JP7404352B2 - 摺動部品 - Google Patents
摺動部品 Download PDFInfo
- Publication number
- JP7404352B2 JP7404352B2 JP2021513647A JP2021513647A JP7404352B2 JP 7404352 B2 JP7404352 B2 JP 7404352B2 JP 2021513647 A JP2021513647 A JP 2021513647A JP 2021513647 A JP2021513647 A JP 2021513647A JP 7404352 B2 JP7404352 B2 JP 7404352B2
- Authority
- JP
- Japan
- Prior art keywords
- sliding
- carbon film
- sealing ring
- sliding surface
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 63
- 229910052799 carbon Inorganic materials 0.000 claims description 62
- 238000007789 sealing Methods 0.000 claims description 43
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 9
- 229920000642 polymer Polymers 0.000 claims description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 9
- 230000008033 biological extinction Effects 0.000 claims description 8
- 238000000391 spectroscopic ellipsometry Methods 0.000 claims description 7
- 230000013011 mating Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 description 65
- 239000002245 particle Substances 0.000 description 26
- 230000000694 effects Effects 0.000 description 16
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 14
- 229910010271 silicon carbide Inorganic materials 0.000 description 14
- 239000000463 material Substances 0.000 description 13
- 239000000843 powder Substances 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 238000012546 transfer Methods 0.000 description 9
- 238000012360 testing method Methods 0.000 description 6
- 230000003068 static effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/72—Sealings
- F16C33/74—Sealings of sliding-contact bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/043—Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/18—Sealings between relatively-moving surfaces with stuffing-boxes for elastic or plastic packings
- F16J15/20—Packing materials therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
- F16J15/3496—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member use of special materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2202/00—Solid materials defined by their properties
- F16C2202/02—Mechanical properties
- F16C2202/04—Hardness
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/40—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal
- F16C2206/56—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal based on ceramic carbides, e.g. silicon carbide (SiC)
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2206/00—Materials with ceramics, cermets, hard carbon or similar non-metallic hard materials as main constituents
- F16C2206/40—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal
- F16C2206/58—Ceramics, e.g. carbides, nitrides, oxides, borides of a metal based on ceramic nitrides
- F16C2206/60—Silicon nitride (Si3N4)l
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2223/00—Surface treatments; Hardening; Coating
- F16C2223/30—Coating surfaces
- F16C2223/60—Coating surfaces by vapour deposition, e.g. PVD, CVD
Description
摺動面が相対摺動する摺動部品であって、
前記摺動面には、ポリマー構造が分散された炭素膜が形成されており、当該炭素膜は分光エリプソメトリの550nmの波長域で消衰係数0.2以下、屈折率1.5~2.0を満たす割合のポリマー構造が分散されている。
これによれば、摺動部材の摺動面に形成される炭素膜が分光エリプソメトリの550nmの波長域で消衰係数0.2以下、屈折率1.5~2.0を満たす割合のポリマー構造が分散されたものであることにより、炭素膜の硬度が比較的低く相手側の摺動面との摩擦による欠削粒が小さくなるとともに、π電子が少なく化学反応性が低く摩耗粉や欠削粒が互いに結合し難くなるため、摺動面間に発生する摩耗粉や欠削粒が微細な状態に維持され、結合により大きな粒が生成されることがなく、摺動面間から表面の凹みや外部に排出されることで摩擦への影響が抑えられ、低摩擦効果を得ることができる。このように、摺動による炭素膜の摩耗粉や欠削粒を相手側の摺動面に移着させて移着膜を形成する必要がないことから、無潤滑環境下において安定して低摩擦効果を得ることができる。
これによれば、炭素膜が摩耗し難くなるため、長期間にわたり低摩擦効果を得ることができる。
これによれば、摩擦による炭素膜の摩耗粉や欠削粒が相手側の摺動面に移着し難い。
これによれば、炭素膜の表面における凹みに摺動面間に発生する摩耗粉や欠削粒が捕集されやすくなるため、摺動面間から摩耗粉や欠削粒が排出され低摩擦効果がより得られやすくなる。
これによれば、無潤滑環境下においてメカニカルシールの使用可能条件を満たす低摩擦効果を得ることができる。
回転密封環の回転数=75rpm
PV値=0.002MPa.m/sec
試験時間=摺動距離200mに達するまで
被密封流体=窒素ガス
11 摺動面
12 SiC基材
12a 端面部
20 回転密封環(摺動部品)
21 摺動面
30 炭素膜
30a 表面
30b 凹み
130b 凹み
P20,P30 摩耗粉
P31 欠削粒
Claims (4)
- メカニカルシールの密封環として摺動面が相対摺動する摺動部品であって、
前記摺動面には、ポリマー構造が分散された炭素膜が形成されており、当該炭素膜は分光エリプソメトリの550nmの波長域で消衰係数0.2以下、屈折率1.5~2.0を満たす割合のポリマー構造が分散されている摺動部品。 - 前記炭素膜は、ビッカース硬さが2500HV以下である請求項1に記載の摺動部品。
- 前記摺動面と摺動する相手側摺動部品の摺動面が窒化珪素により形成されている請求項1または2に記載の摺動部品。
- 前記炭素膜の表面における算術平均粗さRaは0.005~0.1μmである請求項1ないし3のいずれかに記載の摺動部品。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019075630 | 2019-04-11 | ||
JP2019075630 | 2019-04-11 | ||
PCT/JP2020/015716 WO2020209262A1 (ja) | 2019-04-11 | 2020-04-07 | 摺動部品 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020209262A1 JPWO2020209262A1 (ja) | 2020-10-15 |
JP7404352B2 true JP7404352B2 (ja) | 2023-12-25 |
Family
ID=72751355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021513647A Active JP7404352B2 (ja) | 2019-04-11 | 2020-04-07 | 摺動部品 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220170511A1 (ja) |
EP (1) | EP3954913A4 (ja) |
JP (1) | JP7404352B2 (ja) |
CN (1) | CN113677902A (ja) |
WO (1) | WO2020209262A1 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002097573A (ja) | 2000-09-19 | 2002-04-02 | Riken Corp | 摺動部材 |
JP2006194282A (ja) | 2005-01-11 | 2006-07-27 | Nissan Motor Co Ltd | メカニカルシール機構 |
JP2006318535A (ja) | 2005-05-10 | 2006-11-24 | Fuji Photo Film Co Ltd | 磁気記録媒体 |
WO2008133197A1 (ja) | 2007-04-20 | 2008-11-06 | Ebara Corporation | 炭素系摺動部材を用いた軸受け又はシール |
JP2019015309A (ja) | 2017-07-04 | 2019-01-31 | イーグル工業株式会社 | メカニカルシール |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH02158690A (ja) * | 1988-12-09 | 1990-06-19 | Ricoh Co Ltd | 摺動部材 |
JPH0954996A (ja) * | 1995-08-10 | 1997-02-25 | Tdk Corp | 光磁気記録媒体 |
US9138805B2 (en) * | 2002-03-06 | 2015-09-22 | Deere & Company | Method for applying wear resistant coating to mechanical face seal |
JP4030426B2 (ja) * | 2002-12-27 | 2008-01-09 | イーグル工業株式会社 | シール用摺動部材及びその製造方法 |
JP2004225725A (ja) | 2003-01-20 | 2004-08-12 | Eagle Ind Co Ltd | 摺動部品 |
CN101365660A (zh) * | 2006-02-24 | 2009-02-11 | 日立化成工业株式会社 | 陶瓷烧结体、使用其的滑动部件以及陶瓷烧结体的制造方法 |
JP2008267584A (ja) * | 2007-04-25 | 2008-11-06 | Ebara Corp | 純水用セラミックス摺動部材 |
CA2729791C (en) * | 2008-07-02 | 2017-09-26 | Xebec Adsorption Inc. | Rotary face seal with anti-crowning features |
US8591113B2 (en) * | 2008-07-08 | 2013-11-26 | Ntn Corporation | Fluid dynamic bearing device |
JP2010281928A (ja) | 2009-06-03 | 2010-12-16 | Konica Minolta Business Technologies Inc | 二成分現像剤および現像方法 |
US9383018B2 (en) * | 2012-03-15 | 2016-07-05 | Aktiebolaget Skf | Rotary cartridge seal with internal face-sealing surfaces |
US9347488B2 (en) * | 2012-03-23 | 2016-05-24 | Seal-Ryt Corporation | Seal-bearing assembly |
JP2014152373A (ja) * | 2013-02-12 | 2014-08-25 | Kayaba Ind Co Ltd | 摺動部材 |
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US10807913B1 (en) * | 2014-02-11 | 2020-10-20 | Us Synthetic Corporation | Leached superabrasive elements and leaching systems methods and assemblies for processing superabrasive elements |
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-
2020
- 2020-04-07 US US17/601,680 patent/US20220170511A1/en active Pending
- 2020-04-07 EP EP20787089.0A patent/EP3954913A4/en active Pending
- 2020-04-07 JP JP2021513647A patent/JP7404352B2/ja active Active
- 2020-04-07 WO PCT/JP2020/015716 patent/WO2020209262A1/ja unknown
- 2020-04-07 CN CN202080026391.8A patent/CN113677902A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2002097573A (ja) | 2000-09-19 | 2002-04-02 | Riken Corp | 摺動部材 |
JP2006194282A (ja) | 2005-01-11 | 2006-07-27 | Nissan Motor Co Ltd | メカニカルシール機構 |
JP2006318535A (ja) | 2005-05-10 | 2006-11-24 | Fuji Photo Film Co Ltd | 磁気記録媒体 |
WO2008133197A1 (ja) | 2007-04-20 | 2008-11-06 | Ebara Corporation | 炭素系摺動部材を用いた軸受け又はシール |
JP2019015309A (ja) | 2017-07-04 | 2019-01-31 | イーグル工業株式会社 | メカニカルシール |
Also Published As
Publication number | Publication date |
---|---|
WO2020209262A1 (ja) | 2020-10-15 |
EP3954913A4 (en) | 2022-12-14 |
CN113677902A (zh) | 2021-11-19 |
JPWO2020209262A1 (ja) | 2020-10-15 |
US20220170511A1 (en) | 2022-06-02 |
EP3954913A1 (en) | 2022-02-16 |
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