JP7240174B2 - 高温半導体処理におけるクランピングのための静電チャック及びそれを製造する方法 - Google Patents
高温半導体処理におけるクランピングのための静電チャック及びそれを製造する方法 Download PDFInfo
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- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
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- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
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- B23K2101/36—Electric or electronic devices
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- B23K2103/00—Materials to be soldered, welded or cut
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- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
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Description
しかし、従来、単一J-Rクランプは、誘電材料層の抵抗率が温度と共に変化することで両方の極端な温度に適応することができない。従って、従来のJ-Rクランプに示すクランピング力は、温度と共に劇的に変化し、潜在的な望ましくないクランピング効果がもたらされる。
Claims (15)
- 基板の半導体処理に使用するための静電チャックであって、
前記基板を支持するように構成されたサファイアの最上プレート層と、セラミックの下側プレート層と、周縁とを有するプレートアセンブリ、を備え、
前記プレートアセンブリは、前記周縁で、前記サファイアの最上プレート層と前記セラミックの下側プレート層の間にあり、半導体処理環境の腐食性処理化学作用に耐えることができる89重量%よりも多い金属アルミニウムの気密密封アルミニウム接合部と、前記サファイアの最上プレート層と前記セラミックの下側プレート層の間に配置され前記基板を前記プレートアセンブリにクランプするクランプ電極と、を有し、
前記サファイアの層が500ミクロンの厚さを有し、
前記サファイヤの層が500℃~750℃の温度範囲でJohnsen-Rahbekクランプを提供できるように構成されている、
ことを特徴とする静電チャック。 - 前記クランプ電極は、99重量%よりも多い金属アルミニウムから構成される群から選択された材料のものである、
請求項1に記載の静電チャック。 - 前記気密密封アルミニウム接合部は、99重量%よりも多い金属アルミニウムである、
請求項1に記載の静電チャック。 - 前記プレートアセンブリは、底部を有し、
静電チャックが、前記プレートアセンブリの前記底部に接合されたシャフトを更に備えている、
請求項1に記載の静電チャック。 - 前記プレートアセンブリの底部と前記シャフトの間にあり、半導体処理環境の腐食性処理化学作用に耐えることができる追加の気密密封アルミニウム接合部を更に備えている、
請求項4に記載の静電チャック。 - 前記下側プレート層の前記セラミックは、酸化アルミニウム及び窒化アルミニウムから構成される群から選択される、
請求項1に記載の静電チャック。 - 基板の半導体処理に使用するための静電チャックであって、
前記基板を支持するように構成され500℃から750℃の温度範囲にわたって10E9ohm-cmから10E11ohm-cmの範囲のバルク抵抗率を有するサファイアの最上プレート層と、セラミックの下側プレート層と、周縁と、を有するプレートアセンブリを備え、
前記プレートアセンブリは、前記周縁で、前記最上プレート層と前記下側プレート層の間にあり、半導体処理環境の腐食性処理化学作用に耐えることができる気密密封アルミニウム接合部と、前記最上プレート層と下側プレート層の間に配置され、前記プレートアセンブリに対する前記基板のJohnsen-Rahbekクランプを提供するクランプ電極とを有し、
前記サファイアの最上プレート層が、500ミクロンの厚さを有している、
ことを特徴とする静電チャック。 - 前記気密密封接合部は、89重量%よりも多い金属アルミニウム及び99重量%よりも多い金属アルミニウムから構成される群から選択された材料のものである、
請求項7に記載の静電チャック。 - 前記プレートアセンブリは、底部を有し、
静電チャックが、前記プレートアセンブリの前記底部に接合されたシャフトを更に備えている、
請求項7に記載の静電チャック。 - 半導体処理に使用される多層プレートデバイスを製造する方法であって、
サファイアの最上プレート層と、セラミックの下側プレート層と、前記サファイアの最上プレート層と前記セラミックの下側プレート層間に配置され89重量%アルミニウムよりも多いアルミニウムを含むろう付け層とを含む複数のプレート構成要素をスタックに配置する段階であって、前記サファイアの層が、500ミクロンの厚さを有し、前記サファイアの層が500℃~750℃の温度範囲でJohnsen-Rahbekクランプを提供できるように構成されている、段階と、
前記サファイア最上プレート層を前記セラミックの下側プレート層に接合する段階であって、
前記構成要素を処理チャンバ内に置く段階、
前記処理チャンバから酸素を除去する段階、及び
前記プレート構成要素のスタックを加熱し、半導体処理環境の腐食性処理化学作用に耐えることができる気密密封アルミニウム接合部で、前記サファイアの最上プレート層を前記セラミックの下側プレート層に接合する段階を含む接合段階と、
を含むことを特徴とする方法。 - 前記処理チャンバから酸素を除去する前記段階は、前記プレート構成要素のスタックを前記加熱する段階中に真空圧力が1×10E-4よりも低い真空を該プレート構成要素のスタックに印加する段階を含む、
請求項10に記載の方法。 - 前記プレート構成要素のスタックを加熱する前記段階は、加圧された該プレート構成要素のスタックを800℃と1200℃の間の第1の温度まで加熱する段階を含む、
請求項11に記載の方法。 - 前記アルミニウム接合部は、前記サファイアの層とセラミックの層との間に気密シールを形成し、1×10E-9sccmHe/secの真空漏れ率を有している、
請求項1に記載の静電チャック。 - 前記アルミニウム接合部は、前記サファイアの層とセラミックの層との間に気密シールを形成し、1×10E-9sccmHe/secの真空漏れ率を有している、
請求項7に記載の静電チャック。 - 前記アルミニウム接合部は、前記サファイアの層とセラミックの層との間に気密シールを形成し、1×10E-9sccmHe/secの真空漏れ率を有している、
請求項10に記載の方法。
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US10593584B2 (en) | 2020-03-17 |
EP3371881A4 (en) | 2019-05-15 |
KR20180075667A (ko) | 2018-07-04 |
CN108476006B (zh) | 2022-04-15 |
EP3371881A1 (en) | 2018-09-12 |
US20170263486A1 (en) | 2017-09-14 |
US20200357676A1 (en) | 2020-11-12 |
CN108476006A (zh) | 2018-08-31 |
JP2018537002A (ja) | 2018-12-13 |
WO2017079338A1 (en) | 2017-05-11 |
US11222804B2 (en) | 2022-01-11 |
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