JP7279954B2 - アクチュエータ、バルブ、および流体制御装置 - Google Patents
アクチュエータ、バルブ、および流体制御装置 Download PDFInfo
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- JP7279954B2 JP7279954B2 JP2020534078A JP2020534078A JP7279954B2 JP 7279954 B2 JP7279954 B2 JP 7279954B2 JP 2020534078 A JP2020534078 A JP 2020534078A JP 2020534078 A JP2020534078 A JP 2020534078A JP 7279954 B2 JP7279954 B2 JP 7279954B2
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- lever
- stem
- displacement
- piezoelectric element
- valve
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- 239000012530 fluid Substances 0.000 title claims description 30
- 238000006073 displacement reaction Methods 0.000 claims description 54
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- 238000003199 nucleic acid amplification method Methods 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 11
- 238000003780 insertion Methods 0.000 description 10
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- 230000002093 peripheral effect Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
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- 230000005540 biological transmission Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
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- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
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- 230000008901 benefit Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
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Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/005—Piezoelectric benders
- F16K31/006—Piezoelectric benders having a free end
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/007—Piezoelectric stacks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H21/00—Gearings comprising primarily only links or levers, with or without slides
- F16H21/10—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane
- F16H21/44—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane for conveying or interconverting oscillating or reciprocating motions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/886—Additional mechanical prestressing means, e.g. springs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K2200/00—Details of valves
- F16K2200/30—Spring arrangements
- F16K2200/305—Constructional features of springs
- F16K2200/3052—Cantilever springs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrically Driven Valve-Operating Means (AREA)
Description
30:変位増幅機構、 31:第1レバー部、 31F:外端部、 31G:内端部、 31H:屈曲部、 33:中間部材、 34:第2レバー部、 34F:外端部、 34G:内端部、 34H:屈曲部、 55:流体制御装置
Claims (5)
- ケーシングと、
前記ケーシング内に設けられたステムと、
前記ステムへ向かって変位するように前記ケーシングに支持された圧電素子と、
前記圧電素子の変位を増幅させる変位増幅機構と、を備え、
前記変位増幅機構は、第1レバー部と、中間部材と、第2レバー部とを有し、
前記第1レバー部は、前記圧電素子と前記中間部材との間に位置し、前記圧電素子からの変位を受ける第1力点部と、前記ケーシングに当接して前記第1レバー部の回動の中心となる第1支点部と、前記中間部材へ変位を伝える第1作用点部と、を有し、
前記中間部材は、前記第1レバー部と前記第2レバー部との間に位置し、前記第1レバー部からの変位を受けて、前記第2レバー部に向かって変位するように構成され、
前記第2レバー部は、前記中間部材からの変位を受ける第2力点部と、前記ケーシングに当接して前記第2レバー部の回動の中心となる第2支点部と、前記ステムへ変位を伝える第2作用点部と、を有し、
前記ステムの軸に対し直交する方向において、前記第1力点部は、前記第1支点部と前記第1作用点部との間に位置し、
前記ステムの軸に対し直交する方向において、前記第2支点部は、前記第2力点部と前記第2作用点部との間に位置し、
前記第2支点部と前記第2作用点部との距離は、前記第2支点部と前記第2力点部との距離よりも長く構成され、
前記中間部材の前記第2レバー部側への変位により、前記第2レバー部の前記第2作用点部は、前記ステムに向かって変位し、前記ステムを前記圧電素子に向かって移動させる、アクチュエータ。 - 前記第1レバー部は、前記ステムの周方向に沿って配置された複数の第1レバーを有し、
前記第2レバー部は、前記ステムの周方向に沿って配置された複数の第2レバーを有する、請求項1に記載のアクチュエータ。 - 前記変位増幅機構は、前記複数の第1レバーを保持する第1リテーナと、前記複数の第2レバーを保持する第2リテーナとを備える、請求項2に記載のアクチュエータ。
- 流体通路が形成されたボディと、
前記流体通路を開閉する弁体と、
請求項1から請求項3のいずれか一項に記載のアクチュエータと、を備えるバルブ。 - 複数の流体制御機器により構成される流体制御装置であって、
前記複数の流体制御機器の少なくとも一つは、請求項4に記載のバルブである流体制御装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018143972 | 2018-07-31 | ||
JP2018143972 | 2018-07-31 | ||
PCT/JP2019/021983 WO2020026580A1 (ja) | 2018-07-31 | 2019-06-03 | アクチュエータ、バルブ、および流体制御装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020026580A1 JPWO2020026580A1 (ja) | 2021-08-02 |
JP7279954B2 true JP7279954B2 (ja) | 2023-05-23 |
Family
ID=69231680
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020534078A Active JP7279954B2 (ja) | 2018-07-31 | 2019-06-03 | アクチュエータ、バルブ、および流体制御装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US11231121B2 (ja) |
EP (1) | EP3832182B1 (ja) |
JP (1) | JP7279954B2 (ja) |
KR (1) | KR20210025647A (ja) |
CN (1) | CN112334695A (ja) |
SG (1) | SG11202100877QA (ja) |
TW (1) | TWI709705B (ja) |
WO (1) | WO2020026580A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112196757A (zh) * | 2020-10-04 | 2021-01-08 | 长春工业大学 | 一种双杠杆放大的压电叠堆柱塞泵 |
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-
2019
- 2019-06-03 KR KR1020217003193A patent/KR20210025647A/ko not_active Application Discontinuation
- 2019-06-03 EP EP19843492.0A patent/EP3832182B1/en active Active
- 2019-06-03 CN CN201980040514.0A patent/CN112334695A/zh active Pending
- 2019-06-03 JP JP2020534078A patent/JP7279954B2/ja active Active
- 2019-06-03 WO PCT/JP2019/021983 patent/WO2020026580A1/ja unknown
- 2019-06-03 SG SG11202100877QA patent/SG11202100877QA/en unknown
- 2019-06-06 TW TW108119678A patent/TWI709705B/zh active
-
2021
- 2021-01-29 US US17/162,489 patent/US11231121B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP3832182A4 (en) | 2022-05-04 |
EP3832182A1 (en) | 2021-06-09 |
SG11202100877QA (en) | 2021-03-30 |
TW202007890A (zh) | 2020-02-16 |
EP3832182B1 (en) | 2023-03-29 |
US11231121B2 (en) | 2022-01-25 |
US20210199210A1 (en) | 2021-07-01 |
JPWO2020026580A1 (ja) | 2021-08-02 |
KR20210025647A (ko) | 2021-03-09 |
CN112334695A (zh) | 2021-02-05 |
WO2020026580A1 (ja) | 2020-02-06 |
TWI709705B (zh) | 2020-11-11 |
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