JP7373874B2 - 不良検出装置及び不良検出方法 - Google Patents

不良検出装置及び不良検出方法 Download PDF

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JP7373874B2
JP7373874B2 JP2022576284A JP2022576284A JP7373874B2 JP 7373874 B2 JP7373874 B2 JP 7373874B2 JP 2022576284 A JP2022576284 A JP 2022576284A JP 2022576284 A JP2022576284 A JP 2022576284A JP 7373874 B2 JP7373874 B2 JP 7373874B2
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ultrasonic
semiconductor die
frequency power
image
defect detection
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JPWO2022157870A5 (https=
JPWO2022157870A1 (https=
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広志 宗像
マイケル カークビー
卓也 足立
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Yamaha Robotics Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/069—Defect imaging, localisation and sizing using, e.g. time of flight diffraction [TOFD], synthetic aperture focusing technique [SAFT], Amplituden-Laufzeit-Ortskurven [ALOK] technique
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/223—Supports, positioning or alignment in fixed situation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/041—Analysing solids on the surface of the material, e.g. using Lamb, Rayleigh or shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/043—Analysing solids in the interior, e.g. by shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0609—Display arrangements, e.g. colour displays
    • G01N29/0618—Display arrangements, e.g. colour displays synchronised with scanning, e.g. in real-time
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0609—Display arrangements, e.g. colour displays
    • G01N29/0645—Display representation or displayed parameters, e.g. A-, B- or C-Scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/888—Marking defects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/023—Solids
    • G01N2291/0231—Composite or layered materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/0289—Internal structure, e.g. defects, grain size, texture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/104—Number of transducers two or more emitters, one receiver

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Acoustics & Sound (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP2022576284A 2021-01-21 2021-01-21 不良検出装置及び不良検出方法 Active JP7373874B2 (ja)

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JPWO2022157870A1 JPWO2022157870A1 (https=) 2022-07-28
JPWO2022157870A5 JPWO2022157870A5 (https=) 2023-03-15
JP7373874B2 true JP7373874B2 (ja) 2023-11-06

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US (1) US12487206B2 (https=)
JP (1) JP7373874B2 (https=)
KR (1) KR102811974B1 (https=)
CN (1) CN115769071B (https=)
TW (1) TWI820581B (https=)
WO (1) WO2022157870A1 (https=)

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Publication number Priority date Publication date Assignee Title
TWI847338B (zh) * 2022-11-01 2024-07-01 華碩電腦股份有限公司 電子裝置之震動控制方法
TW202548237A (zh) * 2023-12-27 2025-12-16 新加坡商聯達科技控股有限公司 針對裝置之側壁附近處由晶圓切割製程所致之內部缺陷的裝置檢測系統及方法
TWI874280B (zh) * 2024-09-20 2025-02-21 新加坡商先進科技新加坡有限公司 用於電子器件的缺陷檢驗方法和裝置
CN120495217B (zh) * 2025-05-06 2026-01-23 徐州远翔机车科技有限公司 一种钢轮表面划痕检测方法及系统

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JP2004101189A (ja) 2002-09-04 2004-04-02 Hitachi Ltd 欠陥検査装置及び欠陥検査方法
JP2007024674A (ja) 2005-07-15 2007-02-01 Hitachi Ltd 表面・表層検査装置、及び表面・表層検査方法
JP2011058879A (ja) 2009-09-08 2011-03-24 Mitsubishi Electric Corp クラック検知支援装置
JP2016130683A (ja) 2015-01-14 2016-07-21 東芝テック株式会社 振動計測装置
JP2018132481A (ja) 2017-02-17 2018-08-23 学校法人桐蔭学園 解析装置及び解析システム
CN108613979A (zh) 2018-03-12 2018-10-02 华中科技大学鄂州工业技术研究院 用于粘弹性定量检测的激光散斑图像处理装置及方法
DE102018221795A1 (de) 2018-12-14 2020-06-18 Volkswagen Aktiengesellschaft Vorrichtung zur Erzeugung eines haptisch wahrnehmbaren Bereiches sowie Konfigurations- und Steuerverfahren einer solchen Vorrichtung
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JP2004101189A (ja) 2002-09-04 2004-04-02 Hitachi Ltd 欠陥検査装置及び欠陥検査方法
JP2007024674A (ja) 2005-07-15 2007-02-01 Hitachi Ltd 表面・表層検査装置、及び表面・表層検査方法
JP2011058879A (ja) 2009-09-08 2011-03-24 Mitsubishi Electric Corp クラック検知支援装置
JP2016130683A (ja) 2015-01-14 2016-07-21 東芝テック株式会社 振動計測装置
JP2018132481A (ja) 2017-02-17 2018-08-23 学校法人桐蔭学園 解析装置及び解析システム
CN108613979A (zh) 2018-03-12 2018-10-02 华中科技大学鄂州工业技术研究院 用于粘弹性定量检测的激光散斑图像处理装置及方法
DE102018221795A1 (de) 2018-12-14 2020-06-18 Volkswagen Aktiengesellschaft Vorrichtung zur Erzeugung eines haptisch wahrnehmbaren Bereiches sowie Konfigurations- und Steuerverfahren einer solchen Vorrichtung
CN111316093A (zh) 2018-12-14 2020-06-19 合刃科技（深圳）有限公司 结构缺陷检测系统及结构缺陷检测方法

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WO2022157870A1 (ja) 2022-07-28
US20240426790A1 (en) 2024-12-26
US12487206B2 (en) 2025-12-02
KR20230056721A (ko) 2023-04-27
KR102811974B1 (ko) 2025-05-22
JPWO2022157870A1 (https=) 2022-07-28
TW202229857A (zh) 2022-08-01
CN115769071A (zh) 2023-03-07
TWI820581B (zh) 2023-11-01
CN115769071B (zh) 2025-07-04

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