JP7319295B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7319295B2 JP7319295B2 JP2020558275A JP2020558275A JP7319295B2 JP 7319295 B2 JP7319295 B2 JP 7319295B2 JP 2020558275 A JP2020558275 A JP 2020558275A JP 2020558275 A JP2020558275 A JP 2020558275A JP 7319295 B2 JP7319295 B2 JP 7319295B2
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Description
図1~図12は、第1実施形態にかかる半導体装置を示している。第1実施形態の半導体装置A1は、複数の半導体素子10、支持基板20、複数の端子30、複数のリード部材40、複数のワイヤ部材50、複数の導電ブロック60および封止樹脂70を備えている。本実施形態においては、複数の端子30は、2つの入力端子31,32、出力端子33、一対のゲート端子34A,34B、一対の検出端子35A,35Bおよび複数のダミー端子36を含んでいる。また、複数の導電ブロック60は、複数の第1ブロック61および複数の第2ブロック62を含んでいる。
図17~図20は、第2実施形態にかかる半導体装置を示している。第2実施形態の半導体装置A2は、半導体装置A1と比較して、主に、支持基板20、複数の端子30および封止樹脂70の構成が異なる。なお、第2実施形態において、第1実施形態と同一あるいは類似の構成要素については、同じ符号を付けてその説明を省略する。
[付記1]
第1方向において互いに反対側を向く素子主面および素子裏面を有する半導体素子と、
前記半導体素子を支持する支持基板と、
第1導電性接合材を介して前記素子主面に接合された導電ブロックと、
前記導電ブロックを介して前記半導体素子に導通する金属部材と、
を備えており、
前記導電ブロックは、熱膨張係数が前記金属部材の熱膨張係数よりも小さく、
前記導電ブロックと前記金属部材とは、前記導電ブロックの一部と前記金属部材の一部とが融接された溶接部によって接合されている、半導体装置。
[付記2]
前記導電ブロックは、インバー、コバール、あるいは、CuMo焼結体のいずれかの合金を含んでいる、付記1に記載の半導体装置。
[付記3]
前記導電ブロックは、前記合金を含んで構成される第1層と、前記第1層とは異なる金属を含んで構成される一対の第2層と、を有しており、
前記第1層は、前記第1方向において、一対の前記第2層に挟まれている、付記2に記載の半導体装置。
[付記4]
前記第2層は、銅を含んでいる、付記3に記載の半導体装置。
[付記5]
前記溶接部は、前記第1方向において、前記素子裏面が向く方向側の端部が前記第1層に達する、付記3または付記4に記載の半導体装置。
[付記6]
前記溶接部は、前記素子主面と同じ方向を向く表面に凹凸が形成されている、付記1ないし付記5のいずれかに記載の半導体装置。
[付記7]
前記金属部材は、リード部材であって、
前記導電ブロックは、前記半導体素子の上に配置された第1ブロックを含んでおり、
前記溶接部は、前記リード部材の一部と前記第1ブロックの一部とが融接された第1溶接部を含んでおり、
前記支持基板は、第2導電性接合材を介して前記半導体素子に導通する第1導電体、および、前記リード部材を介して前記半導体素子に導通する第2導電体を含む、付記1ないし付記6のいずれかに記載の半導体装置。
[付記8]
前記リード部材は、前記第2導電体に接合されており、
前記リード部材の一部と前記第2導電体の一部とは、前記リード部材の一部と前記第2導電体の一部とが融接された第2溶接部によって接合されている、付記7に記載の半導体装置。
[付記9]
前記支持基板は、前記第1導電体および前記第2導電体が接合された絶縁基板を含む、付記7または付記8に記載の半導体装置。
[付記10]
前記第1導電体および前記第2導電体はそれぞれ、グラファイト基板に銅膜が形成された複合基板である、付記7ないし付記9のいずれかに記載の半導体装置。
[付記11]
前記半導体素子を第1半導体素子として、前記第1半導体素子と異なる第2半導体素子をさらに備えており、
前記第2半導体素子は、前記第2導電体に接合されている、付記7ないし付記10のいずれかに記載の半導体装置。
[付記12]
前記第1導電体に導通接合された第1端子と、
前記第2半導体素子に導通接合された第2端子と、
前記第2導電体に導通接合された第3端子と、をさらに備えている、付記11に記載の半導体装置。
[付記13]
前記導電ブロックは、前記第2半導体素子の上に配置された第2ブロックをさらに含んでおり、
前記第2端子は、前記第2ブロックを介して、前記第2半導体素子に導通する、付記12に記載の半導体装置。
[付記14]
前記第1ブロックの前記第1方向の寸法は、前記第2ブロックの前記第1方向の寸法よりも小さい、付記13に記載の半導体装置。
[付記15]
前記第2端子は、前記第1方向に見て、前記第1導電体から前記第2導電体に跨って延びる延出部を含んでおり、
前記延出部は、一部が前記第2ブロックを介して前記第2半導体素子に接合され、かつ、前記第1方向に見て、前記リード部材に重なる、付記14に記載の半導体装置。
[付記16]
各々が導電性を有する第1スペーサおよび第2スペーサをさらに備えており、
前記第1スペーサは、前記第1方向に見て、前記第1端子の一部および前記第1導電体の一部に重なり、かつ、前記第1方向において、前記第1端子と前記第1導電体との間に介在し、
前記第2スペーサは、前記第1方向に見て、前記第3端子の一部および前記第2導電体の一部に重なり、かつ、前記第1方向において、前記第3端子と前記第2導電体との間に介在する、付記12ないし付記15のいずれかに記載の半導体装置。
[付記17]
前記第1端子と前記第1スペーサとは、前記第1端子の一部と前記第1スペーサの一部とが融接された第3溶接部によって接合されており、
前記第3端子と前記第2スペーサとは、前記第3端子の一部と前記第2スペーサの一部とが融接された第4溶接部によって接合されている、付記16に記載の半導体装置。
[付記18]
前記第1スペーサおよび前記第2スペーサは、銅を含んでいる、付記16または付記17に記載の半導体装置。
[付記19]
電気絶縁性を有する封止樹脂をさらに備えており、
前記封止樹脂は、前記第1半導体素子、前記第2半導体素子、前記第1端子の一部、前記第2端子の一部、前記第3端子の一部、および、前記支持基板の一部を覆う、付記12ないし付記18のいずれかに記載の半導体装置。
Claims (19)
- 第1方向において互いに反対側を向く素子主面および素子裏面を有する半導体素子と、
前記半導体素子を支持する支持基板と、
第1導電性接合材を介して前記素子主面に接合された導電ブロックと、
前記導電ブロックを介して前記半導体素子に導通する金属部材と、
を備えており、
前記導電ブロックは、熱膨張係数が前記金属部材の熱膨張係数よりも小さく、
前記導電ブロックと前記金属部材とは、前記導電ブロックの一部と前記金属部材の一部とが融接された溶接部によって接合されており、
前記導電ブロックは、前記第1方向において前記金属部材と前記半導体素子との間に介在し、
前記導電ブロックは、熱膨張係数が前記金属部材よりも小さい合金を含んで構成される第1層と、前記第1層とは異なる金属を含んで構成される一対の第2層と、を有しており、
前記第1層は、前記第1方向において、前記一対の第2層に挟まれている、
半導体装置。 - 前記第1層は、インバー、コバール、あるいは、CuMo焼結体のいずれかの合金を含んでいる、
請求項1に記載の半導体装置。 - 前記第2層は、銅を含んでいる、
請求項1または請求項2に記載の半導体装置。 - 前記溶接部は、前記第1方向において、前記素子裏面が向く方向側の端部が前記第1層に達する、
請求項1ないし請求項3のいずれか一項に記載の半導体装置。 - 第1方向において互いに反対側を向く素子主面および素子裏面を有する半導体素子と、
前記半導体素子を支持する支持基板と、
第1導電性接合材を介して前記素子主面に接合された導電ブロックと、
前記導電ブロックを介して前記半導体素子に導通する金属部材と、
を備えており、
前記導電ブロックは、熱膨張係数が前記金属部材の熱膨張係数よりも小さく、
前記導電ブロックと前記金属部材とは、前記導電ブロックの一部と前記金属部材の一部とが融接された溶接部によって接合されており、
前記導電ブロックは、前記第1方向において前記金属部材と前記半導体素子との間に介在し、
前記溶接部は、前記第1方向において前記素子主面と同じ方向を向く表面と、前記第1方向において前記素子裏面が向く方向側の端部とを含み、
前記表面の中心部と前記端部とを結ぶ直線は、前記第1方向に対して傾斜している、
半導体装置。 - 前記溶接部は、前記素子主面と同じ方向を向く表面に凹凸が形成されている、
請求項1ないし請求項5のいずれか一項に記載の半導体装置。 - 前記金属部材は、リード部材であって、
前記導電ブロックは、前記半導体素子の上に配置された第1ブロックを含んでおり、
前記溶接部は、前記リード部材の一部と前記第1ブロックの一部とが融接された第1溶接部を含んでおり、
前記支持基板は、第2導電性接合材を介して前記半導体素子に導通する第1導電体、および、前記リード部材を介して前記半導体素子に導通する第2導電体を含む、
請求項1ないし請求項6のいずれか一項に記載の半導体装置。 - 前記リード部材は、前記第2導電体に接合されており、
前記リード部材の一部と前記第2導電体の一部とは、前記リード部材の一部と前記第2導電体の一部とが融接された第2溶接部によって接合されている、
請求項7に記載の半導体装置。 - 前記支持基板は、前記第1導電体および前記第2導電体が接合された絶縁基板を含む、請求項7または請求項8に記載の半導体装置。
- 前記第1導電体および前記第2導電体はそれぞれ、グラファイト基板に銅膜が形成された複合基板である、
請求項7ないし請求項9のいずれか一項に記載の半導体装置。 - 前記半導体素子を第1半導体素子として、前記第1半導体素子と異なる第2半導体素子をさらに備えており、
前記第2半導体素子は、前記第2導電体に接合されている、
請求項7ないし請求項10のいずれか一項に記載の半導体装置。 - 前記第1導電体に導通接合された第1端子と、
前記第2半導体素子に導通接合された第2端子と、
前記第2導電体に導通接合された第3端子と、をさらに備えている、
請求項11に記載の半導体装置。 - 前記導電ブロックは、前記第2半導体素子の上に配置された第2ブロックをさらに含んでおり、
前記第2端子は、前記第2ブロックを介して、前記第2半導体素子に導通する、
請求項12に記載の半導体装置。 - 前記第1ブロックの前記第1方向の寸法は、前記第2ブロックの前記第1方向の寸法よりも小さい、
請求項13に記載の半導体装置。 - 前記第2端子は、前記第1方向に見て、前記第1導電体から前記第2導電体に跨って延びる延出部を含んでおり、
前記延出部は、一部が前記第2ブロックを介して前記第2半導体素子に接合され、かつ、前記第1方向に見て、前記リード部材に重なる、
請求項14に記載の半導体装置。 - 各々が導電性を有する第1スペーサおよび第2スペーサをさらに備えており、
前記第1スペーサは、前記第1方向に見て、前記第1端子の一部および前記第1導電体の一部に重なり、かつ、前記第1方向において、前記第1端子と前記第1導電体との間に介在し、
前記第2スペーサは、前記第1方向に見て、前記第3端子の一部および前記第2導電体の一部に重なり、かつ、前記第1方向において、前記第3端子と前記第2導電体との間に介在する、
請求項12ないし請求項15のいずれか一項に記載の半導体装置。 - 前記第1端子と前記第1スペーサとは、前記第1端子の一部と前記第1スペーサの一部とが融接された第3溶接部によって接合されており、
前記第3端子と前記第2スペーサとは、前記第3端子の一部と前記第2スペーサの一部とが融接された第4溶接部によって接合されている、
請求項16に記載の半導体装置。 - 前記第1スペーサおよび前記第2スペーサは、銅を含んでいる、
請求項16または請求項17に記載の半導体装置。 - 電気絶縁性を有する封止樹脂をさらに備えており、
前記封止樹脂は、前記第1半導体素子、前記第2半導体素子、前記第1端子の一部、前記第2端子の一部、前記第3端子の一部、および、前記支持基板の一部を覆う、
請求項12ないし請求項18のいずれか一項に記載の半導体装置。
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