JP7382629B2 - 光学測定装置および波長校正方法 - Google Patents

光学測定装置および波長校正方法 Download PDF

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Publication number
JP7382629B2
JP7382629B2 JP2019194654A JP2019194654A JP7382629B2 JP 7382629 B2 JP7382629 B2 JP 7382629B2 JP 2019194654 A JP2019194654 A JP 2019194654A JP 2019194654 A JP2019194654 A JP 2019194654A JP 7382629 B2 JP7382629 B2 JP 7382629B2
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Prior art keywords
interference spectrum
wavelength
light
wavelength calibration
theoretical
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JP2019194654A
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Japanese (ja)
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JP2021067611A (ja
JP2021067611A5 (enExample
Inventor
俊輝 新家
展幸 井上
真 大川内
宗大 岡本
史朗 川口
勉 水口
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Otsuka Electronics Co Ltd
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Otsuka Electronics Co Ltd
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Priority to JP2019194654A priority Critical patent/JP7382629B2/ja
Priority to KR1020200135083A priority patent/KR102859530B1/ko
Priority to TW109136443A priority patent/TWI872140B/zh
Priority to CN202011149855.2A priority patent/CN112710393B/zh
Publication of JP2021067611A publication Critical patent/JP2021067611A/ja
Publication of JP2021067611A5 publication Critical patent/JP2021067611A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/283—Investigating the spectrum computer-interfaced
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2859—Peak detecting in spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G01J2003/323—Comparing line:background

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
JP2019194654A 2019-10-25 2019-10-25 光学測定装置および波長校正方法 Active JP7382629B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019194654A JP7382629B2 (ja) 2019-10-25 2019-10-25 光学測定装置および波長校正方法
KR1020200135083A KR102859530B1 (ko) 2019-10-25 2020-10-19 광학 측정 장치, 파장 교정 방법 및 표준 시료
TW109136443A TWI872140B (zh) 2019-10-25 2020-10-21 光學測定裝置、波長校正方法及標準試料
CN202011149855.2A CN112710393B (zh) 2019-10-25 2020-10-23 光学测定装置、波长校正方法以及标准试样

Applications Claiming Priority (1)

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JP2019194654A JP7382629B2 (ja) 2019-10-25 2019-10-25 光学測定装置および波長校正方法

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JP2021067611A JP2021067611A (ja) 2021-04-30
JP2021067611A5 JP2021067611A5 (enExample) 2022-09-16
JP7382629B2 true JP7382629B2 (ja) 2023-11-17

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JP (1) JP7382629B2 (enExample)
KR (1) KR102859530B1 (enExample)
CN (1) CN112710393B (enExample)
TW (1) TWI872140B (enExample)

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Publication number Priority date Publication date Assignee Title
CN115372270A (zh) * 2021-05-20 2022-11-22 智谱科技有限公司 光谱整合校正方法及多光谱光谱仪
CN113514425B (zh) * 2021-09-14 2021-12-14 苏州高视半导体技术有限公司 一种平面等厚介质折射率的校准装置及校准方法
CN117990211B (zh) * 2022-11-02 2025-11-28 华为技术有限公司 光谱仪和电子设备
CN117249773B (zh) * 2023-11-08 2024-02-06 南通元激发科技有限公司 一种近退相干厚膜的膜层厚度及其折射率的测量方法
CN120558391A (zh) * 2025-07-31 2025-08-29 杭州高谱成像技术有限公司 一种基于薄膜干涉多峰特征的光谱定标方法及系统

Citations (5)

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Publication number Priority date Publication date Assignee Title
JP2001356050A (ja) 2000-06-14 2001-12-26 Toray Ind Inc 分光方法及びフィルムの製造方法
JP2008298776A (ja) 2007-05-30 2008-12-11 F Hoffmann La Roche Ag 分光計の波長較正法
JP2013040799A (ja) 2011-08-11 2013-02-28 Canon Inc 分光測色器、および画像形成装置
JP2014228281A (ja) 2013-05-17 2014-12-08 コニカミノルタ株式会社 フーリエ変換型分光計およびフーリエ変換型分光計の校正方法
JP2019020419A (ja) 2017-07-20 2019-02-07 Ｊｆｅテクノリサーチ株式会社 膜厚計算方法、膜厚計算プログラム及び膜厚計算装置

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DE69608252T2 (de) * 1995-02-09 2000-11-02 Foss Electric A S Hillerod Verfahren zum eichen mehrerer spektrometer
JPH10122824A (ja) * 1996-10-24 1998-05-15 Dainippon Screen Mfg Co Ltd 膜厚測定方法
JP5328437B2 (ja) * 2009-03-25 2013-10-30 キヤノン株式会社 透過波面測定方法、屈折率分布測定方法、光学素子の製造方法、及び透過波面測定装置
JP5709372B2 (ja) * 2009-12-01 2015-04-30 キヤノン株式会社 校正手段、校正方法、及びプログラム
JP5721586B2 (ja) * 2011-08-12 2015-05-20 大塚電子株式会社 光学特性測定装置および光学特性測定方法
JP5484537B2 (ja) * 2012-09-03 2014-05-07 大塚電子株式会社 分光特性測定装置および分光特性測定方法
US9921104B2 (en) * 2016-06-11 2018-03-20 Kla-Tencor Corporation Simultaneous multi-angle spectroscopy
JP6285597B1 (ja) * 2017-06-05 2018-02-28 大塚電子株式会社 光学測定装置および光学測定方法
EP3477252A1 (de) * 2017-10-25 2019-05-01 Unity Semiconductor GmbH Anordnung zur erfassung des oberflächenprofils einer objektoberfläche mittels interferometrischer abstandsmessung
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JP6402273B1 (ja) * 2018-05-18 2018-10-10 大塚電子株式会社 光学測定装置及び光学測定方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001356050A (ja) 2000-06-14 2001-12-26 Toray Ind Inc 分光方法及びフィルムの製造方法
JP2008298776A (ja) 2007-05-30 2008-12-11 F Hoffmann La Roche Ag 分光計の波長較正法
JP2013040799A (ja) 2011-08-11 2013-02-28 Canon Inc 分光測色器、および画像形成装置
JP2014228281A (ja) 2013-05-17 2014-12-08 コニカミノルタ株式会社 フーリエ変換型分光計およびフーリエ変換型分光計の校正方法
JP2019020419A (ja) 2017-07-20 2019-02-07 Ｊｆｅテクノリサーチ株式会社 膜厚計算方法、膜厚計算プログラム及び膜厚計算装置

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Publication number Publication date
KR20210049679A (ko) 2021-05-06
TWI872140B (zh) 2025-02-11
CN112710393A (zh) 2021-04-27
JP2021067611A (ja) 2021-04-30
TW202138747A (zh) 2021-10-16
KR102859530B1 (ko) 2025-09-12
CN112710393B (zh) 2025-07-01

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