JP7384551B2 - 診断システム、診断方法、診断プログラム及び流量制御装置。 - Google Patents

診断システム、診断方法、診断プログラム及び流量制御装置。 Download PDF

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Publication number
JP7384551B2
JP7384551B2 JP2018006632A JP2018006632A JP7384551B2 JP 7384551 B2 JP7384551 B2 JP 7384551B2 JP 2018006632 A JP2018006632 A JP 2018006632A JP 2018006632 A JP2018006632 A JP 2018006632A JP 7384551 B2 JP7384551 B2 JP 7384551B2
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Japan
Prior art keywords
value
flow rate
measured
pressure
volume
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JP2018006632A
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Japanese (ja)
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JP2018152051A (ja
Inventor
和也 赤土
健太郎 長井
和宏 松浦
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Horiba Stec Co Ltd
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Horiba Stec Co Ltd
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Application filed by Horiba Stec Co Ltd filed Critical Horiba Stec Co Ltd
Priority to US15/918,871 priority Critical patent/US10890475B2/en
Priority to CN201810204147.0A priority patent/CN108572023B/zh
Priority to TW107108460A priority patent/TWI766961B/zh
Priority to KR1020180029164A priority patent/KR102498547B1/ko
Publication of JP2018152051A publication Critical patent/JP2018152051A/ja
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Publication of JP7384551B2 publication Critical patent/JP7384551B2/ja
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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Flow Control (AREA)
  • Radar Systems Or Details Thereof (AREA)
JP2018006632A 2017-03-14 2018-01-18 診断システム、診断方法、診断プログラム及び流量制御装置。 Active JP7384551B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US15/918,871 US10890475B2 (en) 2017-03-14 2018-03-12 Diagnostic system, diagnostic method, diagnostic program, and flow rate controller
CN201810204147.0A CN108572023B (zh) 2017-03-14 2018-03-13 诊断系统、诊断方法和存储介质
TW107108460A TWI766961B (zh) 2017-03-14 2018-03-13 診斷系統、診斷方法、存儲介質和流量控制裝置
KR1020180029164A KR102498547B1 (ko) 2017-03-14 2018-03-13 진단 시스템, 진단 방법, 진단 프로그램 및 유량 제어 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017049248 2017-03-14
JP2017049248 2017-03-14

Publications (2)

Publication Number Publication Date
JP2018152051A JP2018152051A (ja) 2018-09-27
JP7384551B2 true JP7384551B2 (ja) 2023-11-21

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JP2018006632A Active JP7384551B2 (ja) 2017-03-14 2018-01-18 診断システム、診断方法、診断プログラム及び流量制御装置。

Country Status (3)

Country Link
JP (1) JP7384551B2 (ko)
KR (1) KR102498547B1 (ko)
TW (1) TWI766961B (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7437980B2 (ja) * 2019-03-12 2024-02-26 株式会社堀場エステック 流体制御装置、流体制御システム、診断方法、及び、流体制御装置用プログラム

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000214916A (ja) 1999-01-25 2000-08-04 Stec Inc 圧力式流量コントロ―ラのノズル診断機構および圧力式流量コントロ―ラのノズル診断方法
JP2003151602A (ja) 2001-11-08 2003-05-23 Matsushita Electric Ind Co Ltd 原料供給制御装置及び燃料電池システム
JP2005531069A (ja) 2002-06-24 2005-10-13 エム　ケー　エス　インストルメンツ　インコーポレーテッド 圧力の揺らぎに鈍感な質量流量制御のための装置及び方法
WO2008053839A1 (fr) 2006-11-02 2008-05-08 Horiba Stec, Co., Ltd. Mécanisme de diagnostic dans un régulateur de débit massique à pression différentielle
JP2013521495A (ja) 2010-03-01 2013-06-10 プロフタガレン アクチエボラグ 流量調整システム、および空気により運ばれる検体を検出するための前記流量調整システムを備える監視装置

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US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
US6502602B1 (en) * 2000-09-22 2003-01-07 Airometrix Mfg., Inc. Methods and apparatus for testing fluid compressors
US6999853B2 (en) * 2002-05-03 2006-02-14 Fisher Controls International Llc. Methods and apparatus for operating and performing diagnostics in a control loop of a control valve
CN100582978C (zh) * 2004-03-03 2010-01-20 费舍-柔斯芒特系统股份有限公司 用于预防加工厂中异常状况的配置系统和方法
JP5031689B2 (ja) * 2008-07-10 2012-09-19 東京瓦斯株式会社 ガスメーター計量方法及びガスメーター計量装置
JP5078027B2 (ja) * 2008-08-22 2012-11-21 住友化学株式会社 プロセス解析プログラムならびにプロセス解析装置およびそれを用いた運転シミュレータ装置
US8104334B2 (en) * 2009-04-30 2012-01-31 GM Global Technology Operations LLC Fuel pressure sensor performance diagnostic systems and methods based on hydrodynamics of injecton
JP5058358B2 (ja) * 2010-09-30 2012-10-24 株式会社堀場エステック 診断機構
KR101599343B1 (ko) * 2011-05-10 2016-03-03 가부시키가이샤 후지킨 유량 모니터 부착 압력식 유량 제어 장치
CN102393236B (zh) * 2011-11-01 2012-11-21 浙江大学 一种气体涡轮流量计的仪表系数自校正方法
CN103234605B (zh) * 2013-04-10 2015-06-24 温州百岸汽车零部件有限公司 汽车流量计双向气流及反应速度的对比测试方法和测试仪
CN103364055B (zh) * 2013-07-15 2015-07-15 河南理工大学 一种流量计脉冲自动校正方法及装置
JP6107697B2 (ja) * 2014-02-12 2017-04-05 株式会社デンソー 流量計の校正方法
US9551259B1 (en) * 2015-08-26 2017-01-24 Ford Global Technologies, Llc Method and system for diesel particulate filter diagnostics
CN105716674B (zh) * 2016-04-20 2020-06-23 成都千嘉科技有限公司 超声波流量计的超声发送时间校正方法、系统及流量计

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000214916A (ja) 1999-01-25 2000-08-04 Stec Inc 圧力式流量コントロ―ラのノズル診断機構および圧力式流量コントロ―ラのノズル診断方法
JP2003151602A (ja) 2001-11-08 2003-05-23 Matsushita Electric Ind Co Ltd 原料供給制御装置及び燃料電池システム
JP2005531069A (ja) 2002-06-24 2005-10-13 エム　ケー　エス　インストルメンツ　インコーポレーテッド 圧力の揺らぎに鈍感な質量流量制御のための装置及び方法
WO2008053839A1 (fr) 2006-11-02 2008-05-08 Horiba Stec, Co., Ltd. Mécanisme de diagnostic dans un régulateur de débit massique à pression différentielle
JP2013521495A (ja) 2010-03-01 2013-06-10 プロフタガレン アクチエボラグ 流量調整システム、および空気により運ばれる検体を検出するための前記流量調整システムを備える監視装置

Also Published As

Publication number Publication date
TW201841088A (zh) 2018-11-16
KR102498547B1 (ko) 2023-02-10
TWI766961B (zh) 2022-06-11
JP2018152051A (ja) 2018-09-27
KR20180105083A (ko) 2018-09-27

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