SG11202100877QA - Actuator, valve device, and fluid control apparatus - Google Patents

Actuator, valve device, and fluid control apparatus

Info

Publication number
SG11202100877QA
SG11202100877QA SG11202100877QA SG11202100877QA SG11202100877QA SG 11202100877Q A SG11202100877Q A SG 11202100877QA SG 11202100877Q A SG11202100877Q A SG 11202100877QA SG 11202100877Q A SG11202100877Q A SG 11202100877QA SG 11202100877Q A SG11202100877Q A SG 11202100877QA
Authority
SG
Singapore
Prior art keywords
actuator
control apparatus
valve device
fluid control
fluid
Prior art date
Application number
SG11202100877QA
Inventor
Takashi Hirose
Masahiko Nakazawa
Nobuo Nakamura
Tomoko YUHARA
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG11202100877QA publication Critical patent/SG11202100877QA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezo-electric benders
    • F16K31/006—Piezo-electric benders having a free end
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H21/00—Gearings comprising primarily only links or levers, with or without slides
    • F16H21/10—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane
    • F16H21/44—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane for conveying or interconverting oscillating or reciprocating motions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/886—Mechanical prestressing means, e.g. springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K2200/00—Details of valves
    • F16K2200/30—Spring arrangements
    • F16K2200/305—Constructional features of springs
    • F16K2200/3052—Cantilever springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezo-electric stacks
SG11202100877QA 2018-07-31 2019-06-03 Actuator, valve device, and fluid control apparatus SG11202100877QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018143972 2018-07-31
PCT/JP2019/021983 WO2020026580A1 (en) 2018-07-31 2019-06-03 Actuator, valve, and fluid control device

Publications (1)

Publication Number Publication Date
SG11202100877QA true SG11202100877QA (en) 2021-03-30

Family

ID=69231680

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202100877QA SG11202100877QA (en) 2018-07-31 2019-06-03 Actuator, valve device, and fluid control apparatus

Country Status (8)

Country Link
US (1) US11231121B2 (en)
EP (1) EP3832182B1 (en)
JP (1) JP7279954B2 (en)
KR (1) KR20210025647A (en)
CN (1) CN112334695A (en)
SG (1) SG11202100877QA (en)
TW (1) TWI709705B (en)
WO (1) WO2020026580A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112196757A (en) * 2020-10-04 2021-01-08 长春工业大学 Piezoelectric stack plunger pump with double-lever amplification

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US4955582A (en) * 1989-08-14 1990-09-11 Baumann Hans D Weirless diaphragm valve
US5211341A (en) * 1991-04-12 1993-05-18 Siemens Automotive L.P. Fuel injector valve having a collared sphere valve element
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US5314164A (en) * 1992-07-17 1994-05-24 Mks Instruments, Inc. Pivotal diaphragm, flow control valve
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JP5129609B2 (en) * 2008-02-27 2013-01-30 株式会社フジキン Piezoelectric element driven diaphragm type control valve
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JP5978035B2 (en) * 2012-07-13 2016-08-24 株式会社フジキン Actuator for fluid controller
JP5775110B2 (en) * 2013-03-26 2015-09-09 株式会社フジキン Flow control valve for flow control device
CN103170966B (en) * 2013-04-02 2016-04-20 西安电子科技大学 A kind of complete submissive micro displacement magnifying mechanism
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KR101588771B1 (en) * 2014-05-12 2016-01-26 현대자동차 주식회사 Valve driving device using piezoelectric actuator
JP6475441B2 (en) * 2014-09-01 2019-02-27 株式会社フジキン Piezoelectric element drive type valve and flow control device provided with piezoelectric element drive type valve
CN104440817B (en) * 2014-12-04 2017-04-12 山东大学 Spatial three-dimensional micro-displacement precise positioning device
CN111051754A (en) * 2017-09-28 2020-04-21 株式会社富士金 Actuator, valve, and fluid control device

Also Published As

Publication number Publication date
TWI709705B (en) 2020-11-11
EP3832182A4 (en) 2022-05-04
CN112334695A (en) 2021-02-05
EP3832182B1 (en) 2023-03-29
WO2020026580A1 (en) 2020-02-06
US11231121B2 (en) 2022-01-25
JP7279954B2 (en) 2023-05-23
JPWO2020026580A1 (en) 2021-08-02
KR20210025647A (en) 2021-03-09
EP3832182A1 (en) 2021-06-09
US20210199210A1 (en) 2021-07-01
TW202007890A (en) 2020-02-16

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