JP7337739B2 - 半導体装置 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 363
- 229910052751 metal Inorganic materials 0.000 claims description 55
- 239000002184 metal Substances 0.000 claims description 55
- 239000012535 impurity Substances 0.000 claims description 26
- 229910045601 alloy Inorganic materials 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 11
- 229910021332 silicide Inorganic materials 0.000 claims description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 212
- 238000011084 recovery Methods 0.000 description 14
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 239000011229 interlayer Substances 0.000 description 8
- 238000005036 potential barrier Methods 0.000 description 7
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000779 depleting effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013642 negative control Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Description
図1(a)および(b)は、第1実施形態に係る半導体装置1を示す模式断面図である。半導体装置1は、例えば、PINダイオードである。図1(a)は、図1(b)中に示すA-A線に沿った断面図である。図1(b)は、図1(a)中に示すB-B線に沿った断面図である。
図3は、第2実施形態に係る半導体装置4を示す模式断面図である。半導体装置4は、半導体部10と、第1電極20と、第2電極30と、第3電極40と、を含む。
また、第1金属部30aの断面形状は、この例に限定されず、例えば、図1および図7に記載の埋め込みコンタクト部35pに適用しても良い。
図7は、第3実施形態に係る半導体装置9を示す模式断面図である。半導体装置9は、半導体部10と、第1電極20と、第2電極30と、第3電極40と、を含む。
Claims (14)
- 第1導電形の第1半導体層と、第2導電形の第2半導体層と、前記第2導電形の第3半導体層と、を含む半導体部と、
前記半導体部の裏面上に設けられた第1電極と、
前記半導体部の表面上に設けられた第2電極と、
前記半導体部と前記第2電極との間において、前記半導体部中に設けられ、前記半導体部から第1絶縁膜により電気的に絶縁され、前記半導体部の表面に沿った方向に延在する第3電極と、
を備え、
前記第1半導体層は、前記第1電極と前記第2電極との間に延在し、
前記第2半導体層は、前記第1半導体層と前記第2電極との間に設けられ、
前記第3半導体層は、前記第2半導体層と前記第2電極との間に設けられ、前記第2半導体層の第2導電形不純物の濃度よりも高濃度の第2導電形不純物を含み、
前記第2電極は、前記半導体部の前記表面から前記第2半導体層中に延在する複数の埋め込みコンタクト部と、前記半導体部の前記表面に接する表面コンタクト部と、を含み、
前記複数の埋め込みコンタクト部は、前記第3電極の延在方向に並び、前記第2半導体層に接し、前記表面コンタクト部は、前記第3半導体層に接した半導体装置。 - 前記第3半導体層は、前記複数の埋め込みコンタクト部のうちの隣り合う2つの埋め込みコンタクト部の間に設けられる請求項1記載の半導体装置。
- 前記埋め込みコンタクト部は、前記第1電極から前記第2電極に向かう第1方向の第1位置において、前記半導体部の前記表面に沿った第2方向の第1幅を有し、前記第1位置と前記第1方向に並んだ第2位置において、前記第2方向の第2幅を有し、
前記第1位置は、前記第2位置と前記第1電極との間に位置し、前記第1幅は、前記第2幅よりも広い請求項1または2に記載の半導体装置。 - 前記埋め込みコンタクト部は、前記第1電極から前記第2電極に向かう第1方向の第1位置において、前記半導体部の前記表面に沿った第2方向の第1幅を有し、前記第1位置と前記第1方向に並んだ第2位置において、前記第2方向の第2幅を有し、
前記第1位置は、前記第2位置と前記第1電極との間に位置し、前記第1幅は、前記第2幅よりも狭い請求項1または2に記載の半導体装置。 - 第1導電形の第1半導体層と、第2導電形の第2半導体層と、を含む半導体部と、
前記半導体部の裏面上に設けられた第1電極と、
前記半導体部の表面上に設けられた第2電極と、
前記半導体部と前記第2電極との間において、前記半導体部中に設けられ、前記半導体部から第1絶縁膜により電気的に絶縁され、前記半導体部の表面に沿った方向に延在する第3電極と、
を備え、
前記第1半導体層は、前記第1電極と前記第2電極との間に延在し、
前記第2半導体層は、前記第1半導体層と前記第2電極との間に設けられ、
前記第2電極は、前記半導体部の前記表面から前記第2半導体層中に延在し、前記第2半導体層に接した複数の第1金属部と、前記半導体部の前記表面において前記第2半導体層に接し、前記第1金属部とは異なる種類の金属を含む第2金属部と、を含み、
前記複数の第1金属部は、前記第3電極の延在方向に並ぶ、半導体装置。 - 前記第1金属部は、前記第1電極から前記第2電極に向かう第1方向の第1位置において、前記半導体部の前記表面に沿った第2方向の第1幅を有し、前記第1位置と前記第1
方向に並んだ第2位置において、前記第2方向の第2幅を有し、
前記第1位置は、前記第2位置と前記第1電極との間に位置し、前記第1幅は、前記第2幅よりも広い請求項5記載の半導体装置。 - 前記第1金属部は、前記第1電極から前記第2電極に向かう第1方向の第1位置において、前記半導体部の前記表面に沿った第2方向の第1幅を有し、前記第1位置と前記第1方向に並んだ第2位置において、前記第2方向の第2幅を有し、
前記第1位置は、前記第2位置と前記第1電極との間に位置し、前記第1幅は、前記第2幅よりも狭い請求項5記載の半導体装置。 - 第1導電形の第1半導体層と、第2導電形の第2半導体層と、を含む半導体部と、
前記半導体部の裏面上に設けられた第1電極と、
前記半導体部の表面上に設けられ、前記半導体部の前記表面から前記第2半導体層中に延在し、前記第2半導体層に接した複数の埋め込みコンタクト部を含む第2電極と、
前記半導体部と前記第2電極との間において、前記半導体部中に設けられ、前記半導体部から第1絶縁膜により電気的に絶縁され、前記半導体部の表面に沿った方向に延在する第3電極と、
前記第2電極の前記複数の埋め込みコンタクト部と前記第2半導体層との間に選択的に設けられ、前記複数の埋め込みコンタクト部のそれぞれの一部に接した合金層と、
を備え、
前記第1半導体層は、前記第1電極と前記第2電極との間に延在し、
前記第2半導体層は、前記第1半導体層と前記第2電極との間に設けられ、
前記第2電極の前記複数の埋め込みコンタクト部は、前記前記第3電極の延在方向に並び、
前記合金層は、前記複数の埋め込みコンタクト部のそれぞれと前記第1電極との間に位置する半導体装置。 - 前記半導体部は、シリコンを含み、
前記合金層は、シリサイドを含む請求項8記載の半導体装置。 - 前記埋め込みコンタクト部は、前記第1電極から前記第2電極に向かう第1方向の第1位置において、前記半導体部の前記表面に沿った第2方向の第1幅を有し、前記第1位置と前記第1方向に並んだ第2位置において、前記第2方向の第2幅を有し、
前記第1位置は、前記第2位置と前記第1電極との間に位置し、前記第1幅は、前記第2幅よりも広い請求項8または9に記載の半導体装置。 - 前記埋め込みコンタクト部は、前記第1電極から前記第2電極に向かう第1方向の第1位置において、前記半導体部の前記表面に沿った第2方向の第1幅を有し、前記第1位置と前記第1方向に並んだ第2位置において、前記第2方向の第2幅を有し、
前記第1位置は、前記第2位置と前記第1電極との間に位置し、前記第1幅は、前記第2幅よりも狭い請求項8または9に記載の半導体装置。 - 前記半導体部は、前記第1半導体層と前記第1電極との間に設けられ、前記第1半導体層の第1導電形不純物よりも高濃度の第1導電形不純物を含む第1導電形の第4半導体層をさらに含む請求項1~11のいずれか1つに記載の半導体装置。
- 前記第3電極は、前記第2電極と前記第3電極との間に制御電圧を印可できるように構成される、請求項1~12のいずれか1つに記載の半導体装置。
- 前記制御電圧は、前記第1半導体層と前記第1絶縁膜との界面に、第2導電形の反転層を誘起するように印可される請求項13記載の半導体装置。
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JP2020048761A JP7337739B2 (ja) | 2020-03-19 | 2020-03-19 | 半導体装置 |
CN202010607336.XA CN113497114A (zh) | 2020-03-19 | 2020-06-29 | 半导体装置 |
US17/012,166 US20210296477A1 (en) | 2020-03-19 | 2020-09-04 | Semiconductor device |
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WO2011105434A1 (ja) | 2010-02-23 | 2011-09-01 | 富士電機ホールディングス株式会社 | 半導体装置 |
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JP2017055079A (ja) | 2015-09-11 | 2017-03-16 | 株式会社東芝 | 半導体装置 |
US20190081147A1 (en) | 2017-09-13 | 2019-03-14 | Polar Semiconductor, Llc | Mosfet with vertical variation of gate-pillar separation |
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JP3173117B2 (ja) * | 1992-03-30 | 2001-06-04 | 株式会社村田製作所 | ショットキーバリア半導体装置 |
JPH11112005A (ja) * | 1997-10-01 | 1999-04-23 | Ngk Insulators Ltd | 半導体装置 |
GB2369726B (en) * | 1999-08-30 | 2004-01-21 | Inst Of Biophyics Chinese Acad | Parallel plate diode |
JP2005229071A (ja) * | 2004-02-16 | 2005-08-25 | Matsushita Electric Ind Co Ltd | ショットキーバリアダイオード |
JP5596495B2 (ja) * | 2010-10-29 | 2014-09-24 | パナソニック株式会社 | 半導体装置 |
JP6061181B2 (ja) * | 2012-08-20 | 2017-01-18 | ローム株式会社 | 半導体装置 |
DE102014117780B4 (de) * | 2014-12-03 | 2018-06-21 | Infineon Technologies Ag | Halbleiterbauelement mit einer Grabenelektrode und Verfahren zur Herstellung |
JP6319151B2 (ja) * | 2015-03-23 | 2018-05-09 | 豊田合成株式会社 | 半導体装置および半導体装置の製造方法 |
JP6509673B2 (ja) * | 2015-08-10 | 2019-05-08 | 株式会社東芝 | 半導体装置 |
WO2018016029A1 (ja) * | 2016-07-20 | 2018-01-25 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
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US20090065814A1 (en) | 2005-02-11 | 2009-03-12 | Alpha & Omega Semiconductor Limited | MOS device with schottky barrier controlling layer |
WO2011105434A1 (ja) | 2010-02-23 | 2011-09-01 | 富士電機ホールディングス株式会社 | 半導体装置 |
US20120025283A1 (en) | 2010-07-29 | 2012-02-02 | Samsung Electronics Co., Ltd. | Memory device |
US20150228723A1 (en) | 2014-02-12 | 2015-08-13 | Infineon Technologies Ag | Semiconductor Device, Method for Manufacturing the Same and IGBT with Emitter Electrode Electrically Connected with Impurity Zone |
JP2017055079A (ja) | 2015-09-11 | 2017-03-16 | 株式会社東芝 | 半導体装置 |
US20190081147A1 (en) | 2017-09-13 | 2019-03-14 | Polar Semiconductor, Llc | Mosfet with vertical variation of gate-pillar separation |
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