JP2021508768A - 化学蒸着プロセスにおける前駆体を制御するための技術 - Google Patents
化学蒸着プロセスにおける前駆体を制御するための技術 Download PDFInfo
- Publication number
- JP2021508768A JP2021508768A JP2020533091A JP2020533091A JP2021508768A JP 2021508768 A JP2021508768 A JP 2021508768A JP 2020533091 A JP2020533091 A JP 2020533091A JP 2020533091 A JP2020533091 A JP 2020533091A JP 2021508768 A JP2021508768 A JP 2021508768A
- Authority
- JP
- Japan
- Prior art keywords
- precursor
- flux
- battery
- temperature
- processor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002243 precursor Substances 0.000 title claims abstract description 158
- 238000000034 method Methods 0.000 title claims description 65
- 230000008569 process Effects 0.000 title claims description 49
- 238000005229 chemical vapour deposition Methods 0.000 title description 24
- 230000004907 flux Effects 0.000 claims abstract description 91
- 230000008859 change Effects 0.000 claims abstract description 13
- 239000003708 ampul Substances 0.000 claims description 67
- 206010011906 Death Diseases 0.000 claims description 8
- 238000004364 calculation method Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 19
- 230000006870 function Effects 0.000 description 16
- 238000000151 deposition Methods 0.000 description 15
- 230000008021 deposition Effects 0.000 description 14
- 238000000231 atomic layer deposition Methods 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 10
- 238000005137 deposition process Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 5
- 238000006731 degradation reaction Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 230000006399 behavior Effects 0.000 description 4
- 239000006227 byproduct Substances 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical group [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000036541 health Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000002730 additional effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- ZJCVAZZKJPVOPY-UHFFFAOYSA-N carbon monoxide;cobalt;3,3-dimethylbut-1-yne Chemical group [Co].[Co].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].CC(C)(C)C#C ZJCVAZZKJPVOPY-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
- G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/04—Control of fluid pressure without auxiliary power
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/04—Control of fluid pressure without auxiliary power
- G05D16/0402—Control of fluid pressure without auxiliary power with two or more controllers mounted in series
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Automation & Control Theory (AREA)
- Fluid Mechanics (AREA)
- Dispersion Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
が実行される。
Claims (15)
- プロセッサと、
該プロセッサに結合され、フラックス制御ルーチンを含むメモリユニットと、を備える装置であって、
前記フラックス制御ルーチンは、前駆体の流れを監視するために前記プロセッサ上で動作し、フラックス計算プロセッサを備え、
該フラックス計算プロセッサは、前駆体を送達するためにガス送達システムの電池から受け取った検出された光の強度の変化に基づいて、前駆体のフラックス値を決定する、装置。 - 請求項1記載の装置であって、前記フラックス計算プロセッサは、該第1の基準信号は、光源からの光の強度を検出するための前記第1の過程における検出器の性能を示す、
第1の過程において生成された前記電池内の第1の基準信号を受信することであって、該第1の基準信号は、光源からの光の強度を検出する検出器のための前記第1の過程における検出器の性能を示す、第1の基準信号を受信することと、
前記検出器により前記第1の過程において生成されたバックグラウンド信号を受信することと、
前記第1の過程に続いて第2の過程において生成された第2の基準信号を受信することであって、該第2の基準信号は、前記検出器のための前記第2の過程における前記検出器の性能を示す、第2の基準信号を受信することと、
前記前駆体が前記電池内を流れているときに、前記第1の過程に続いて第3の過程において生成された前駆体信号を受信することと、により前記前駆体のフラックス値を決定する、装置。 - 請求項1に記載の装置であって、前記フラックス計算プロセッサは、
複数の過程において前記前駆体のフラックス値を決定することにより、前記前駆体の積分フラックスを計算する、装置。 - 請求項2に記載の装置であって、前記フラックス制御ルーチンは、温度制御プロセッサをさらに備え、該温度制御プロセッサは、
前記前駆体のフラックス値に基づいて警戒帯域条件を決定し、該警戒告帯域条件に基づいてアンプルの温度を調整する、装置。 - 請求項4に記載の装置であって、前記温度制御プロセッサは、
温度調整ΔTを決定することにより前記温度を調整し、
はアンプルの現在の温度限界に基づく誤差である、装置。 - 請求項4に記載の装置であって、前記温度制御プロセッサは、
前記前駆体のフラックス値に基づいて誤差値を決定することと、
該誤差値に基づいて温度調整ΔTを決定することと、
アンプルに適用される温度設定値の新しいセットを計算することと、
該温度設定値の新しいセットが温度限界の所定のセット内にあるときに、前記アンプルの加熱を制御するために前記温度設定値の新しいセットを適用することと、により前記温度を調整する、装置 - 請求項6に記載の装置であって、前記フラックス制御ルーチンは、寿命末期プロセッサをさらに備え、該寿命末期プロセッサは、
前記温度設定値の新しいセットが前記温度限界の所定のセット内にないときに、アンプルの寿命末期状態をチェックし、
アンプル寿命末期条件が満たされていないときに、最も控えめな限界に基づいてΔTを再計算して、控えめなΔTを生成し、
該控えめなΔTに基づいて前記アンプルに適用する前記温度設定値の新しいセットを計算する、装置。 - 請求項1に記載の装置であって、前記フラックス制御ルーチンは、偏位プロセッサをさらに備え、該偏位プロセッサは、
前記前駆体のフラックス値に基づいて故障状態を決定し、該故障状態の間に処理されている基板が第1の基板でないときに、偏位の通知信号を送信する、装置。 - 請求項1に記載の装置であって、前記フラックス制御ルーチンは、詰まり検出プロセッサをさらに備え、該詰まり検出プロセッサは、
前記電池用の電池の圧力の読み取りを受信し、
前記前駆体のフラックス値を受信し、
前記電池の圧力の読み取り値及び前記前駆体のフラックス値に基づいて詰まり位置を決定する、装置。 - 前駆体の流れを制御する方法であって、
ガス送達システムを通る前駆体の流れを供給するステップと、
前記前駆体の流れによって生じる、前記ガス送達システムの電池内の検出された光の強度の変化を測定するステップと、
検出された光の強度の前記変化に基づいて、前駆体のフラックス値を決定するステップと、を有する、方法。 - 前記電池は、前記前駆体を含むアンプルの下流に配置される、請求項10に記載の方法。
- 請求項10に記載の方法であって、
前記変化を測定する前記ステップは、
第1の過程において前記電池内の第1の基準信号を受信するステップであって、該第1の基準信号は、光源からの光の強度を検出する検出器のための前記第1の過程における検出器の性能を示す、ステップと、
前記検出器により前記第1の過程において生成されたバックグラウンド信号を受信するステップと、
前記第1の過程に続いて第2の過程において生成された第2の基準信号を受信することであって、該第2の基準信号は、前記検出器のための前記第2の過程における前記検出器の性能を示す、第2の基準信号を受信するステップと、
前記前駆体が前記電池内を流れているときに、前記第1の過程に続いて第3の過程において生成された前駆体信号を受信するステップと、を有する、方法。 - 請求項10に記載の方法であって、
前記前駆体の流れを供給する前記ステップは、
前記前駆体の複数の過程において複数のパルスを供給するステップを有し、
前記方法は、前記複数の過程において前記前駆体のフラックス値を決定するステップに基づいて、前記前駆体の積分フラックスを計算するステップをさらに有する、方法。 - 請求項10に記載の方法であって、
該方法は、さらに、
前記前駆体のフラックス値に基づいて故障状態を決定するステップと、
該故障状態の間に処理されている基板が第1の基板でないときに、偏位の通知信号を送信するステップと、を有する、方法。 - 前駆体の流れを制御するための装置であって、該装置は、
前駆体を出力するソースと、
該ソースに通信可能に結合されたセンサアセンブリであって、該センサアセンブリは、
前記ソースに結合され、前駆体を受けて伝導する電池と、
該電池の第1の側面に配置され、前記電池内に光を伝達する光源と、
前記電池を通って伝達した光を検出するために、前記光源とは反対側の前記電池の第2の側面に配置される検出器と、を備える、センサアセンブリと、
前記電池を通る前記前駆体の流れの間に前記電池から受信した検出された光の強度の変化に基づいて、前駆体のフラックス値を決定するように配置される制御システムと、を備える、装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2023100063A JP2023123606A (ja) | 2017-12-29 | 2023-06-19 | 前駆体の流れを制御するための装置及び方法 |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762611645P | 2017-12-29 | 2017-12-29 | |
US62/611,645 | 2017-12-29 | ||
US15/946,483 | 2018-04-05 | ||
US15/946,483 US10822699B2 (en) | 2017-12-29 | 2018-04-05 | Techniques for controlling precursors in chemical deposition processes |
PCT/US2018/067520 WO2019133620A1 (en) | 2017-12-29 | 2018-12-26 | Techniques for controlling precursors in chemical deposition processes |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023100063A Division JP2023123606A (ja) | 2017-12-29 | 2023-06-19 | 前駆体の流れを制御するための装置及び方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2021508768A true JP2021508768A (ja) | 2021-03-11 |
JP2021508768A5 JP2021508768A5 (ja) | 2021-09-16 |
JP7300448B2 JP7300448B2 (ja) | 2023-06-29 |
Family
ID=67058049
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020533091A Active JP7300448B2 (ja) | 2017-12-29 | 2018-12-26 | 前駆体の流れを制御するための装置及び方法 |
JP2023100063A Pending JP2023123606A (ja) | 2017-12-29 | 2023-06-19 | 前駆体の流れを制御するための装置及び方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023100063A Pending JP2023123606A (ja) | 2017-12-29 | 2023-06-19 | 前駆体の流れを制御するための装置及び方法 |
Country Status (6)
Country | Link |
---|---|
US (3) | US10822699B2 (ja) |
JP (2) | JP7300448B2 (ja) |
KR (2) | KR20230132622A (ja) |
CN (2) | CN117403215A (ja) |
TW (1) | TWI771550B (ja) |
WO (1) | WO2019133620A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11718912B2 (en) | 2019-07-30 | 2023-08-08 | Applied Materials, Inc. | Methods and apparatus for calibrating concentration sensors for precursor delivery |
US11513108B2 (en) | 2020-01-14 | 2022-11-29 | Mks Instruments, Inc. | Method and apparatus for pulse gas delivery with concentration measurement |
JP2022038365A (ja) * | 2020-08-26 | 2022-03-10 | 株式会社堀場エステック | 原料気化システム、及び、これに用いられる濃度制御モジュール |
KR20240016198A (ko) * | 2022-07-28 | 2024-02-06 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 제조 모니터링 프로세스 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08271418A (ja) * | 1995-01-31 | 1996-10-18 | Horiba Ltd | 赤外線ガス分析計及びcvd装置 |
JP2001068465A (ja) * | 1999-06-22 | 2001-03-16 | Tokyo Electron Ltd | 有機金属気相成長方法及び有機金属気相成長装置 |
JP2004131845A (ja) * | 2002-07-22 | 2004-04-30 | Applied Materials Inc | 固体前駆体分配を監視する方法と装置 |
JP2009500852A (ja) * | 2005-07-08 | 2009-01-08 | エム ケー エス インストルメンツ インコーポレーテッド | パルス蒸着の監視及び制御を行うためのセンサ |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5652431A (en) | 1995-10-06 | 1997-07-29 | The United States Of America As Represented By The Secretary Of The Navy | In-situ monitoring and feedback control of metalorganic precursor delivery |
US5963840A (en) * | 1996-11-13 | 1999-10-05 | Applied Materials, Inc. | Methods for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions |
JP2001131845A (ja) | 1999-10-27 | 2001-05-15 | Tsudakoma Corp | パイル経糸の張力制御方法 |
JP3905678B2 (ja) | 2000-02-28 | 2007-04-18 | 株式会社堀場製作所 | 薄膜堆積方法とその装置および薄膜堆積方法に用いるftirガス分析計並びに薄膜堆積方法に用いる混合ガス供給装置 |
US20030078396A1 (en) * | 2000-03-01 | 2003-04-24 | Corixa Corporation | Compositions and methods for the detection, diagnosis and therapy of hematological malignancies |
US6620670B2 (en) * | 2002-01-18 | 2003-09-16 | Applied Materials, Inc. | Process conditions and precursors for atomic layer deposition (ALD) of AL2O3 |
US20050095859A1 (en) | 2003-11-03 | 2005-05-05 | Applied Materials, Inc. | Precursor delivery system with rate control |
US7897217B2 (en) * | 2005-11-18 | 2011-03-01 | Tokyo Electron Limited | Method and system for performing plasma enhanced atomic layer deposition |
US8133194B2 (en) * | 2006-02-22 | 2012-03-13 | Henry Ford Health System | System and method for delivery of regional citrate anticoagulation to extracorporeal blood circuits |
US7858522B2 (en) * | 2006-03-29 | 2010-12-28 | Tokyo Electron Limited | Method for reducing carbon monoxide poisoning in a thin film deposition system |
US7340377B2 (en) * | 2006-03-31 | 2008-03-04 | Tokyo Electron Limited | Monitoring a single-wafer processing system |
US9287113B2 (en) * | 2012-11-08 | 2016-03-15 | Novellus Systems, Inc. | Methods for depositing films on sensitive substrates |
US20120009694A1 (en) * | 2010-07-12 | 2012-01-12 | National Institute Of Standards And Technology | Apparatus and method for monitoring precursor flux |
US9157730B2 (en) * | 2012-10-26 | 2015-10-13 | Applied Materials, Inc. | PECVD process |
US8940646B1 (en) * | 2013-07-12 | 2015-01-27 | Lam Research Corporation | Sequential precursor dosing in an ALD multi-station/batch reactor |
US9287437B2 (en) * | 2014-02-06 | 2016-03-15 | Tsmc Solar Ltd. | Apparatus and method for monitoring the process of fabricating solar cells |
US9964332B2 (en) | 2014-03-27 | 2018-05-08 | Lam Research Corporation | Systems and methods for bulk vaporization of precursor |
-
2018
- 2018-04-05 US US15/946,483 patent/US10822699B2/en active Active
- 2018-12-26 CN CN202311342976.2A patent/CN117403215A/zh active Pending
- 2018-12-26 JP JP2020533091A patent/JP7300448B2/ja active Active
- 2018-12-26 CN CN201880083702.7A patent/CN111566792B/zh active Active
- 2018-12-26 KR KR1020237030243A patent/KR20230132622A/ko not_active Application Discontinuation
- 2018-12-26 KR KR1020207021378A patent/KR102577081B1/ko active IP Right Grant
- 2018-12-26 WO PCT/US2018/067520 patent/WO2019133620A1/en active Application Filing
- 2018-12-28 TW TW107147764A patent/TWI771550B/zh active
-
2020
- 2020-09-04 US US17/012,980 patent/US11718914B2/en active Active
-
2023
- 2023-06-09 US US18/208,084 patent/US20230323540A1/en active Pending
- 2023-06-19 JP JP2023100063A patent/JP2023123606A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08271418A (ja) * | 1995-01-31 | 1996-10-18 | Horiba Ltd | 赤外線ガス分析計及びcvd装置 |
JP2001068465A (ja) * | 1999-06-22 | 2001-03-16 | Tokyo Electron Ltd | 有機金属気相成長方法及び有機金属気相成長装置 |
JP2004131845A (ja) * | 2002-07-22 | 2004-04-30 | Applied Materials Inc | 固体前駆体分配を監視する方法と装置 |
JP2009500852A (ja) * | 2005-07-08 | 2009-01-08 | エム ケー エス インストルメンツ インコーポレーテッド | パルス蒸着の監視及び制御を行うためのセンサ |
Also Published As
Publication number | Publication date |
---|---|
US20190203358A1 (en) | 2019-07-04 |
US20230323540A1 (en) | 2023-10-12 |
JP2023123606A (ja) | 2023-09-05 |
CN117403215A (zh) | 2024-01-16 |
KR20230132622A (ko) | 2023-09-15 |
TWI771550B (zh) | 2022-07-21 |
WO2019133620A1 (en) | 2019-07-04 |
US20200399758A1 (en) | 2020-12-24 |
CN111566792A (zh) | 2020-08-21 |
TW201934798A (zh) | 2019-09-01 |
JP7300448B2 (ja) | 2023-06-29 |
US10822699B2 (en) | 2020-11-03 |
KR102577081B1 (ko) | 2023-09-11 |
CN111566792B (zh) | 2023-11-03 |
KR20200095569A (ko) | 2020-08-10 |
US11718914B2 (en) | 2023-08-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7300448B2 (ja) | 前駆体の流れを制御するための装置及び方法 | |
EP2592395B1 (en) | Determining a quantity of transported fluid | |
TWI565823B (zh) | Processing device and process status confirmation method | |
KR102187959B1 (ko) | 과도 가스 흐름의 계측 방법 | |
JP7281285B2 (ja) | 濃度制御装置、及び、ゼロ点調整方法、濃度制御装置用プログラム | |
JP2023157913A (ja) | 前駆体供給用の濃度センサを較正するための方法および装置 | |
JP2021508768A5 (ja) | 前駆体の流れを制御するための装置及び方法 | |
US6098964A (en) | Method and apparatus for monitoring the condition of a vaporizer for generating liquid chemical vapor | |
TW201331585A (zh) | 樣品液體氣化系統、診斷系統及診斷方法 | |
JP2019137877A (ja) | 蒸着装置及び蒸着方法 | |
US10942139B2 (en) | Operation method for flow sensor device | |
TWI839555B (zh) | 用於校準針對前驅物輸送的濃度感測器的方法和設備 | |
JP7480172B2 (ja) | 人工知能を用いたプロセス産業におけるプロダクションアカウンティングのための方法及びシステム | |
JP2024083285A (ja) | 半導体製造化合物監視プロセス | |
US20140041754A1 (en) | Gas filling device of wafer carrier with function of monitoring gas property at gas discharge end | |
JP2004020423A (ja) | 放射線連続測定システム | |
WO2022256478A1 (en) | A system and method for mass flow measurement and control of process gases in a carrier stream using one or more quartz crystal microbalance sensors | |
UA72189U (uk) | Спосіб контролю роботи газовимірювальної станції |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210802 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210802 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220711 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220816 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220928 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221227 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230228 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230523 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230619 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7300448 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |