JP7251383B2 - 振動デバイス、電子機器および移動体 - Google Patents

振動デバイス、電子機器および移動体 Download PDF

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Publication number
JP7251383B2
JP7251383B2 JP2019138430A JP2019138430A JP7251383B2 JP 7251383 B2 JP7251383 B2 JP 7251383B2 JP 2019138430 A JP2019138430 A JP 2019138430A JP 2019138430 A JP2019138430 A JP 2019138430A JP 7251383 B2 JP7251383 B2 JP 7251383B2
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Japan
Prior art keywords
detection
wiring
support
drive
electrode
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JP2019138430A
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Japanese (ja)
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JP2021021636A5 (https=
JP2021021636A (ja
Inventor
竜太 西澤
啓一 山口
誠一郎 小倉
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2019138430A priority Critical patent/JP7251383B2/ja
Priority to CN202010729813.XA priority patent/CN112311348B/zh
Priority to CN202310559452.2A priority patent/CN116599482A/zh
Priority to US16/940,745 priority patent/US11340070B2/en
Publication of JP2021021636A publication Critical patent/JP2021021636A/ja
Priority to US17/720,404 priority patent/US20220236058A1/en
Publication of JP2021021636A5 publication Critical patent/JP2021021636A5/ja
Priority to JP2023045053A priority patent/JP7533663B2/ja
Application granted granted Critical
Publication of JP7251383B2 publication Critical patent/JP7251383B2/ja
Priority to US19/359,025 priority patent/US20260036426A1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5663—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628—Manufacturing; Trimming; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
JP2019138430A 2019-07-29 2019-07-29 振動デバイス、電子機器および移動体 Active JP7251383B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2019138430A JP7251383B2 (ja) 2019-07-29 2019-07-29 振動デバイス、電子機器および移動体
CN202010729813.XA CN112311348B (zh) 2019-07-29 2020-07-27 振动器件、电子设备以及移动体
CN202310559452.2A CN116599482A (zh) 2019-07-29 2020-07-27 振动器件、电子设备以及移动体
US16/940,745 US11340070B2 (en) 2019-07-29 2020-07-28 Vibrator device, electronic apparatus, and vehicle
US17/720,404 US20220236058A1 (en) 2019-07-29 2022-04-14 Vibrator Device, Electronic Apparatus, And Vehicle
JP2023045053A JP7533663B2 (ja) 2019-07-29 2023-03-22 振動デバイス、電子機器および移動体
US19/359,025 US20260036426A1 (en) 2019-07-29 2025-10-15 Vibrator Device, Electronic Apparatus, And Vehicle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019138430A JP7251383B2 (ja) 2019-07-29 2019-07-29 振動デバイス、電子機器および移動体

Related Child Applications (1)

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JP2023045053A Division JP7533663B2 (ja) 2019-07-29 2023-03-22 振動デバイス、電子機器および移動体

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JP2021021636A JP2021021636A (ja) 2021-02-18
JP2021021636A5 JP2021021636A5 (https=) 2022-06-30
JP7251383B2 true JP7251383B2 (ja) 2023-04-04

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JP2023045053A Active JP7533663B2 (ja) 2019-07-29 2023-03-22 振動デバイス、電子機器および移動体

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7251383B2 (ja) * 2019-07-29 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7251385B2 (ja) * 2019-07-30 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7415444B2 (ja) * 2019-10-30 2024-01-17 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016085182A (ja) 2014-10-28 2016-05-19 セイコーエプソン株式会社 電子デバイス、電子機器および移動体
JP2017015584A (ja) 2015-07-02 2017-01-19 セイコーエプソン株式会社 電子デバイス、電子デバイスの製造方法、電子機器、および移動体
JP2017211255A (ja) 2016-05-25 2017-11-30 セイコーエプソン株式会社 電子デバイス、電子デバイスの製造方法、物理量センサー、電子機器および移動体
JP2018136255A (ja) 2017-02-23 2018-08-30 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体

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Publication number Priority date Publication date Assignee Title
WO2007125612A1 (ja) * 2006-04-26 2007-11-08 Murata Manufacturing Co., Ltd. 振動ジャイロ
JP2010223774A (ja) * 2009-03-24 2010-10-07 Seiko Epson Corp 物理量検出装置
JP5838749B2 (ja) * 2011-11-16 2016-01-06 セイコーエプソン株式会社 振動子、振動デバイスおよび電子機器
JP2013156127A (ja) * 2012-01-30 2013-08-15 Seiko Epson Corp 振動片、振動デバイス、物理量検出装置、および電子機器
DE102012201486B4 (de) * 2012-02-02 2020-08-06 Robert Bosch Gmbh Dämpfungsvorrichtung für eine mikromechanische Sensoreinrichtung
JP2014089049A (ja) 2012-10-29 2014-05-15 Tdk Corp 角速度センサ
JP2015087251A (ja) * 2013-10-30 2015-05-07 セイコーエプソン株式会社 振動素子、物理量検出装置、電子機器、および移動体
JP6357758B2 (ja) * 2013-11-25 2018-07-18 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
US9568313B2 (en) * 2014-10-28 2017-02-14 Seiko Epson Corporation Electronic device, electronic apparatus, and moving object
JP6668626B2 (ja) * 2015-07-16 2020-03-18 セイコーエプソン株式会社 電子デバイス、電子機器、および移動体
JP6957921B2 (ja) 2017-03-23 2021-11-02 セイコーエプソン株式会社 振動デバイス、角速度センサー、電子機器および移動体
JP6855961B2 (ja) * 2017-06-30 2021-04-07 セイコーエプソン株式会社 振動素子の周波数調整方法、振動素子、振動子、電子機器および移動体
JP7251383B2 (ja) * 2019-07-29 2023-04-04 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016085182A (ja) 2014-10-28 2016-05-19 セイコーエプソン株式会社 電子デバイス、電子機器および移動体
JP2017015584A (ja) 2015-07-02 2017-01-19 セイコーエプソン株式会社 電子デバイス、電子デバイスの製造方法、電子機器、および移動体
JP2017211255A (ja) 2016-05-25 2017-11-30 セイコーエプソン株式会社 電子デバイス、電子デバイスの製造方法、物理量センサー、電子機器および移動体
JP2018136255A (ja) 2017-02-23 2018-08-30 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体

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Publication number Publication date
JP2023076519A (ja) 2023-06-01
US20220236058A1 (en) 2022-07-28
JP7533663B2 (ja) 2024-08-14
US11340070B2 (en) 2022-05-24
US20260036426A1 (en) 2026-02-05
US20210033398A1 (en) 2021-02-04
JP2021021636A (ja) 2021-02-18
CN112311348B (zh) 2023-06-06
CN112311348A (zh) 2021-02-02
CN116599482A (zh) 2023-08-15

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