JP7226759B2 - スパッタ装置用カソード - Google Patents
スパッタ装置用カソード Download PDFInfo
- Publication number
- JP7226759B2 JP7226759B2 JP2018096684A JP2018096684A JP7226759B2 JP 7226759 B2 JP7226759 B2 JP 7226759B2 JP 2018096684 A JP2018096684 A JP 2018096684A JP 2018096684 A JP2018096684 A JP 2018096684A JP 7226759 B2 JP7226759 B2 JP 7226759B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- field distribution
- yoke
- cathode
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004544 sputter deposition Methods 0.000 title claims description 114
- 230000005291 magnetic effect Effects 0.000 claims description 235
- 238000009826 distribution Methods 0.000 claims description 187
- 239000002131 composite material Substances 0.000 claims description 32
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 239000010409 thin film Substances 0.000 description 30
- 238000000151 deposition Methods 0.000 description 23
- 230000008021 deposition Effects 0.000 description 21
- 238000010586 diagram Methods 0.000 description 21
- 239000000758 substrate Substances 0.000 description 21
- 230000033001 locomotion Effects 0.000 description 16
- 239000000463 material Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 11
- 239000013077 target material Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000007787 solid Substances 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- 239000000696 magnetic material Substances 0.000 description 8
- 238000001755 magnetron sputter deposition Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 239000010408 film Substances 0.000 description 7
- 239000010410 layer Substances 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 240000004050 Pentaglottis sempervirens Species 0.000 description 5
- 235000004522 Pentaglottis sempervirens Nutrition 0.000 description 5
- 229910006404 SnO 2 Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000003302 ferromagnetic material Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000026058 directional locomotion Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000036470 plasma concentration Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018096684A JP7226759B2 (ja) | 2018-05-18 | 2018-05-18 | スパッタ装置用カソード |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018096684A JP7226759B2 (ja) | 2018-05-18 | 2018-05-18 | スパッタ装置用カソード |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019199646A JP2019199646A (ja) | 2019-11-21 |
| JP2019199646A5 JP2019199646A5 (enExample) | 2021-07-26 |
| JP7226759B2 true JP7226759B2 (ja) | 2023-02-21 |
Family
ID=68613016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018096684A Active JP7226759B2 (ja) | 2018-05-18 | 2018-05-18 | スパッタ装置用カソード |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7226759B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7344929B2 (ja) * | 2021-06-14 | 2023-09-14 | キヤノントッキ株式会社 | 成膜装置、成膜方法、及び電子デバイスの製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008149635A1 (ja) | 2007-06-01 | 2008-12-11 | Yamaguchi University | 薄膜作製用スパッタ装置 |
| WO2009139434A1 (ja) | 2008-05-15 | 2009-11-19 | 国立大学法人山口大学 | 薄膜作製用スパッタ装置及び薄膜作製方法 |
-
2018
- 2018-05-18 JP JP2018096684A patent/JP7226759B2/ja active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008149635A1 (ja) | 2007-06-01 | 2008-12-11 | Yamaguchi University | 薄膜作製用スパッタ装置 |
| WO2009139434A1 (ja) | 2008-05-15 | 2009-11-19 | 国立大学法人山口大学 | 薄膜作製用スパッタ装置及び薄膜作製方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2019199646A (ja) | 2019-11-21 |
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