JP7372002B1 - 硬質皮膜 - Google Patents

硬質皮膜 Download PDF

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Publication number
JP7372002B1
JP7372002B1 JP2023538955A JP2023538955A JP7372002B1 JP 7372002 B1 JP7372002 B1 JP 7372002B1 JP 2023538955 A JP2023538955 A JP 2023538955A JP 2023538955 A JP2023538955 A JP 2023538955A JP 7372002 B1 JP7372002 B1 JP 7372002B1
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composition
atomic ratio
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upper layer
lower layer
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JP2023538955A
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Japanese (ja)
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JPWO2023157466A1 (https=
JPWO2023157466A5 (https=
Inventor
勇太 池田
嘉伸 矢野
友子 天野
ラビ ビニヨブ
慎一郎 佐藤
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Seavac Inc
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Seavac Inc
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Priority to JP2023176691A priority Critical patent/JP2023178359A/ja
Application granted granted Critical
Publication of JP7372002B1 publication Critical patent/JP7372002B1/ja
Publication of JPWO2023157466A5 publication Critical patent/JPWO2023157466A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
JP2023538955A 2022-02-15 2022-12-22 硬質皮膜 Active JP7372002B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023176691A JP2023178359A (ja) 2022-02-15 2023-10-12 硬質皮膜

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022021468 2022-02-15
JP2022021468 2022-02-15
PCT/JP2022/047417 WO2023157466A1 (ja) 2022-02-15 2022-12-22 硬質皮膜

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023176691A Division JP2023178359A (ja) 2022-02-15 2023-10-12 硬質皮膜

Publications (3)

Publication Number Publication Date
JPWO2023157466A1 JPWO2023157466A1 (https=) 2023-08-24
JP7372002B1 true JP7372002B1 (ja) 2023-10-31
JPWO2023157466A5 JPWO2023157466A5 (https=) 2024-01-24

Family

ID=87578052

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023538955A Active JP7372002B1 (ja) 2022-02-15 2022-12-22 硬質皮膜
JP2023176691A Pending JP2023178359A (ja) 2022-02-15 2023-10-12 硬質皮膜

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2023176691A Pending JP2023178359A (ja) 2022-02-15 2023-10-12 硬質皮膜

Country Status (3)

Country Link
US (1) US12486561B2 (https=)
JP (2) JP7372002B1 (https=)
WO (1) WO2023157466A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7807856B1 (ja) * 2025-09-30 2026-01-28 Ｓｅａｖａｃ株式会社 硬質皮膜

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119585066A (zh) * 2022-08-31 2025-03-07 京瓷株式会社 涂层刀具以及切削刀具

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04337064A (ja) * 1991-05-15 1992-11-25 Mitsubishi Heavy Ind Ltd 窒化硼素被覆部材
JPH08165558A (ja) * 1994-12-12 1996-06-25 Toshiba Tungaloy Co Ltd 窒化硼素被膜含有複合被覆体
JP2006137982A (ja) * 2004-11-11 2006-06-01 Hitachi Tool Engineering Ltd 硬質皮膜被覆部材及びその被覆方法
JP2012228735A (ja) * 2011-04-25 2012-11-22 Hitachi Tool Engineering Ltd 耐摩耗性に優れる被覆工具およびその製造方法
JP2021154415A (ja) * 2020-03-26 2021-10-07 三菱マテリアル株式会社 耐欠損性にすぐれた表面被覆切削工具

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02194159A (ja) 1988-03-24 1990-07-31 Kobe Steel Ltd 耐摩耗性皮膜形成方法
JP2840541B2 (ja) 1994-05-13 1998-12-24 神鋼コベルコツール株式会社 耐摩耗性に優れた硬質皮膜、硬質皮膜被覆工具及び硬質皮膜被覆部材
JP3836640B2 (ja) 1998-10-27 2006-10-25 三菱マテリアル神戸ツールズ株式会社 耐摩耗性に優れた硬質皮膜および硬質皮膜被覆部材
US6296928B1 (en) 1998-10-27 2001-10-02 Mmc Kobelco Tool Co., Ltd. Hard coating coated member having excellent wear resistance
JP3248897B2 (ja) 1999-03-19 2002-01-21 日立ツール株式会社 硬質皮膜被覆工具
JP4112834B2 (ja) 2000-12-28 2008-07-02 株式会社神戸製鋼所 切削工具用硬質皮膜を形成するためのターゲット
EP1992717B1 (en) 2000-12-28 2012-02-15 Kabushiki Kaisha Kobe Seiko Sho Use of a target for arc ion plating to form a hard film
JP3640310B2 (ja) 2002-11-25 2005-04-20 日立ツール株式会社 硬質皮膜
DK1422311T3 (da) 2002-11-19 2007-06-11 Hitachi Tool Eng Hård film og værktöj coatet med hård film
DE10347981A1 (de) 2003-10-15 2005-07-07 Gühring, Jörg, Dr. Verschleißschutzschicht für spanabhebende Werkzeuge, insbesondere für rotierende Zerspanungswerkzeuge
WO2006006429A1 (ja) * 2004-07-08 2006-01-19 Sumitomo Electric Hardmetal Corp. 圧縮応力の強度分布を有する被膜を備えた表面被覆切削工具
WO2006070509A1 (ja) * 2004-12-28 2006-07-06 Sumitomo Electric Hardmetal Corp. 表面被覆切削工具および表面被覆切削工具の製造方法
SE529838C2 (sv) * 2005-12-08 2007-12-04 Sandvik Intellectual Property Belagt hårdmetallskär, sätt att framställa detta samt dess användning för fräsning i stål
JP4475230B2 (ja) 2005-12-27 2010-06-09 三菱マテリアル株式会社 硬質皮膜
JP5193153B2 (ja) 2009-10-02 2013-05-08 株式会社神戸製鋼所 硬質皮膜、塑性加工用金型、塑性加工方法、及び硬質皮膜用ターゲット
JP5730535B2 (ja) 2010-10-29 2015-06-10 株式会社神戸製鋼所 硬質皮膜形成部材および硬質皮膜の形成方法
JP2016199793A (ja) * 2015-04-13 2016-12-01 株式会社神戸製鋼所 硬質皮膜
JP6347566B1 (ja) 2017-10-13 2018-06-27 鋼鈑工業株式会社 硬質皮膜、この硬質皮膜が被覆された被覆材、表面処理方法及びアーク放電式イオンプレーティング用ターゲット材

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04337064A (ja) * 1991-05-15 1992-11-25 Mitsubishi Heavy Ind Ltd 窒化硼素被覆部材
JPH08165558A (ja) * 1994-12-12 1996-06-25 Toshiba Tungaloy Co Ltd 窒化硼素被膜含有複合被覆体
JP2006137982A (ja) * 2004-11-11 2006-06-01 Hitachi Tool Engineering Ltd 硬質皮膜被覆部材及びその被覆方法
JP2012228735A (ja) * 2011-04-25 2012-11-22 Hitachi Tool Engineering Ltd 耐摩耗性に優れる被覆工具およびその製造方法
JP2021154415A (ja) * 2020-03-26 2021-10-07 三菱マテリアル株式会社 耐欠損性にすぐれた表面被覆切削工具

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
CHANG, YIN-YU, 他, COATINGS, vol. 10, JPN7023001093, 28 June 2020 (2020-06-28), pages 605 - 1, ISSN: 0005171908 *
CHANG, Yin-Yu, 他，Coatings，2020年06月28日，vol. 10，p.605-1 - p.605-17，doi:10.3390/coatings10070605

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7807856B1 (ja) * 2025-09-30 2026-01-28 Ｓｅａｖａｃ株式会社 硬質皮膜

Also Published As

Publication number Publication date
US12486561B2 (en) 2025-12-02
JPWO2023157466A1 (https=) 2023-08-24
JP2023178359A (ja) 2023-12-14
WO2023157466A1 (ja) 2023-08-24
US20250215550A1 (en) 2025-07-03

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