JP7284739B2 - 磁気センサ及び検査装置 - Google Patents

磁気センサ及び検査装置 Download PDF

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Publication number
JP7284739B2
JP7284739B2 JP2020153915A JP2020153915A JP7284739B2 JP 7284739 B2 JP7284739 B2 JP 7284739B2 JP 2020153915 A JP2020153915 A JP 2020153915A JP 2020153915 A JP2020153915 A JP 2020153915A JP 7284739 B2 JP7284739 B2 JP 7284739B2
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magnetic
conductive
magnetic element
electrically connected
along
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Japanese (ja)
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JP2022047887A5 (cg-RX-API-DMAC7.html
JP2022047887A (ja
Inventor
仁志 岩崎
聡志 白鳥
哲 喜々津
祥弘 東
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Toshiba Corp
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Toshiba Corp
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Priority to US17/169,388 priority patent/US11237230B1/en
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Publication of JP2022047887A5 publication Critical patent/JP2022047887A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/05—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves
    • A61B5/055—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves involving electronic [EMR] or nuclear [NMR] magnetic resonance, e.g. magnetic resonance imaging
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/242—Detecting biomagnetic fields, e.g. magnetic fields produced by bioelectric currents
    • A61B5/245—Detecting biomagnetic fields, e.g. magnetic fields produced by bioelectric currents specially adapted for magnetoencephalographic [MEG] signals
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • A61B5/6802—Sensor mounted on worn items
    • A61B5/6803—Head-worn items, e.g. helmets, masks, headphones or goggles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
    • G01R15/205—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices using magneto-resistance devices, e.g. field plates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0092—Measuring current only
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/18—Shielding or protection of sensors from environmental influences, e.g. protection from mechanical damage
    • A61B2562/182—Electrical shielding, e.g. using a Faraday cage
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/242—Detecting biomagnetic fields, e.g. magnetic fields produced by bioelectric currents
    • A61B5/243—Detecting biomagnetic fields, e.g. magnetic fields produced by bioelectric currents specially adapted for magnetocardiographic [MCG] signals
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/316—Modalities, i.e. specific diagnostic methods
    • A61B5/369—Electroencephalography [EEG]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
    • A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
    • A61B5/6813—Specially adapted to be attached to a specific body part
    • A61B5/6823—Trunk, e.g., chest, back, abdomen, hip
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/36—Arrangements for testing, measuring or monitoring the electrical condition of accumulators or electric batteries, e.g. capacity or state of charge [SoC]
    • G01R31/382—Arrangements for monitoring battery or accumulator variables, e.g. SoC
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
    • G01R33/0041—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration using feed-back or modulation techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/007—Environmental aspects, e.g. temperature variations, radiation, stray fields
    • G01R33/0076—Protection, e.g. with housings against stray fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0094—Sensor arrays

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Veterinary Medicine (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biophysics (AREA)
  • Public Health (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
JP2020153915A 2020-09-14 2020-09-14 磁気センサ及び検査装置 Active JP7284739B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2020153915A JP7284739B2 (ja) 2020-09-14 2020-09-14 磁気センサ及び検査装置
US17/169,388 US11237230B1 (en) 2020-09-14 2021-02-05 Magnetic sensor and inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020153915A JP7284739B2 (ja) 2020-09-14 2020-09-14 磁気センサ及び検査装置

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JP2022047887A JP2022047887A (ja) 2022-03-25
JP2022047887A5 JP2022047887A5 (cg-RX-API-DMAC7.html) 2022-04-18
JP7284739B2 true JP7284739B2 (ja) 2023-05-31

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022105354A (ja) * 2021-01-04 2022-07-14 株式会社東芝 磁気センサ及び検査装置
JP2022108403A (ja) * 2021-01-13 2022-07-26 株式会社東芝 磁気センサ及び検査装置
JP2022108344A (ja) * 2021-01-13 2022-07-26 株式会社東芝 磁気センサ及び検査装置
JP2022114102A (ja) * 2021-01-26 2022-08-05 株式会社東芝 磁気センサ及び検査装置

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020230893A1 (ja) * 2019-05-16 2020-11-19 公立大学法人大阪 キラリティ検出装置、キラリティ検出方法、分離装置、分離方法及びキラル物質装置
JP7393319B2 (ja) * 2020-12-03 2023-12-06 株式会社東芝 磁気センサ及び検査装置
JP7431780B2 (ja) * 2021-08-06 2024-02-15 株式会社東芝 センサ及び検査装置
JP7615070B2 (ja) * 2022-02-21 2025-01-16 株式会社東芝 センサ及び検査装置
JP7746226B2 (ja) * 2022-07-04 2025-09-30 株式会社東芝 センサ及び検査装置
JP7746233B2 (ja) * 2022-08-09 2025-09-30 株式会社東芝 磁気センサ及び検査装置
JP7761547B2 (ja) * 2022-09-01 2025-10-28 株式会社東芝 センサ及び検査装置
JP7873512B2 (ja) * 2022-12-21 2026-06-12 国立研究開発法人物質・材料研究機構 磁気センサ、リニアエンコーダ用磁気センサ及び磁気式ロータリーエンコーダ

Citations (2)

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Publication number Priority date Publication date Assignee Title
US20110285395A1 (en) 2009-10-19 2011-11-24 Nxp B.V. Magnetic field sensor
JP2018155719A (ja) 2017-03-21 2018-10-04 株式会社東芝 磁気センサ、生体細胞検出装置及び診断装置

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JPH05264695A (ja) * 1992-03-02 1993-10-12 Sharp Corp 超電導磁界測定装置
US5351005A (en) * 1992-12-31 1994-09-27 Honeywell Inc. Resetting closed-loop magnetoresistive magnetic sensor
JPH06222082A (ja) * 1993-01-26 1994-08-12 Hitachi Ltd 電流検出装置
JPH06307872A (ja) * 1993-04-28 1994-11-04 Sony Corp 地磁気方位センサー
US5729137A (en) 1996-10-22 1998-03-17 Nonvolatile Electronics, Incorporated Magnetic field sensors individualized field reducers
JPH11101861A (ja) 1997-09-25 1999-04-13 Oki Electric Ind Co Ltd 磁気抵抗効果型センサ
US6025979A (en) 1997-09-04 2000-02-15 Oki Electric Industry Co., Ltd. Magnetoresistive sensor and head with alternating magnetic bias field
JP6178961B2 (ja) * 2015-06-06 2017-08-16 国立大学法人 岡山大学 磁場計測装置及びこの磁場計測装置を用いた非破壊検査装置
CN109154640B (zh) 2016-05-24 2021-03-23 Tdk株式会社 磁传感器
JP6684854B2 (ja) 2018-05-29 2020-04-22 株式会社東芝 磁気センサ及び診断装置

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
US20110285395A1 (en) 2009-10-19 2011-11-24 Nxp B.V. Magnetic field sensor
JP2018155719A (ja) 2017-03-21 2018-10-04 株式会社東芝 磁気センサ、生体細胞検出装置及び診断装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022105354A (ja) * 2021-01-04 2022-07-14 株式会社東芝 磁気センサ及び検査装置
JP7482046B2 (ja) 2021-01-04 2024-05-13 株式会社東芝 磁気センサ及び検査装置
JP2022108403A (ja) * 2021-01-13 2022-07-26 株式会社東芝 磁気センサ及び検査装置
JP2022108344A (ja) * 2021-01-13 2022-07-26 株式会社東芝 磁気センサ及び検査装置
JP7426956B2 (ja) 2021-01-13 2024-02-02 株式会社東芝 磁気センサ及び検査装置
JP7426957B2 (ja) 2021-01-13 2024-02-02 株式会社東芝 磁気センサ及び検査装置
JP2022114102A (ja) * 2021-01-26 2022-08-05 株式会社東芝 磁気センサ及び検査装置
JP7426958B2 (ja) 2021-01-26 2024-02-02 株式会社東芝 磁気センサ及び検査装置

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