Original Assignee
LASER METROLOGIE
Centre National de la Recherche Scientifique CNRS
Ecole National Superieure dArts et Metiers ENSAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LASER METROLOGIE, Centre National de la Recherche Scientifique CNRS, Ecole National Superieure dArts et Metiers ENSAM filed Critical LASER METROLOGIE
Priority to FR1100886A priority Critical patent/FR2973118B1/fr
Priority to PCT/EP2012/055234 priority patent/WO2012127040A1/fr
Publication of FR2973118A1 publication Critical patent/FR2973118A1/fr
Application granted granted Critical
Publication of FR2973118B1 publication Critical patent/FR2973118B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/10—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
    • G02B7/102—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens controlled by a microcomputer

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Lenses (AREA)
FR1100886A 2011-03-24 2011-03-24 Dispositif numerique et adaptatif de focalisation d'un faisceau laser Expired - Fee Related FR2973118B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1100886A FR2973118B1 (fr) 2011-03-24 2011-03-24 Dispositif numerique et adaptatif de focalisation d'un faisceau laser
PCT/EP2012/055234 WO2012127040A1 (fr) 2011-03-24 2012-03-23 Dispositif numerique et adaptatif de focalisation d'un faisceau laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1100886A FR2973118B1 (fr) 2011-03-24 2011-03-24 Dispositif numerique et adaptatif de focalisation d'un faisceau laser

Publications (2)

Publication Number Publication Date
FR2973118A1 FR2973118A1 (fr) 2012-09-28
FR2973118B1 true FR2973118B1 (fr) 2013-08-23

Family

ID=45922674

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1100886A Expired - Fee Related FR2973118B1 (fr) 2011-03-24 2011-03-24 Dispositif numerique et adaptatif de focalisation d'un faisceau laser

Country Status (2)

Country Link
FR (1) FR2973118B1 (fr)
WO (1) WO2012127040A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016072891A1 (fr) * 2014-11-04 2016-05-12 Vaur Ab Système optique pour focaliser un laser à haute énergie
JP6114431B1 (ja) * 2016-04-01 2017-04-12 株式会社アマダホールディングス レーザ加工機
EP3650161A1 (fr) * 2018-11-12 2020-05-13 TRUMPF Schweiz AG Dispositif de focalisation et dispositif de traitement laser doté d'un tel dispositif de focalisation
JP7426656B2 (ja) * 2020-03-31 2024-02-02 パナソニックＩｐマネジメント株式会社 焦点距離調整装置及びレーザ加工装置
CN113305422A (zh) * 2021-05-31 2021-08-27 苏州科韵激光科技有限公司 一种同轴共焦激光加工系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9501412D0 (en) * 1995-01-25 1995-03-15 Lumonics Ltd Laser apparatus
US6483071B1 (en) * 2000-05-16 2002-11-19 General Scanning Inc. Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site
TWI248244B (en) * 2003-02-19 2006-01-21 J P Sercel Associates Inc System and method for cutting using a variable astigmatic focal beam spot
JP2007509368A (ja) * 2003-10-17 2007-04-12 ジーエスアイ・ルモニクス・コーポレーション 柔軟な走査範囲
KR100588459B1 (ko) * 2006-03-20 2006-06-12 (주)큐엠씨 레이저 빔 전달 시스템 및 그 형성 방법
GB2460648A (en) * 2008-06-03 2009-12-09 M Solv Ltd Method and apparatus for laser focal spot size control

Also Published As

Publication number Publication date
FR2973118A1 (fr) 2012-09-28
WO2012127040A1 (fr) 2012-09-27

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20141128