JP7300448B2 - 前駆体の流れを制御するための装置及び方法 - Google Patents
前駆体の流れを制御するための装置及び方法 Download PDFInfo
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Description
Claims (15)
- プロセッサと、
該プロセッサに結合され、フラックス制御ルーチンを含むメモリユニットと、を備える前駆体の流れを制御するための装置であって、
前記フラックス制御ルーチンは、前駆体の流れを監視するために前記プロセッサ上で動作し、前記フラックス制御ルーチンは、
前駆体を送達するためにガス送達システムのセルから受け取った検出された信号の強度の変化に基づいて、前駆体のフラックス値を決定するように構成される、フラックス計算プロセッサと、
前記前駆体のフラックス値に基づいて誤差値を決定し、
該誤差値に基づいて温度調整ΔTを決定し、
アンプルに適用される温度設定値の新しいセットを計算するように構成される、温度制御プロセッサと、
前記温度設定値の新しいセットが温度限界の所定のセット内にないときに、アンプルの寿命末期状態をチェックするように構成される、寿命末期プロセッサと、を備える、前駆体の流れを制御するための装置。 - 請求項1記載の装置であって、前記フラックス計算プロセッサは、
第1の過程において生成された前記セル内の第1の基準信号を受信することであって、該第1の基準信号は、光源からの光の強度を検出する検出器のための前記第1の過程における検出器の性能を示す、第1の基準信号を受信することと、
前記検出器により前記第1の過程において生成されたバックグラウンド信号を受信することと、
前記第1の過程に続いて第2の過程において生成された第2の基準信号を受信することであって、該第2の基準信号は、前記検出器のための前記第2の過程における前記検出器の性能を示す、第2の基準信号を受信することと、
前記前駆体が前記セル内を流れているときに、前記第1の過程に続いて第3の過程において生成された前駆体信号を受信することと、により前記前駆体のフラックス値を決定するように構成される、装置。 - 請求項1に記載の装置であって、前記フラックス計算プロセッサは、
複数の過程において前記前駆体のフラックス値を決定することにより、前記前駆体の積分フラックスを計算するように構成される、装置。 - 請求項2に記載の装置であって、前記温度制御プロセッサは、
前記前駆体のフラックス値に基づいて警戒帯域条件を決定し、該警戒帯域条件に基づいてアンプルの温度を調整するように構成される、装置。 - 請求項1に記載の装置であって、前記温度制御プロセッサは、
前記前駆体のフラックス値に基づいて誤差値を決定することと、
該誤差値に基づいて温度調整ΔTを決定することと、
アンプルに適用される温度設定値の新しいセットを計算することと、
該温度設定値の新しいセットが温度限界の所定のセット内にあるときに、前記アンプルの加熱を制御するために前記温度設定値の新しいセットを適用することと、により前記温度を調整するように構成される、装置 - 請求項6に記載の装置であって、前記フラックス制御ルーチンは、寿命末期プロセッサをさらに備え、該寿命末期プロセッサは、
アンプル寿命末期条件が満たされていないときに、最も控えめな限界に基づいてΔTを再計算して、控えめなΔTを生成し、前記最も控えめな限界は、適用可能な最高温度のうち最も低いもの、又は適用可能な最低温度のうち最も高いものを表し、
前記控えめなΔTに基づいて前記アンプルに適用する前記温度設定値の新しいセットを計算するように構成される、装置。 - 請求項1に記載の装置であって、前記フラックス制御ルーチンは、偏位プロセッサをさらに備え、該偏位プロセッサは、
前記前駆体のフラックス値に基づいて故障状態を決定し、該故障状態の間に処理されている基板が第1の基板でないときに、偏位の通知信号を送信するように構成される、装置。 - 請求項1に記載の装置であって、前記フラックス制御ルーチンは、詰まり検出プロセッサをさらに備え、該詰まり検出プロセッサは、
前記セル用のセルの圧力の読み取りを受信し、
前記前駆体のフラックス値を受信し、
前記セルの圧力の読み取り値及び前記前駆体のフラックス値に基づいて詰まり位置を決定するように構成される、装置。 - 前駆体の流れを制御する方法であって、
ガス送達システムを通る前駆体の流れを供給するステップと、
前記前駆体の流れによって生じる、前記ガス送達システムのセル内の検出された信号の強度の変化を測定するステップと、
検出された信号の強度の前記変化に基づいて、前駆体のフラックス値を決定するステップと、
前記前駆体のフラックス値に基づいて誤差値を決定するステップと、
アンプルに適用される温度設定値の新しいセットを計算するステップと、
前記温度設定値の新しいセットが温度限界の所定のセット内にないときに、アンプルの寿命末期状態をチェックするステップと、を有する、方法。 - 前記セルは、前記前駆体を含むアンプルの下流に配置される、請求項10に記載の方法。
- 請求項10に記載の方法であって、
前記変化を測定する前記ステップは、
第1の過程において前記セル内の第1の基準信号を受信するステップであって、該第1の基準信号は、光源からの光の強度を検出する検出器のための前記第1の過程における検出器の性能を示す、ステップと、
前記検出器により前記第1の過程において生成されたバックグラウンド信号を受信するステップと、
前記第1の過程に続いて第2の過程において生成された第2の基準信号を受信することであって、該第2の基準信号は、前記検出器のための前記第2の過程における前記検出器の性能を示す、第2の基準信号を受信するステップと、
前記前駆体が前記セル内を流れているときに、前記第1の過程に続いて第3の過程において生成された前駆体信号を受信するステップと、を有する、方法。 - 請求項10に記載の方法であって、
前記前駆体の流れを供給する前記ステップは、
前記前駆体の複数の過程において複数のパルスを供給するステップを有し、
前記方法は、前記複数の過程において前記前駆体のフラックス値を決定するステップに基づいて、前記前駆体の積分フラックスを計算するステップをさらに有する、方法。 - 請求項10に記載の方法であって、
該方法は、さらに、
前記前駆体のフラックス値に基づいて故障状態を決定するステップと、
該故障状態の間に処理されている基板が第1の基板でないときに、偏位の通知信号を送信するステップと、を有する、方法。 - 前駆体の流れを制御するための装置であって、該装置は、
前駆体を出力するソースと、
該ソースに通信可能に結合されたセンサアセンブリであって、該センサアセンブリは、
前記ソースに結合され、前駆体を受けて伝導するセルと、
該セルの第1の側面に配置され、前記セル内に光を伝達する光源と、
前記セルを通って伝達した光を検出するために、前記光源とは反対側の前記セルの第2の側面に配置される検出器と、を備える、センサアセンブリと、
前記セルを通る前記前駆体の流れの間に前記セルから受信した検出された光の強度の変化に基づいて、前駆体のフラックス値を決定するように配置される制御システムと、を備え、前記制御システムは、
受け取った検出された信号の強度の変化に基づいて、前駆体のフラックス値を決定するように構成される、フラックス計算プロセッサと、
前記前駆体のフラックス値に基づいて誤差値を決定し、
該誤差値に基づいて温度調整ΔTを決定し、
アンプルに適用される温度設定値の新しいセットを計算するように構成される、温度制御プロセッサと、
前記温度設定値の新しいセットが温度限界の所定のセット内にないときに、アンプルの寿命末期状態をチェックするように構成される、寿命末期プロセッサと、を備える、装置。
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